Preliminary treatment method for workpiece

Patent metadata

Field	Value
Publication number	US-2016281237-A1
Application number	US-201414778309-A
Country	US
Kind code	A1
Filing date	May 30, 2014
Priority date	May 31, 2013
Publication date	Sep 29, 2016
Grant date	—

Abstract

Provided is a preliminary treatment method for a workpiece capable of shortening a cycle time by preventing a nodule from being formed on a carbon film. The preliminary treatment method for the workpiece is performed before a carbon film is formed on a surface of a workpiece W. A bias voltage is applied to the workpiece W disposed in a treatment space S maintained at a predetermined vacuum degree while an oxygen gas is supplied to the treatment space S before a material gas is supplied to the treatment space S, oxygen plasma is generated along the surface of the workpiece W, and oxygen, hydrogen, or water stuck to the surface of the workpiece W is removed.

First claim

1 . A preliminary treatment method for a workpiece which is performed before a step of disposing a conductive workpiece in a treatment space maintained in a predetermined vacuum degree, applying a bias voltage to an anode disposed in the treatment space by setting the workpiece as a cathode while a material gas formed of a hydrocarbon compound is supplied to the treatment space, generating plasma of the material gas along a surface of the workpiece, and forming a carbon film on the surface of the workpiece,
wherein the preliminary treatment method applies a bias voltage to the workpiece disposed in the treatment space while oxygen gas is supplied to the treatment space before the material gas is supplied to the treatment space, generates oxygen plasma along the surface of the workpiece, and removing oxygen, hydrogen, or water stuck to the surface of the workpiece by the oxygen plasma.

2 . The preliminary treatment method according to claim 1 ,
wherein when the workpiece is a workpiece formed in a cylindrical shape, both ends of the workpiece are sealed by a pair of cylindrical sealing members having an insulation property, the treatment space is formed inside the sealing member and the workpiece sealed by the sealing member, and the anode is disposed in the sealing member.

3 . The preliminary treatment method according to claim 1 ,
wherein when the workpiece is a workpiece formed in a solid shape, the treatment space is formed inside a chamber for disposing the workpiece therein, and the anode is disposed inside the chamber.

4 . The preliminary treatment method according claim 1 ,
wherein the carbon film accumulated inside the treatment space is removed by the oxygen plasma.

5 . The preliminary treatment method according to claim 1 ,
wherein argon plasma is generated along the surface of the workpiece after the oxygen plasma is generated and also before the plasma of material gas is generated.

Assignees

• Honda Motor Co Ltd

Inventors

• Kobayashi Koji
• Funatsu Junya

Classifications

• C23C16/26

  Deposition of carbon only · CPC title

• C23C16/455

  characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber · CPC title

• C23C16/515 Primary

  using pulsed discharges · CPC title

• H01J37/32009

  Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources (plasma generation in general H05H1/24) · CPC title

• C23C16/0227

  by cleaning or etching · CPC title