Bonding material composition, aluminum nitride bonded body, and method for producing the same
US-9481813-B2 · Nov 1, 2016 · US
US2016361900A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016361900-A1 |
| Application number | US-201615246780-A |
| Country | US |
| Kind code | A1 |
| Filing date | Aug 25, 2016 |
| Priority date | Dec 27, 2013 |
| Publication date | Dec 15, 2016 |
| Grant date | — |
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A first bonding material composition according to the present invention is a bonding material composition used when aluminum nitride sintered bodies containing a rare-earth metal oxide are bonded to each other, in which the bonding material composition contains, in addition to an O element-containing aluminum nitride raw material, (a) as a fluorine compound, at least one of a fluorine compound of an alkaline-earth metal and a fluorine compound of a rare-earth metal, or (b) as a fluorine compound, at least one of a fluorine compound of an alkaline-earth metal and a fluorine compound of a rare-earth metal, and a rare-earth metal oxide.
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What is claimed is: 1 . An aluminum nitride bonded body in which aluminum nitride sintered bodies are bonded to each other with a bonding layer, wherein the bonding layer contains, as a crystal phase, AlN and at least one of a fluorine compound of an alkaline-earth metal and a fluorine compound of a rare-earth metal. 2 . The aluminum nitride bonded body according to claim 1 , wherein the fluorine compound of the alkaline-earth metal is an alkaline-earth metal oxyfluoride and the fluorine compound of the rare-earth metal is a rare-earth metal oxyfluoride. 3 . The aluminum nitride bonded body according to claim 1 , wherein the bonding layer contains, as a crystal phase, at least one of an alkaline-earth metal-aluminum oxide and a rare-earth metal-aluminum oxide. 4 . An aluminum nitride bonded body in which aluminum nitride sintered bodies are bonded to each other with a bonding layer, wherein the aluminum nitride sintered bodies have reaction layers at interfaces with the bonding layer, the reaction layers being formed by a reaction of an oxide contained in a aluminum nitride sintered bodies and a fluorine compound contained in a bonding material composition before the formation of the bonding layer, and the bonding layer contains, as a crystal phase, AlN and at least one of a fluorine compound of an alkaline-earth metal and a fluorine compound of a rare-earth metal. 5 . The aluminum nitride bonded body according to claim 4 , wherein the reaction layer contains at least one of an alkaline-earth metal oxyfluoride and a rare-earth metal oxyfluoride. 6 . The aluminum nitride bonded body according to claim 1 , having a bonding strength of 200 MPa or more. 7 . The aluminum nitride bonded body according to claim 4 , having a bonding strength of 200 MPa or more.
Adhesives based on inorganic constituents · CPC title
in the substrate · CPC title
Non-oxidic interlayers · CPC title
Inorganic coating · CPC title
using interposed adhesives or interposed materials with bonding properties · CPC title
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