Process for producing flexible organic-inorganic laminates

Patent metadata

Field	Value
Publication number	US-2018187306-A1
Application number	US-201515316661-A
Country	US
Kind code	A1
Filing date	May 7, 2015
Priority date	Jun 12, 2014
Publication date	Jul 5, 2018
Grant date	—

Abstract

The present invention is in the field of processes for producing flexible organic-inorganic laminates as well as barrier films comprising flexible organic-inorganic laminates by atomic layer deposition. In particular the present invention relates to a process for producing a laminate comprising more than once the sequence comprising: (a) depositing an inorganic layer by performing 4 to 150 cycles of an atomic layer deposition process, and (b) depositing an organic layer comprising sulfur by a molecular layer deposition process.

First claim

1 . A process for producing a laminate, the process comprising, more than once, a sequence comprising:
(a) depositing an inorganic layer by performing 4 to 150 cycles of an atomic layer deposition process, and (b) depositing an organic layer comprising sulfur by a molecular layer deposition process.

2 . The process according to claim 1 wherein the molecular layer deposition process comprises depositing the organic layer with a thiol.

3 . The process according to claim 1 , wherein the molecular layer deposition process comprises depositing the organic layer with a dithiol.

4 . The process according to claim 1 , wherein the molecular layer deposition process comprises depositing the organic layer with an aromatic thiol.

5 . The process according to claim 1 , wherein the atomic layer deposition process comprises depositing the inorganic layer with an Al-containing compound.

6 . The process according to claim 1 , wherein the process comprises performing the sequence comprising (a) and (b) at least 30 times.

7 . A laminate comprising, more than once, a sequence comprising
(a) an inorganic layer having a thickness of 0.4 to 15 nm and (b) a sulfur-comprising organic layer.

8 . The laminate according to claim 7 wherein the organic layer comprises sulfur in an oxidation state −2, −1 or 0.

9 . The laminate according to claim 7 ,
wherein the inorganic layer comprises AlO x (OH) y , wherein 0≤x≤1.5; 0≤y≤3 and 2 x+y=3.

10 . The laminate according to claim 7 , comprising at least 30 of the inorganic layers (a) alternating with at least 30 of the organic layers (b).

11 . A barrier film comprising the laminate according to claim 7 .

12 . The barrier film according to claim 11 wherein the barrier film further comprises a polymeric substrate.

13 . The barrier film according to claim 11 wherein the barrier film further comprises a planarization layer.

14 . A method of encapsulating, packaging, or passivating an object, the method comprising:
encapsulating, packaging, or passivating the object with the barrier film according to claim 11 .

15 . An electronic device comprising the barrier film according to claim 11 .

16 . The barrier film according to claim 11 , wherein a water vapor transmission rate after drying at 70% relative humidity at 70° C. for 480 h is smaller than 10 −5 g/m 2 d.

17 . The barrier film according to claim 11 , wherein a water vapor transmission rate after bending with a radius of 1.5 cm and drying at 70% relative humidity at 70° C. for 480 h is smaller than 10 −2 g/m 2 d.

18 . The barrier film according to claim 11 , wherein a water vapor transmission rate after bending with a radius of 1.5 cm and drying at 70% relative humidity at 70° C. for 480 h is not more than 1000 times higher than a water vapor transmission rate after drying at 70% relative humidity at 70° C. for 480 h without bending.

Assignees

• Basf Coatings Gmbh

Inventors

• Ahlf Maraike
• Eickemeyer Felix
• Löffler Daniel
• Klotz Stephan
• FRANK Jürgen
• Sung Myung Mo
• Yoon Kwan Hyuck

Classifications

• C23C16/403

  of aluminium, magnesium or beryllium · CPC title

• C23C16/0227

  by cleaning or etching · CPC title

• C23C16/45529 Primary

  specially adapted for making a layer stack of alternating different compositions or gradient compositions · CPC title

• C23C28/00

  Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D · CPC title

• C23C16/30

  Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides · CPC title