Bonding material composition, aluminum nitride bonded body, and method for producing the same

Patent metadata

Field	Value
Publication number	US-9481813-B2
Application number	US-201414561449-A
Country	US
Kind code	B2
Filing date	Dec 5, 2014
Priority date	Dec 27, 2013
Publication date	Nov 1, 2016
Grant date	Nov 1, 2016

Abstract

A first bonding material composition according to the present invention is a bonding material composition used when aluminum nitride sintered bodies containing a rare-earth metal oxide are bonded to each other, in which the bonding immaterial composition contains, in addition, to an O element-containing aluminum nitride raw material, (a) as a fluorine compound, at least one of a fluorine compound of an alkaline-earth metal and a fluorine compound of a rare-earth metal, or (b) as a fluorine compound, at least one of a fluorine compound of an alkaline-earth metal and a fluorine compound of a rare-earth metal, and a rare-earth metal oxide.

First claim

What is claimed is:

1. A bonding material composition used when aluminum nitride sintered bodies containing a rare-earth metal oxide are bonded to each other,
wherein the bonding material composition contains in addition to an O element-containing aluminum nitride raw material, (a) as a fluorine compound, at least one of a fluorine compound of an alkaline-earth metal and a fluorine compound of a rare-earth metal, or (b) as a fluorine compound,, at least one of a fluorine compound of an alkaline-earth metal and a fluorine compound of a rare-earth metal, and a rare-earth metal oxide.

2. The bonding material composition according to claim 1 , wherein the content of O element in the aluminum nitride raw material is 0.4% to 30% by mass.

3. The bonding material composition according to claim 1 , containing an amount of 20% to 85% by mass of aluminum nitride (excluding the oxygen content in terms of Al 2 O 3 ) and an amount of 10% to 50% by mass of the fluorine compound.

4. The bonding material composition according claim 1 , having an aluminum oxide content of 0.4% to 60% by mass, including a value obtained by calculating the content of O element in the aluminum nitride raw material in terms of Al 2 O 3 .

5. The bonding material composition according to claim 4 , containing a rare-earth metal oxide in an amount of 40% to 150% by mass with respect to Al 2 O 3 content (including a value obtained by calculating O element in the aluminum nitride raw material in terms of Al 2 O 3 ).

6. A method for producing an aluminum nitride bonded body in which the aluminum nitride sintered bodies are bonded to each other, including;
sandwiching the bonding material composition according to claim 1 between aluminum nitride sintered bodies and heating the resulting assembly at 1450° C. or lower with a bonding load applied.

7. A bonding material composition used when an aluminum nitride sintered body free from a rare-earth metal oxide is bonded to an aluminum nitride sintered body that contains or does not contain a rare-earth metal oxide,
wherein the bonding material composition contains in addition to an O element-containing aluminum nitride raw material, (a) at least one of a fluorine compound of an alkaline-earth metal and a fluorine compound of a rare-earth metal, and a rare-earth metal oxide, (b) a fluorine compound of a rare-earth metal, or (c) a fluorine compound of an alkaline-earth metal and a fluorine compound of a rare-earth metal.

8. The bonding material composition, according to claim 7 , wherein the content of O element in the aluminum nitride raw material is 0.4% to 30% by mass.

9. The bonding material composition according to claim 7 , containing an amount of 20% to 85% by mass of aluminum nitride (excluding the oxygen content in terms of Al 2 O 3 ) and an amount of 10% to 50% by mass of the fluorine compound.

10. The bonding material composition according claim 7 , having an aluminum oxide content of 0.4% to 60% by mass, including a value obtained by calculating the content of O element in the aluminum nitride raw material in terms of Al 2 O 3 .

11. The bonding material composition according to claim 10 , containing a rare-earth metal oxide in an amount of 40% to 150% by mass with respect to Al 2 O 3 content (including a value obtained by calculating O element in the aluminum nitride raw material in terms of Al 2 O 3 ).

12. A method for producing an aluminum nitride bonded body in which the aluminum nitride sintered bodies are bonded to each other, including:
sandwiching the bonding material composition according to claim 7 between aluminum nitride sintered bodies and heating the resulting assembly at 1450° C. or lower with a bonding load applied.

Assignees

• Ngk Insulators Ltd

Inventors

• Goto Masashi
• Nishimura Noboru
• Katsuda Yuji

Classifications

• C09J1/00 Primary

  Adhesives based on inorganic constituents · CPC title

• C09J5/06

  involving heating of the applied adhesive · CPC title

• C09J2400/123

  in the substrate · CPC title

• C04B37/005

  consisting of glass or ceramic material · CPC title

• Y10T428/31536

  Including interfacial reaction product of adjacent layers · CPC title