Features for Improving Process Uniformity in a Millisecond Anneal System
US-2020402811-A1 · Dec 24, 2020 · US
US2016348969A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016348969-A1 |
| Application number | US-201615234518-A |
| Country | US |
| Kind code | A1 |
| Filing date | Aug 11, 2016 |
| Priority date | Apr 24, 2014 |
| Publication date | Dec 1, 2016 |
| Grant date | — |
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A heat treatment device which performs vacuum carburizing treatment by heating a workpiece is presented. The heat treatment device includes: a heater chamber in which a heater is provided; a heat treatment chamber in which the workpiece is heated and vacuum carburizing treatment is performed on the workpiece and is disposed so as to be adjacent to the heater chamber in the heat treatment device; and a muffle plate which partitions a portion between the heater chamber and the heat treatment chamber. A gas introduction portion through which burnout gas is introduced is independently provided in each of the heater chamber and the heat treatment chamber.
Opening claim text (preview).
What is claimed is: 1 . A heat treatment device which performs vacuum carburizing treatment by heating a workpiece, the heat treatment device comprising: a heater chamber in which a heater is provided; a heat treatment chamber which is disposed adjacent to the heater chamber and in which the workpiece is heated and vacuum carburizing treatment is performed on the workpiece; a muffle plate which partitions a portion between the heater chamber and the heat treatment chamber; and a gas introduction portion through which burnout gas is introduced and which is independently provided in each of the heater chamber and the heat treatment chamber. 2 . The heat treatment device according to claim 1 , wherein a double exhaust pipe is provided in the heat treatment device, and the double exhaust pipe includes a first exhaust pipe which communicates with the heater chamber, and a second exhaust pipe which communicates with the heat treatment chamber and is inserted into the first exhaust pipe. 3 . The heat treatment device according to claim 1 , wherein the heater chamber is disposed outside the heat treatment chamber and surrounds the heat treatment chamber. 4 . The heat treatment device according to claim 2 , wherein the heater chamber is disposed outside the heat treatment chamber and surrounds the heat treatment chamber. 5 . The heat treatment device according to claim 3 , wherein the heat treatment chamber is formed in a circular shape in a plan view, and a plurality of the heaters are radially disposed in the heater chamber with respect to the center of the heat treatment chamber. 6 . The heat treatment device according to claim 4 , wherein the heat treatment chamber is formed in a circular shape in a plan view, and a plurality of the heaters are radially disposed in the heater chamber with respect to the center of the heat treatment chamber. 7 . The heat treatment device according to claim 3 , wherein a plurality of heater chamber gas introduction portions, through which the burnout gas is introduced into the heater chamber, are radially provided with respect to the heater chamber. 8 . The heat treatment device according to claim 4 , wherein a plurality of heater chamber gas introduction portions, through which the burnout gas is introduced into the heater chamber, are radially provided with respect to the heater chamber. 9 . The heat treatment device according to claim 5 , wherein a plurality of heater chamber gas introduction portions, through which the burnout gas is introduced into the heater chamber, are radially provided with respect to the heater chamber. 10 . The heat treatment device according to claim 6 , wherein a plurality of heater chamber gas introduction portions, through which the burnout gas is introduced into the heater chamber, are radially provided with respect to the heater chamber.
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