Substrate processing apparatus and ceiling part

Patent metadata

Field	Value
Publication number	US-2016376701-A1
Application number	US-201615260907-A
Country	US
Kind code	A1
Filing date	Sep 9, 2016
Priority date	Mar 20, 2014
Publication date	Dec 29, 2016
Grant date	—

Abstract

A substrate processing apparatus includes a reaction tube processing a substrate, a heating part disposed on an outside of the reaction tube that heats the interior of the reaction tube, an insulating part disposed on an outside of the heating part, a plurality of flow channels installed in the insulating part and allows an air or a cooling medium to flow, and a ceiling part configured to cover an upper surface of the insulating part. The ceiling part includes a first member having a supply hole formed to communicate with the flow channels and to supply the air or cooling medium into the flow channels, and a second member having a space formed between the second member and the first member and allowing the air or the cooling medium to flow therein and having a partition part to partition the space into at least two spaces.

First claim

What is claimed is:

1 . A substrate processing apparatus, comprising:
a reaction tube configured to process a substrate; a heating part disposed on an outside of the reaction tube and configured to heat the interior of the reaction tube; an insulating part disposed on an outside of the heating part; a plurality of flow channels installed in the insulating part and configured to allow an air or a cooling medium to flow; and a ceiling part configured to cover an upper surface of the insulating part, wherein the ceiling part includes a first member having a supply hole formed to communicate with the flow channels and to supply the air or the cooling medium into the flow channels, and a second member disposed on the first member, having a space formed between the second member and the first member and allowing the air or the cooling medium to flow therein, and having a partition part formed to partition the space into at least two spaces.

2 . The apparatus of claim 1 , further comprising an intake mechanism configured to supply the air or the cooling medium to the at least two spaces,
wherein the intake mechanism includes: an intake part having an intake port configured to connect with the at least two spaces; a capture part configured to capture the air or the cooling medium therein; and an introduction part configured to allow the intake part and the capture part to communicate with each other.

3 . The apparatus of claim 2 , wherein the intake mechanism comprises an opening/closing part installed in the introduction part to open and close the intake part, and a driving part configured to drive the opening/closing part.

4 . The apparatus of claim 3 , wherein the introduction part faces the intake part and the capture part is adjacent to the introduction part.

5 . The apparatus of claim 1 , wherein the second member is disk shaped having a large diameter portion and a small diameter portion.

6 . The apparatus of claim 5 , further comprising:
a third member disposed on the second member and having a disk shape having a large diameter portion and a small diameter portion; and a fourth member disposed on the third member and having a disk shape formed as an upper end of the ceiling part.

7 . The apparatus of claim 6 , wherein the small diameter portion of the second member and the small diameter portion of the third member at least partially overlap.

8 . The apparatus of claim 7 , wherein an exhaust port configured to exhaust the air or cooling medium is located at the center of the first member and the second member.

9 . The apparatus of claim 8 , wherein the third member has an exhaust path in a diameter direction to communicate perpendicularly to the exhaust port, and a recess having a shape corresponding to the exhaust path is located on the upper surface of the second member.

10 . A ceiling part of an insulating part having a space formed to allow an air or a cooling medium to flow therein,
wherein the ceiling part includes a first member having a supply hole formed to supply the air or the cooling medium to the insulating part, and a second member disposed on the first member, having the space formed between the second member and the first member, and having a partition part formed to partition the space into at least two spaces.

Assignees

• Hitachi Int Electric Inc

Inventors

• Takewaki Motoya
• Kosugi Tetsuya
• Ueno Masaaki

Classifications

• H10P72/0434 Primary

  mainly by convection · CPC title

• C23C16/466

  using thermal contact gas · CPC title

• C23C16/4411 Primary

  Cooling of the reaction chamber walls (C23C16/45572 takes precedence) · CPC title

• C23C16/44

  characterised by the method of coating (C23C16/04 takes precedence) · CPC title

• C23C16/4412

  Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps · CPC title