Adhesion-promoting surface

Patent metadata

Field	Value
Publication number	US-2017342580-A1
Application number	US-201715674618-A
Country	US
Kind code	A1
Filing date	Aug 11, 2017
Priority date	Oct 21, 2010
Publication date	Nov 30, 2017
Grant date	—

Abstract

A method of adhering a cover layer to a substrate includes forming an array of nano-structures on a substrate. A flowable material is applied to the substrate, the flowable material substantially enveloping the nano-structures on the substrate. The flowable material is solidified to form a cover layer on the substrate, the cover layer being anchored to the substrate via the nano-structures.

First claim

What is claimed is:

1 . A method of adhering a cover layer to a substrate, the method comprising:
forming an array of nano-structures on a substrate; applying a flowable material to the substrate, the flowable material substantially enveloping the nano-structures on the substrate; and solidifying the flowable material to form a cover layer on the substrate, the cover layer being anchored to the substrate via the nano-structures.

2 . The method of claim 1 , wherein forming an array of nano-structures includes:
forming a template on the substrate, the template defining nano-pores having a first width; partially filling the nano-pores to define stem portions of a first thickness corresponding to the first width; re-shaping the nano-pores to define re-shaped nano-pore sections having a second width greater than the first width; at least partially filling the re-shaped nano-pore sections to define cap portions of a second thickness corresponding to the second width; and removing the template.

3 . The method of claim 2 , wherein partially filling the nano-pores includes:
forming a layer of a first oxidizable material; and anodizing the layer of first oxidizable material to grow oxide from the first oxidizable material into the nano-pores.

4 . The method of claim 3 , wherein at least partially filling the re-shaped nano-pore sections includes further anodizing the first oxidizable material to grow oxide into the re-shaped nano-pore sections.

5 . The method of claim 4 , wherein forming a template includes:
forming a layer of a second oxidizable material; and anodizing the layer of second oxidizable material to define the nano-pores.

6 . The method of claim 1 , wherein forming an array of nano-structures on a substrate includes forming a first set of orthogonal nano-structures on a first surface region and forming a second set of orthogonal nano-structures on a second surface region, the first region intersecting the second region such that the cover layer is locked in place upon solidifying the flowable material to form the cover layer.

7 . A method of adhering a cover layer to a substrate, the method comprising:
forming an array of nano-structures on a substrate having a surface, wherein each of the nano-structures includes a stem portion extending from the surface of the substrate and having a first thickness, and includes a cap portion extending from the stem portion and having a second thickness greater than the first thickness to mechanically anchor a cover layer to the substrate; applying a flowable material to the substrate, the flowable material substantially enveloping the nano-structures on the substrate; and solidifying the flowable material to form the cover layer on the substrate, the cover layer being mechanically anchored to the substrate via the nano-structures; wherein the substrate is formed from silicon, glass, quartz, alumina, or a combination thereof; wherein the nano-structures comprise an anodized tantalum oxide; and wherein the flowable material comprises an epoxy.

8 . The method of claim 7 , wherein forming an array of nano-structures includes:
forming a template on the substrate, the template defining nano-pores having a first width; partially filling the nano-pores to define the stem portions of the first thickness corresponding to the first width; re-shaping the nano-pores to define re-shaped nano-pore sections having a second width greater than the first width; at least partially filling the re-shaped nano-pore sections to define the cap portions of the second thickness corresponding to the second width; and removing the template.

9 . The method of claim 8 , wherein partially filling the nano-pores includes:
forming a layer of a first oxidizable material, the first oxidizable material being tantalum; and anodizing the layer of first oxidizable material to grow tantalum oxide from the first oxidizable material into the nano-pores.

10 . The method of claim 9 , wherein at least partially filling the re-shaped nano-pore sections includes further anodizing the first oxidizable material to grow tantalum oxide into the re-shaped nano-pore sections.

11 . The method of claim 10 , wherein forming a template includes:
forming a layer of a second oxidizable material; and anodizing the layer of second oxidizable material to define the nano-pores.

12 . The method of claim 7 , wherein forming an array of nano-structures on a substrate includes forming a first set of orthogonal nano-structures on a first surface region and forming a second set of orthogonal nano-structures on a second surface region, the first region intersecting the second region such that the cover layer is locked in place upon solidifying the flowable material to form the cover layer.

13 . A method of adhering a cover layer to a substrate, the method comprising:
depositing a first oxidizable material onto the substrate; depositing a second oxidizable material onto the first oxidizable material; anodizing the second oxidizable material to form a porous oxide having nano-pores in the porous oxide; anodizing the first oxidizable material so as grow an oxide of the first oxidizable material into the nano-pores; removing the porous oxide, thereby yielding an array of spaced nano-structures extending from the substrate; applying a flowable material to the substrate, the flowable material flowing between the spaced nano-structures; and solidifying the flowable material to form a cover layer on the substrate, the cover layer being anchored to the substrate via the nano-structures.

14 . The method of claim 13 , wherein anodizing the first oxidizable material includes growing a first set of nano-structures on a first surface region of the substrate and growing a second set of nano-structures on a second surface region of the substrate, the first region intersecting the second region such that the cover layer is locked in place upon solidifying the flowable material to form the cover layer.

15 . The method of claim 13 , wherein anodizing the first oxidizable material includes growing an oxide into the nano-pores to define stem portions having a first width, broadening cap-forming sections of the nano-pores, and growing oxide into the nano-pores to define cap portions having a second width greater than the first width, thereby defining nano-structures having cap portions that anchor the cover layer to the substrate upon solidifying the flowable material to form the cover layer.

16 . The method of claim 13 , wherein solidifying the flowable material includes chemically bonding the cover layer to the nano-structures.

17 . The method of claim 13 , wherein:
the first oxidizable material is tantalum; anodizing the first oxidizable material includes growing an oxide into the nano-pores to define stem portions having a first thickness, broadening cap-forming sections of the nano-pores, and growing oxide into the broadening cap-forming sections of the nano-pores to define cap portions having a second thickness greater than the first thickness, thereby defining nano-structures having cap portions that anchor the cover layer to the substrate upon solidifying the flowable material to form the cover layer; the substrate is formed from silicon, glass, quartz, alumina, or a combination thereof; the nano-structures comprise an anodized tantalum oxide; and the flowable material comprises an epoxy.

Assignees

• Hewlett Packard Development Co Lp

Inventors

• Mardilovich Peter
• Fuller Anthony M
• Wei Qingqiao

Classifications

• C23C28/321

  with at least one metal alloy layer · CPC title

• C25D1/006 Primary

  Nanostructures, e.g. using aluminium anodic oxidation templates [AAO] · CPC title

• C25D11/045

  for forming AAO templates · CPC title

• C25D11/12

  Anodising more than once, e.g. in different baths · CPC title

• C23C28/00

  Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D · CPC title