Inertial sensor

Patent metadata

Field	Value
Publication number	US-2018045752-A1
Application number	US-201715724385-A
Country	US
Kind code	A1
Filing date	Oct 4, 2017
Priority date	Sep 20, 2013
Publication date	Feb 15, 2018
Grant date	—

Abstract

According to one embodiment, an inertial sensor includes a base portion, a weight portion, a connection portion, and a first sensing element unit. The connection portion connects the weight portion and the base portion and is capable of being deformed in accordance with a change in relative position of the weight portion with respect to the position of the base portion. The first sensing element unit is provided on a first portion of the connection portion and includes a first magnetic layer, a second magnetic layer, and a nonmagnetic first intermediate layer. The nonmagnetic first intermediate layer is provided between the first magnetic layer and the second magnetic layer.

First claim

1 .- 20 . (canceled)

21 . A sensor comprising:
a first member; a second member connected with the first member, the second member being deformable; a first sensing element unit provided at a first portion of the second member and including a first magnetic layer, a second magnetic layer, and a first intermediate layer, the first intermediate layer being provided between the first magnetic layer and the second magnetic layer and being nonmagnetic; and a second sensing element unit provided at a second portion of the second member and including a third magnetic layer, a fourth magnetic layer, and a second intermediate layer, the second intermediate layer being provided between the third magnetic layer and the fourth magnetic layer and being nonmagnetic.

22 . The sensor according to claim 21 , wherein a direction from the first sensing element unit toward the second sensing element unit crosses a first direction from the first member toward the second member.

23 . The sensor according to claim 21 , wherein the first sensing element unit and the second sensing element unit are electrically connected in series.

24 . The sensor according to claim 21 , further comprising:
a third sensing element unit provided at a third portion of the second member and including a fifth magnetic layer, a sixth magnetic layer, and a third intermediate layer, the third intermediate layer being provided between the fifth magnetic layer and the sixth magnetic layer and being nonmagnetic, and a direction from the first sensing element unit toward the third sensing element unit is along a first direction from the first member toward the second member.

25 . The sensor according to claim 21 , further comprising a third member:
the second member connecting the first member and the third member, and the second member being configured to be deformed in accordance with a change in a relative position of the third member with respect to a position of the first member.

26 . The sensor according to claim 21 , wherein at least a part of the first magnetic layer includes iron and has an amorphous structure.

27 . The sensor according to claim 26 , wherein the at least the part of the first magnetic layer includes boron.

28 . The sensor according to claim 21 , wherein the second member includes a first side extending along a first direction from the first member toward the second member.

29 . The sensor according to claim 28 , wherein
the second member further includes a second side extending along the first direction.

Assignees

• Toshiba Kk

Inventors

• Fukuzawa Hideaki
• Hara Michiko
• Fuji Yoshihiko
• Higashi Yoshihiro
• Kaji Shiori
• Hori Akio
• Nagata Tomohiko
• Yuzawa Akiko
• Kikitsu Akira

Classifications

• G01P2015/0805

  being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration · CPC title

• G01P15/0802

  Details · CPC title

• G01P15/105 Primary

  by magnetically sensitive devices · CPC title