Patterned Magnetic Thin Film with Rolled-Up Hollow Structure

Patent metadata

Field	Value
Publication number	US-2016244709-A1
Application number	US-201514753018-A
Country	US
Kind code	A1
Filing date	Jun 29, 2015
Priority date	Feb 24, 2015
Publication date	Aug 25, 2016
Grant date	—

Abstract

The present invention provides a patterned magnetic thin film with 3D tube-shaped structure. The magnetic thin film includes a substrate which includes at least one tube-shaped supportive layer. The tube-shaped supportive layer is rolled up onto the substrate. And the tube-shaped supportive layer further includes a pattern portion which having one or more magnetic material to attract an object into a hollow portion of the tube-shaped supportive layer.

First claim

What is claimed is:

1 . A patterned magnetic thin film with 3D tube-shaped structure, comprising:
a substrate; and at least one tube-shaped supportive layer rolled up onto said substrate, said tube-shaped supportive layer including a pattern portion having one or more magnetic material to attract an object into a hollow portion of said tube-shaped supportive layer.

2 . The magnetic thin film of claim 1 , wherein said substrate comprises a silicon material, said tube-shaped supportive layer comprises a photoresist and a SiO 2 for forming said pattern portion thereon by lithography.

3 . The magnetic thin film of claim 1 , wherein said magnetic material comprises a first layer, a second layer and a third layer.

4 . The magnetic thin film of claim 3 , wherein said first layer comprises Cr, Ti, Al as an adhesive layer, said second layer comprises Fe, Co, Ni and alloy thereof as a sensing layer, said third layer comprises Cr, Ti, Al or polymer as a protective layer.

5 . The magnetic thin film of claim 1 , wherein said pattern portion comprises a simple linear type or a wave-shaped type.

6 . The magnetic thin film of claim 1 , wherein said pattern portion further comprises a fishbone-shaped type.

7 . The magnetic thin film of claim 1 , wherein said pattern portion further comprises M periodic type, wherein said M is greater than 1.

8 . The magnetic thin film of claim 5 , wherein said pattern portion further comprises several elliptical type or oval type, being perpendicular to said simple linear type and said wave-shaped type to form a type with high magnetic anisotropy.

9 . The magnetic thin film of claim 1 , wherein a thermal expansion coefficient of said magnetic material is greater than that of said tube-shaped supportive layer, so as to bend towards a side of said magnetic material to roll upwards to away from said substrate.

10 . The magnetic thin film of claim 1 , wherein a thermal expansion coefficient of said magnetic material is smaller than that of said tube-shaped supportive layer, so as to bend towards a side of said tube-shaped supportive layer to roll downwards.

11 . The magnetic thin film of claim 1 , wherein a number of said objects is determined by the diameter and length of said tube-shaped supportive layer.

12 . The magnetic thin film of claim 1 , wherein a number of turn N of said tube-shaped supportive layer is greater than 1.

13 . The magnetic thin film of claim 1 , wherein a number of turn N of said tube-shaped supportive layer is equals to 1.

Assignees

• Nat Univ Tsing Hua

Inventors

• Wei Zung-Hang
• Huang Chen-Yu

Classifications

• C12M35/06

  Magnetic means (C12M35/02 takes precedence) · CPC title

• C12M25/10 Primary

  Hollow fibers or tubes (hollow fiber modules in general B01D63/02) · CPC title

• B03C2201/26

  for use in medical or biological applications · CPC title

• C12M47/04 Primary

  Cell isolation or sorting (purging biological preparations of unwanted cells C12N5/0081, determining the presence or kind of microorganism C12Q1/04) · CPC title

• B03C1/0332

  using permanent magnets · CPC title