Method for manufacturing graphene, said graphene, and apparatus for manufacturing same

Patent metadata

Field	Value
Publication number	US-9764956-B2
Application number	US-201314423463-A
Country	US
Kind code	B2
Filing date	Aug 1, 2013
Priority date	Aug 30, 2012
Publication date	Sep 19, 2017
Grant date	Sep 19, 2017

Abstract

The present invention provides a method for manufacturing graphene, said graphene, and an apparatus for manufacturing same. The method for manufacturing graphene comprises the steps of: loading a catalytic metal layer into a chamber; applying tensile force to the catalytic metal layer; and forming graphene on the catalytic metal layer by supplying a carbon source into the chamber while the tension is applied to the catalytic metal layer. Therefore, the size of the grains on the catalytic metal layer can be increased by applying tension to the catalytic metal layer, and high quality uniform graphene can be grown through the use of the catalytic metal layer.

First claim

The invention claimed is:

1. A method for manufacturing graphene, the method comprising:
loading a catalyst metal layer into a chamber;
applying tension to the catalyst metal layer using a weight or an elastic member connected to one end of the catalyst metal layer so as to change orientation of the catalyst metal layer;
measuring the tension applied to the catalyst metal layer;
adjusting the tension applied to the catalyst metal layer according to a measured value of the tension; and
forming graphene on the catalyst metal layer by supplying a carbon source into the chamber in a state in which the tension is applied to the catalyst metal layer.

2. The method according to claim 1 , wherein the tension has a magnitude within a range of 0.1 kg/m to 5 kg/m.

3. The method according to claim 1 , wherein the tensioned catalyst metal layer have an average grain size within a range of 100 μm to 500 μm.

4. The method according to claim 1 , wherein the orientation of the catalyst metal layer is changed to (111) orientation.

5. The method according to claim 1 , wherein the catalyst metal layer has a thickness within a range of 10 μm to 50 μm.

6. The method according to claim 1 , wherein the applying includes performing thermal treatment of the catalyst metal layer in a state in which the tension is applied to the catalyst metal layer.

7. The method according to claim 1 , wherein the applying includes applying the tension in a first direction or in a second direction perpendicular to the first direction, the first direction being a loading direction of the catalyst metal layer.

8. The method according to claim 1 , wherein the loading includes vertically loading the catalyst metal layer in a direction perpendicular to a ground surface.

9. The method according to claim 8 , wherein the applying includes applying the tension using gravity.

10. The method according to claim 1 , wherein the applying serves to increase a grain size of graphene formed on the catalyst metal layer.

11. The method according to claim 10 , wherein the catalyst metal layer has an average grain size within a range of 100 μm to 500 μm.

12. The method according to claim 1 , wherein the tension applied to the catalyst metal layer by the weight or the elastic member is adjustable.

13. The method according to claim 12 , wherein measuring the tension applied to the catalyst metal layer and adjusting the tension applied to the catalyst metal layer are automatically performed such that the tension has a preset value.

Assignees

• Lg Electronics Inc
• Snu R&Db Foundation

Inventors

• Moon Jinsan
• Rho Jonghyun
• Park Subeom
• Kim Taehyeong
• Hong Byunghee
• Park Wonbae
• Jung Myunghee

Classifications

• C23C16/44

  characterised by the method of coating (C23C16/04 takes precedence) · CPC title

• C01B32/186 Primary

  by chemical vapour deposition [CVD] · CPC title

• B01J19/18

  Stationary reactors having moving elements inside (B01J19/08, B01J19/26 take precedence) · CPC title

• C23C16/26

  Deposition of carbon only · CPC title

• C01B32/184 Primary

  Preparation · CPC title