Method for synthesizing multilayer graphene

Patent metadata

Field	Value
Publication number	US-2016369394-A1
Application number	US-201615094567-A
Country	US
Kind code	A1
Filing date	Apr 8, 2016
Priority date	Jun 16, 2015
Publication date	Dec 22, 2016
Grant date	—

Abstract

A method for synthesizing a multilayer graphene is provided. Specifically, the multilayer graphene can be produced by performing a step of forming a catalytic metal layer on a substrate, a step of heat-treating the catalytic metal layer on the substrate while supplying methane gas, and a step of synthesizing a multilayer graphene on the heat-treated catalytic metal layer. As described above, the multilayer graphene having a large area can be grown directly on a substrate, by heat-treating the catalytic metal layer using methane gas, prior to the step of synthesis of graphene. In addition, as the the number of layer of the multilayer graphene can be controlled by changing the synthesis time of the multilayer graphene, the multilayer graphene with the desired number of layers can be easily produced.

First claim

What is claimed is:

1 . A method for synthesizing a multilayer graphene comprising: 1) a step of forming a catalytic metal layer on a substrate, 2) a step of heat-treating the catalytic metal layer on the substrate while supplying methane gas, and 3) a step of synthesizing a multilayer graphene on the heat-treated catalytic metal layer.

2 . The method for synthesizing a multilayer graphene according to claim 1 wherein the catalytic metal layer includes one or more selected from the group consisting of copper (Cu), nickel (Ni), iron (Fe), platinum (Pt), aluminum (Al), cobalt (Co), ruthenium (Ru), palladium (Pd), chromium (Cr), magnesium (Mg), manganese (Mn), gold (Au), silver (Ag), molybdenum (Mo), rhodium (Rh), tantalum (Ta), titanium (Ti), tungsten (W), uranium (U), vanadium (V), zirconium (Zr), and iridium (Ir), brass, bronze, and stainless steel.

3 . The method for synthesizing a multilayer graphene according to claim 1 wherein the step of forming a catalytic metal layer on a substrate is performed using one or more methods selected from the group consisting of an electron-beam evaporation deposition method, a thermal evaporation deposition method, a laser molecular beam epitaxy (L-MBE), a pulsed laser deposition (PLD), an electro-plating method and a sputtering method.

4 . The method for synthesizing a multilayer graphene according to claim 1 wherein the step of heat-treating the catalytic metal layer on the substrate is performed at a temperature ranging from 800° C. to 1100° C. for 10 to 120 minutes.

5 . The method for synthesizing a multilayer graphene according to claim 1 wherein the step of synthesizing a multilayer graphene on the heat-treated catalytic metal layer includes a step of supplying a reaction gas containing a carbon source on the heat-treated catalystic metal layer to deposit a multilayer graphene on the substrate at a room temperature to 1200° C., and a step of cooling the multilayer graphene-deposited substrate.

6 . The method for synthesizing a multilayer graphene according to claim 1 wherein the carbon source includes one or more materials selected from the group consisting of a natural graphite, a synthetic graphite, a highly ordered pyrolytic graphite (HOPG), an activated carbon, a carbon monoxide, a carbon dioxide, a methane, an ethane, an ethylene, a methanol, an ethanol, an acetylene, a propane, a propylene, a butane, a butadiene, a pentane, a pentene, a cyclopentadiene, a hexane, a cyclohexane, a benzene, a toluene, a polymethyl methacrylate (PMMA), a polystyrene, a polyacrylonitrile (PAN), and PEDOT:PSS.

7 . The method for synthesizing a multilayer graphene according to claim 1 wherein, in the stage of synthesizing the multilayer graphene, the number of layer of the multilayer graphene is controlled by changing the synthesis time of the multilayer graphene.

8 . The method for synthesizing a multilayer graphene according to claim 1 wherein, in the stage of synthesizing the multilayer graphene, the synthesis of the multilayer graphene may be performed for 10 minutes to 20 minutes to form a bilayer graphene.

Assignees

• Gwangju Inst Science & Tech

Inventors

• Ham Moon-Ho
• Son Myung-Woo

Classifications

• H10P14/3406

  Carbon, e.g. diamond-like carbon · CPC title

• H10P14/3241

  being conductive materials · CPC title

• H10P14/24

  using chemical vapour deposition [CVD] · CPC title

• C01B32/186

  by chemical vapour deposition [CVD] · CPC title

• C23C16/0281

  of metallic sub-layers (C23C16/029 takes precedence) · CPC title