Corrosion-resistant member, member for electrostatic chuck, and process for producing corrosion-resistant member

Patent metadata

Field	Value
Publication number	US-2017294331-A1
Application number	US-201515513107-A
Country	US
Kind code	A1
Filing date	Aug 25, 2015
Priority date	Sep 29, 2014
Publication date	Oct 12, 2017
Grant date	—

Abstract

Provided are a corrosion-resistant member in which, in a case where the corrosion-resistant member is used as a member for an electrostatic chuck, an adsorption force of the electrostatic chuck can be made to be strong when an electric field is applied and a residual adsorption force of the electrostatic chuck can be made to be weak when the application of the electric field is stopped; a member for an electrostatic chuck; and a process for producing a corrosion-resistant member. The corrosion-resistant member includes an oxide which includes samarium and aluminum and has a perovskite type structure. The member for an electrostatic chuck includes the corrosion-resistant member according to the present invention. The process for producing a corrosion-resistant member according to the present invention includes: a step of mixing aluminum oxide powder and samarium oxide powder with a solvent to prepare a slurry including the aluminum oxide powder and the samarium oxide powder; a step of drying the slurry to prepare a mixed powder including the aluminum powder and the samarium oxide powder, and molding the mixed powder to prepare a green body; and a step of calcinating the green body to prepare a sintered body.

First claim

1 . A corrosion-resistant member comprising
an oxide which includes samarium and aluminum and has a perovskite type structure.

2 . The corrosion-resistant member according to claim 1 ,
wherein a proportion of the oxide in the corrosion-resistant member is 80 vol % or higher.

3 . The corrosion-resistant member according to claim 1 ,
wherein a range of samarium:aluminum (molar ratio) in the oxide is 73:27 to 9:91.

4 . The corrosion-resistant member according to claim 1 , having a residual adsorption force of 0.1 to 0.9 kPa,
wherein a voltage of 2.0 kV is applied to the corrosion-resistant member having a thickness of 1 mm for 60 seconds in an atmosphere in which a pressure is lower than 0.5 Pa, a 1-inch silicon wafer is adsorbed on the corrosion-resistant member, an application of the voltage is stopped, and then the residual adsorption force is measured.

5 . A member for an electrostatic chuck comprising
the corrosion-resistant member according to claim 1 .

6 . A process for producing a corrosion-resistant member, the process comprising:
a step of mixing aluminum oxide powder and samarium oxide powder with a solvent to prepare a slurry including the aluminum oxide powder and the samarium oxide powder; a step of drying the slurry to prepare a mixed powder including the aluminum powder and the samarium oxide powder, and molding the mixed powder to prepare a green body; and a step of calcinating the green body to prepare a sintered body.

7 . The process for producing a corrosion-resistant member according to claim 6 , further comprising
a step of annealing the sintered body.

Assignees

• Sumitomo Osaka Cement Co Ltd

Inventors

• OOTOMO Megumi
• Takahashi Kentaro
• Hidaka Nobuhiro
• Kugimoto Hironori

Classifications

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• C04B2235/77

  Density · CPC title

• C04B35/62625

  Wet mixtures · CPC title

• C04B2235/9692

  Acid, alkali or halogen resistance · CPC title

• C04B2235/662

  Annealing after sintering · CPC title