Ceramic electrostatic chuck having a v-shape seal band

Patent metadata

Field	Value
Publication number	US-2018151402-A1
Application number	US-201615361365-A
Country	US
Kind code	A1
Filing date	Nov 25, 2016
Priority date	Nov 25, 2016
Publication date	May 31, 2018
Grant date	—

Abstract

Implementations described herein provide a substrate support assembly that includes a seal band. The seal band protects an adhesive layer that is disposed between an electrostatic chuck (ESC) and a cooling plate of the substrate support assembly. In one example, a substrate support assembly includes an electrostatic chuck and a cooling plate. A bonding layer secures a bottom surface of the electrostatic chuck to a top surface of the cooling plate. The bonding layer has an adhesive layer and a seal band. The seal band circumscribes and protects the adhesive layer. The seal band has a ring shaped body. The ring shaped body has a top surface connected to a bottom surface by an inner surface and an outer surface. The top surface and the bottom surface angled less than 85 degrees from the inner surface. The outer surface has an indent formed therein.

First claim

What is claimed is:

1 . A substrate support assembly, comprising:
an electrostatic chuck having a workpiece supporting surface and a bottom surface; a cooling plate having a top surface; and a bonding layer securing the bottom surface of the electrostatic chuck and the top surface of the cooling plate, wherein the bonding layer comprises:
an adhesive layer; and
a seal band circumscribing the adhesive layer and contacting the electrostatic chuck and the cooling plate, the seal band having a ring shaped body, the ring shaped body comprising:
an inner surface;
a top surface and a bottom surface connected by the inner surface, the top surface and the bottom surface angled more than 110° from the inner surface; and
an outer surface having a indent formed therein, the outer surface connecting the top surface to the bottom surface.

2 . The substrate support assembly of claim 1 , wherein the ring shaped body of the seal band further comprises:
a profile having a V-shaped.

3 . The substrate support assembly of claim 1 , wherein the seal band further comprises:
a diameter of between about 306 mm and about 310 mm.

4 . The substrate support assembly of claim 3 , wherein the ring shaped body may be elongated to about 160% prior to breaking.

5 . The substrate support assembly of claim 1 , wherein the ring shaped body has a Shore D hardness of between about 60 and 80.

6 . The substrate support assembly of claim 1 , wherein the ring shaped body has a tensile strength between about 10 Mpa and about 15 Mpa.

7 . The substrate support assembly of claim 1 , wherein the ring shaped body is formed from tetrafluoro ethylene/propylene or a perfluoroelastomer.

8 . The substrate support assembly of claim 7 , wherein a material of the seal band is void of fillers and resistant to fluorine and oxygen chemistries.

9 . The substrate support assembly of claim 1 , wherein a compression load on the seal band at 0° Celsius is about 0.23 N/mm, at 25° Celsius the compression load on the seal band is about 0.26 N/mm, and at 50° Celsius the compression load on the seal band is about 0.15 N/mm.

10 . The substrate support assembly of claim 1 further comprising:
a notch formed between an outer periphery of the adhesive layer and the outer diameter of the electrostatic chuck, wherein the seal band is disposed in the notch.

11 . The substrate support assembly of claim 1 , wherein the diameter of the seal band is less than the outer diameter of the electrostatic chuck.

12 . The substrate support assembly of claim 11 , wherein the diameter of the seal band is less than the outer diameter of the cooling plate.

13 . The substrate support assembly of claim 1 , wherein the indent has a depth between about 0.30 mm and about 0.50 mm.

14 . The substrate support assembly of claim 1 , wherein the seal band is symmetrical through an imaginary line bifurcating the indent and inner surface.

15 . A substrate support assembly, comprising:
an electrostatic chuck having a workpiece supporting surface, a chuck diameter and a bottom surface; a cooling plate having a top surface and a cooling plate diameter; and a bonding layer securing the bottom surface of the electrostatic chuck and the top surface of the cooling plate, wherein the bonding layer comprises:
an adhesive layer; and
a seal band circumscribing the adhesive layer and contacting the electrostatic chuck and the cooling plate, the seal band having a ring shaped body with an outer diameter less than the chuck diameter or cooling plate diameter and between about 306 mm and about 310 mm, the ring shaped body formed from a perfluoroelastomer void of fillers having a Shore D hardness between about 60 and 80 and a tensile strength between 10 Mpa and about 15 Mpa, the ring shaped body comprising:
an inner surface;
a top surface and a bottom surface connected by the inner surface, the top surface and the bottom surface angled more than 110° from the inner surface; and
an outer surface having a indent formed therein, the outer surface connecting the top surface to the bottom surface, wherein the indent forms a profile in the seal band having a V-shape.

16 . The substrate support assembly of claim 15 , wherein the ring shaped body of the seal band further comprises:
a profile having a V-shaped.

17 . The substrate support assembly of claim 15 , wherein a compression load on the seal band at 0° Celsius is about 0.23 N/mm, at 25° Celsius the compression load on the seal band is about 0.26 N/mm, and at 50° Celsius the compression load on the seal band is about 0.15 N/mm.

18 . The substrate support assembly of claim 15 further comprising:
a notch formed between an outer periphery of the adhesive layer and the outer diameter of the electrostatic chuck, wherein the seal band is disposed in the notch.

19 . The substrate support assembly of claim 15 , wherein the indent has a depth between about 0.30 mm and about 0.50 mm.

20 . The substrate support assembly of claim 1 , wherein the seal band is symmetrical through an imaginary line bifurcating the indent and inner surface.

Assignees

• Applied Materials Inc

Inventors

• Noorbakhsh Hamid

Classifications

• H10P72/0432

  mainly by conduction · CPC title

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/0441

  Apparatus for sealing, encapsulating, glassing, decapsulating or the like · CPC title

• H10P72/0434 Primary

  mainly by convection · CPC title

• H10P72/72 Primary

  using electrostatic chucks · CPC title