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US-12087886-B2 · Sep 10, 2024 · US
Vacuum tweezer and method for manufacturing semiconductor device
US2016247705A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016247705-A1 |
| Application number | US-201514925297-A |
| Country | US |
| Kind code | A1 |
| Filing date | Oct 28, 2015 |
| Priority date | Feb 25, 2015 |
| Publication date | Aug 25, 2016 |
| Grant date | — |
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- Title
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- Abstract
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- Assignees and inventors
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- First independent claim
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Abstract
Official abstract text for this publication.
A vacuum tweezer includes: a tweezer body including a suction distal end portion that performs vacuum suction of an object to be suctioned; and a light source causing a beam to be condensed at a position on an extension of the suction distal end portion on which a vacuum suction force acts.
First claim
Opening claim text (preview).
What is claimed is: 1 . A vacuum tweezer comprising: a tweezer body including a suction distal end portion that performs vacuum suction of an object to be suctioned; and a light source causing a beam to be condensed at a position on an extension of the suction distal end portion on which a vacuum suction force acts. 2 . The vacuum tweezer of claim 1 , wherein the light source is placed inside the suction distal end portion and the beam is radiated from a distal end port of the suction distal end portion. 3 . The vacuum tweezer of claim 1 , wherein the light source is separated from the tweezer body and the beam radiated from the light source is guided to the tweezer body via an optical fiber. 4 . A method for manufacturing a semiconductor device wherein a semiconductor chip is moved by using the vacuum tweezer of claim 1 . 5 . A vacuum tweezer comprising: a tweezer body including a suction distal end portion that performs vacuum suction of an object to be suctioned; and a light source causing a plurality of beams to be crossed each other at a position on an extension of the suction distal end portion on which a vacuum suction force acts. 6 . The vacuum tweezer of claim 5 , wherein the plurality of beams are three beams. 7 . The vacuum tweezer of claim 5 , wherein the plurality of beams have mutually different colors. 8 . The vacuum tweezer of claim 5 , further comprising an optical fiber branching one beam radiated from the light source into the plurality of beams. 9 . The vacuum tweezer of claim 5 , wherein the light source is separated from the tweezer body and the beam radiated from the light source is guided to the tweezer body via an optical fiber. 10 . A method for manufacturing a semiconductor device wherein a semiconductor chip is moved by using the vacuum tweezer of claim 5 .
Assignees
Inventors
Classifications
Process monitoring, e.g. flow or thickness monitoring · CPC title
- H10P72/78Primary
using vacuum or suction, e.g. Bernoulli chucks · CPC title
- B25B11/007Primary
portable, e.g. handheld · CPC title
Manipulators transporting wafers · CPC title
with vacuum · CPC title
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Frequently asked questions
Answers are generated from the same data shown on this page.
- What does patent US2016247705A1 cover?
- A vacuum tweezer includes: a tweezer body including a suction distal end portion that performs vacuum suction of an object to be suctioned; and a light source causing a beam to be condensed at a position on an extension of the suction distal end portion on which a vacuum suction force acts.
- Who is the assignee on this patent?
- Mitsubishi Electric Corp
- What technology area does this patent fall under?
- Primary CPC classification H10P72/78. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Thu Aug 25 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).