Turntable cloth peeling jig

Patent metadata

Field	Value
Publication number	US-2018009081-A1
Application number	US-201715638501-A
Country	US
Kind code	A1
Filing date	Jun 30, 2017
Priority date	Jul 8, 2016
Publication date	Jan 11, 2018
Grant date	—

Abstract

Disclosed is a turntable cloth peeling jig including: a cylindrical winding cylinder including a slit formed on an outer periphery of the cylindrical winding cylinder and extending in an axial direction thereof; a cloth clamping member disposed inside the winding cylinder and configured to clamp an outer peripheral edge of a cloth inserted into the slit; an extension bar attached to one end portion of the winding cylinder so as to extend coaxially therewith; an engaging portion provided at a tip end portion of the extension bar and engaged with a rotation jig configured to rotate the winding cylinder; and a handle provided in the engaging portion and configured to support the winding cylinder when rotating the rotating jig.

First claim

What is claimed is:

1 . A turntable cloth peeling jig comprising:
a cylindrical winding cylinder including a slit formed on an outer periphery of the cylindrical winding cylinder and extending in an axial direction thereof; a cloth clamping member disposed inside the winding cylinder and configured to clamp an outer peripheral edge of a cloth inserted into the slit; an extension bar attached to one end portion of the winding cylinder so as to extend coaxially therewith; an engaging portion provided at a tip end portion of the extension bar and engaged with a rotation jig configured to rotate the winding cylinder; and a handle provided in the engaging portion and configured to support the winding cylinder when rotating the rotating jig.

2 . The turntable cloth peeling jig of claim 1 , wherein the engaging portion is a gear wrench that reduces a rotational torque of the rotating jig.

3 . The turntable cloth peeling jig of claim 1 , wherein the cloth clamping member includes an upper member and a lower member that clamp the outer peripheral edge of the cloth from an upper side and a lower side thereof, and
the upper and lower members include mutually engageable teeth provided on mutually facing surfaces thereof.

4 . The turntable cloth peeling jig of claim 1 , wherein the cloth clamping member includes an upper member and a lower member that clamp the outer peripheral edge of the cloth from an upper side and a lower side thereof, and
one of the upper and lower members includes a pin configured to break through the cloth when the outer peripheral edge of the cloth is clamped, and a remaining one of the upper and lower members includes a pin insertion hole into which the pin is inserted.

5 . The turntable cloth peeling jig of claim 1 , wherein an axial length of the extension bar is longer than an axial length of the winding cylinder.

6 . A turntable cloth peeling jig comprising:
a cloth clamping member configured to clamp an outer peripheral edge of a cloth; and a handle configured to pull the cloth clamping member, wherein the cloth clamping member includes an upper member and a lower member that clamp the outer peripheral edge of the cloth from an upper side and a lower side thereof, the upper and lower members include mutually engageable teeth provided on mutually facing surfaces thereof, and the teeth are provided over 5 cm or more in a longitudinal direction of the upper and lower members.

7 . The turntable cloth peeling jig of claim 6 , wherein one of the upper and lower members includes a pin for breaking through the cloth when the outer peripheral edge of the cloth is clamped, and a remaining one the upper and lower members includes a pin insertion hole into which the pin is inserted.

8 . The turntable cloth peeling jig of claim 6 , wherein at least a part of each of the upper member and the lower member is covered with a cover made of a soft member.

9 . The turntable cloth peeling jig of claim 6 , further comprising:
an extension bar configured to connect the cloth clamping member and the handle, wherein one end of the extension bar is rotatably attached to a longitudinal end portion of the cloth clamping member, and another end of the extension bar is rotatably attached to a longitudinal end portion of the handle.

10 . The turntable cloth peeling jig of claim 6 , wherein the handle has a U-shape and is directly fixed to the cloth clamping member.

Assignees

• Ebara Corp

Inventors

• Sotozaki Hiroshi
• Saito Kenichiro
• Sone Tadakazu

Classifications

• H10P90/129

  by polishing · CPC title

• H10P70/54

  Cleaning of wafer edges · CPC title

• H10P52/00

  Grinding, lapping or polishing of wafers, substrates or parts of devices · CPC title

• Y10T156/1978

  Delaminating bending means · CPC title

• Y10T156/195

  Delaminating roller means · CPC title