Mask for thin film deposition and method of manufacturing oled using the same

Patent metadata

Field	Value
Publication number	US-2016372669-A1
Application number	US-201615255019-A
Country	US
Kind code	A1
Filing date	Sep 1, 2016
Priority date	Sep 1, 2008
Publication date	Dec 22, 2016
Grant date	—

Abstract

A mask for thin film deposition used in forming an organic thin film or a conductive layer in an organic light emitting device is disclosed. In one embodiment, the mask includes i) a base member, ii) a plurality of slits configured to penetrate through the base member, wherein the plurality of slits have a predetermined length and extend in a first direction, wherein the plurality of slits comprise an outermost slit positioned in an outermost in a second direction having a predetermined angle with respect to the first direction, and wherein the outermost slit comprises two sub-slits separated from each other and iii) a rib supporting part formed between and contacting the two sub-slits, wherein the rib supporting part extends from a rib which is adjacent to the outermost slit.

First claim

What is claimed is:

1 . A method of manufacturing an organic light emitting device, comprising:
providing a mask which comprises i) a base member, ii) a plurality of slits penetrating through the base member, and iii) a plurality of ribs each being formed between two adjacent ones of the slits, wherein the plurality of slits comprise an outermost slit positioned in an outermost location, wherein the outermost slit comprises two sub-slits separated from each other by a rib supporting part; and depositing an organic light emitting film, through the slits of the mask, between first and second electrodes of the organic light emitting device, wherein the first and second electrodes are formed over a substrate.

2 . The method of manufacturing the organic light emitting device as claimed in claim 1 , further comprising:
applying, with the use of a magnet array, magnetic force to the mask so that the mask is closely adhered to the substrate, wherein the substrate is disposed between the mask and the magnet array, wherein the magnet array comprises a plurality of magnets in a stripe shape, and wherein an extended direction of the magnets have a predetermined angle with the length direction of the plurality of slits of the mask.

3 . The method of manufacturing the organic light emitting device as claimed in claim 1 , wherein the width of the rib supporting part is about 10 μm to about 100 μm.

4 . The method of manufacturing the organic light emitting device as claimed in claim 1 , wherein the length of the slits is at least about 2 cm.

Assignees

• Samsung Display Co Ltd

Inventors

• Sung Dong-Young
• Kim Hong-Ryul

Classifications

• B05B15/045

  Operations & Transport · mapped topic

• H01L51/0011 Primary

  Electricity · mapped topic

• H01L51/5012

  Electricity · mapped topic

• C23C14/042 Primary

  using masks · CPC title

• H10K71/166 Primary

  using selective deposition, e.g. using a mask · CPC title