Vacuum adsorption system, method and packaging device for mother substrate to be packaged

Patent metadata

Field	Value
Publication number	US-2016254175-A1
Application number	US-201514785641-A
Country	US
Kind code	A1
Filing date	Apr 16, 2015
Priority date	Oct 22, 2014
Publication date	Sep 1, 2016
Grant date	—

Abstract

Vacuum adsorption system of the invention includes: vacuum adsorption platform; carrying platform, which is provided on vacuum adsorption platform and edges thereof are sealed with edges of vacuum adsorption platform, configured to carrying mother substrate to be packaged and provided thereon with a plurality of adsorption units used for adsorbing and fixing, in cooperation with vacuum adsorption platform, mother substrate to be packaged; detection unit, configured to detect positional relationships between adsorption units on carrying platform and packaging areas on mother substrate to be packaged; and adjustment unit, configured to adjust position of carrying platform when detection unit detects that positions of adsorption units on carrying platform are overlapped with packaging areas on mother substrate to be packaged, so that positions of at least part of adsorption units on carrying platform are not overlapped with packaging areas on mother substrate to be packaged.

First claim

1 . A vacuum adsorption system for a mother substrate to be packaged, which includes a vacuum adsorption platform, wherein the vacuum adsorption system further includes:
a carrying platform, which is provided on the vacuum adsorption platform and edges thereof are sealed with edges of the vacuum adsorption platform, configured to carrying the mother substrate to be packaged and provided thereon with a plurality of adsorption units, the adsorption units being used for adsorbing, in cooperation with the vacuum adsorption platform, the mother substrate to be packaged so as to fix the mother substrate to be packaged; a detection unit, configured to detect positional relationships between the adsorption units on the carrying platform and packaging areas on the mother substrate to be packaged; and an adjustment unit, configured to adjust the position of the carrying platform when the detection unit detects that the positions of the adsorption units on the carrying platform are overlapped with the packaging areas on the mother substrate to be packaged, so that positions of at least part of the adsorption units on the carrying platform are not overlapped with the packaging areas on the mother substrate to be packaged.

2 . The vacuum adsorption system according to claim 1 , wherein the plurality of adsorption units are distributed uniformly on the carrying platform.

3 . The vacuum adsorption system according to claim 1 , wherein the structure of the adsorption unit is a round hole, a square hole or a rectangular hole.

4 . The vacuum adsorption system according to claim 1 , wherein the detection unit is an optical range unit.

5 . The vacuum adsorption system according to claim 1 , wherein the vacuum adsorption system further includes:
a control unit, configured to control the adjustment unit to adjust the position of the carrying platform based on the positional relationships between the positions of the adsorption units on the carrying platform and the packaging areas on the mother substrate to be packaged output by the detection unit, such that the positions of at least part of the adsorption units on the carrying platform are not overlapped with the packaging areas of the mother substrate to be packaged.

6 . The vacuum adsorption system according to claim 1 , wherein the vacuum adsorption system further includes:
a vacuumizing device, configured to enable the mother substrate to be packaged to be adsorbed and fixed on the carrying platform through adsorption holes on the vacuum adsorption platform and the adsorption units on the carrying platform.

7 . A packaging device, wherein the packaging device includes a vacuum adsorption system for a mother substrate to be packaged, which includes a vacuum adsorption platform, wherein the vacuum adsorption system further includes:
a carrying platform, which is provided on the vacuum adsorption platform and edges thereof are sealed with edges of the vacuum adsorption platform, configured to carrying the mother substrate to be packaged and provided thereon with a plurality of adsorption units, the adsorption units being used for adsorbing, in cooperation with the vacuum adsorption platform, the mother substrate to be packaged so as to fix the mother substrate to be packaged; a detection unit, configured to detect positional relationships between the adsorption units on the carrying platform and packaging areas on the mother substrate to be packaged; and an adjustment unit, configured to adjust the position of the carrying platform when the detection unit detects that the positions of the adsorption units on the carrying platform are overlapped with the packaging areas on the mother substrate to be packaged, so that positions of at least art of the adsorption units on the are not overlapped with the packaging areas on the mother substrate to be packaged.

8 . An adsorption method for a vacuum adsorption system, which is the vacuum adsorption system according to claim 1 , and the adsorption method includes the following steps of:
placing the mother substrate to be packaged above the carrying platform; detecting the positional relationships between the adsorption units on the carrying platform and the packaging areas on the mother substrate to be packaged, and if it is detected that the positions of the adsorption units on the carrying platform are not overlapped with the packaging areas on the mother substrate to be packaged, the position of the carrying platform is kept as it is; and if it is detected that the positions of the adsorption units on the carrying platform are overlapped with the packaging areas on the mother substrate to be packaged, the following step is performed; and adjusting the position of the carrying platform, such that at least part of the adsorption units on the carrying platform are not overlapped with the packaging areas on the mother substrate to be packaged.

9 . The adsorption method for the vacuum adsorption system according to claim 8 , wherein,
the step of detecting the positional relationships between the adsorption units on the carrying platform and the packaging areas on the mother substrate to be packaged is a step of detecting distances between each adsorption unit on the carrying platform and a packaging area on the mother substrate to be packaged adjacent to the adsorption unit.

10 . The adsorption method for the vacuum adsorption system according to claim 8 , wherein, after the step of adjusting the position of the carrying platform, such that at least part of the adsorption units on the carrying platform are not overlapped with the packaging areas on the mother substrate to be packaged, the method further includes the following step of:
adsorbing the mother substrate to be packaged onto the carrying platform through vacuumizing.

11 . The vacuum adsorption system according to claim 2 , wherein the structure of the adsorption unit is a round hole, a square hole or a rectangular hole.

12 . The packaging device according to claim 7 , wherein the plurality of adsorption units are distributed uniformly on the carrying platform.

13 . The packaging device according to claim 7 , wherein the structure of the adsorption unit is a round hole, a square hole or a rectangular hole.

14 . The packaging device according to claim 12 , wherein the structure of the adsorption unit is a round hole, a square hole or a rectangular hole.

15 . The packaging device according to claim 7 , wherein the detection unit is an optical range unit.

16 . The packaging device according to claim 7 , wherein the vacuum adsorption system further includes:
a control unit, configured to control the adjustment unit to adjust the position of the carrying platform based on the positional relationships between the positions of the adsorption units on the carrying platform and the packaging areas on the mother substrate to be packaged output by the detection unit, such that the positions of at least part of the adsorption units on the carrying platform are not overlapped with the packaging areas of the mother substrate to be packaged.

17 . The packaging device according to claim 7 , wherein the vacuum adsorption system further includes:
a vacuumizing device, configured to enable the mother substrate to be packaged to be adsorbed and fixed on the carrying platform through adsorption holes on the vacuum adsorption platform and the adsorption units on the carrying platform.

Assignees

• Boe Technology Group Co Ltd
• Beijing Boe Optoelectronics Tech Co Ltd

Inventors

• Yang Jiuxia
• Bai Feng

Classifications

• H10P72/0606

  Position monitoring, e.g. misposition detection or presence detection · CPC title

• H10P72/0441

  Apparatus for sealing, encapsulating, glassing, decapsulating or the like · CPC title

• H10P72/50

  for positioning, orientation or alignment · CPC title

• H10P72/78 Primary

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H10P72/70

  for supporting or gripping · CPC title