Monomer, organic layer composition, organic layer, and method of forming patterns

Patent metadata

Field	Value
Publication number	US-2016237306-A1
Application number	US-201514979634-A
Country	US
Kind code	A1
Filing date	Dec 28, 2015
Priority date	Feb 17, 2015
Publication date	Aug 18, 2016
Grant date	—

Abstract

A monomer, an organic layer composition including the monomer, an organic layer, and a method of forming patterns, the monomer being represented by Chemical Formula 1:

First claim

What is claimed is:

1 . A monomer represented by Chemical Formula 1:

wherein, in Chemical Formula 1,
X is a substituted or unsubstituted aromatic ring group,
A, B, and C are each independently a group represented by Chemical Formula 2,
k, m, and n are independently 0 or 1, a sum of k, m, and n being 2 or 3,
when k=m=1, A and B are different groups from each other, when k=n=1, A and C are different groups from each other, and when m=n=1, B and C are different groups from each other, and
when k=m=n=1, at least two of A, B, and C are different groups from each other,

wherein, in Chemical Formula 2,
D and E are each independently a substituted or unsubstituted aromatic ring group, a substituted or unsubstituted heteroaromatic ring group, or a combination thereof,
Z 4 and Z 5 are each independently a hydroxy group, a thionyl group, a thiol group, a cyano group, a substituted or unsubstituted amino group, a halogen atom, a halogen-containing group, or a combination thereof,
w is 0 or 1, and
* is a linking point.

2 . The monomer as claimed in claim 1 , wherein the monomer is represented by one of Chemical Formulae 1-1 and 1-2:

wherein, in Chemical Formulae 1-1 and 1-2,
X a is a substituted or unsubstituted aromatic ring group,
D a , E a , E b , and E c are each independently a substituted or unsubstituted aromatic ring group, a substituted or unsubstituted heteroaromatic ring group, or a combination thereof, and
Z 4a , Z 4b , Z 4c , and Z 5a are each independently a hydroxy group, a thionyl group, a thiol group, a cyano group, a substituted or unsubstituted amino group, a halogen atom, a halogen-containing group, or a combination thereof.

3 . The monomer as claimed in claim 2 , wherein:
in Chemical Formula 1-1, at least one of D a , E a , and E b is a substituted or unsubstituted polycyclic aromatic ring group, a substituted or unsubstituted polycyclic heteroaromatic ring group, or a combination thereof, or in Chemical Formula 1-1, X a is a substituted or unsubstituted polycyclic aromatic ring group, and in Chemical Formula 1-2, at least one of D a , E a , E b , and E c is a substituted or unsubstituted polycyclic aromatic ring group, a substituted or unsubstituted polycyclic heteroaromatic ring group, or a combination thereof, or in Chemical Formula 1-2, X a is a substituted or unsubstituted polycyclic aromatic ring group.

4 . The monomer as claimed in claim 3 , wherein, in Chemical Formulae 1-1 and 1-2, D a , E a , E b , and E c are each independently a substituted or unsubstituted group of one of the following compounds:

wherein, in the above compounds,
Z 1 and Z 2 are each independently a single bond, a substituted or unsubstituted
C1 to C20 alkylene group, a substituted or unsubstituted C3 to C20 cycloalkylene group, a substituted or unsubstituted C6 to C20 arylene group, a substituted or unsubstituted C2 to C20 heteroarylene group, a substituted or unsubstituted C2 to C20 alkenylene group, a substituted or unsubstituted C2 to C20 alkynylene group, C═O, NR, oxygen (O), sulfur (S), or a combination thereof,
Z 3 is nitrogen (N), CR, or a combination thereof, and
R is hydrogen, a substituted or unsubstituted C1 to C10 alkyl group, a halogen atom, a halogen-containing group, or a combination thereof.

5 . The monomer as claimed in claim 3 , wherein, in Chemical Formulae 1-1 and 1-2, X a is a substituted or unsubstituted group of one of the following compounds:

6 . The monomer as claimed in claim 2 , wherein:
in Chemical Formula 1-1, at least one of X a , D a , E a , and E b is a group that includes a hydroxy group, and in Chemical Formula 1-2, at least one of X a , D a , E a , E b , and E c is a group that includes a hydroxy group.

7 . The monomer as claimed in claim 1 , wherein the monomer has a molecular weight of about 800 to about 5,000.

8 . An organic layer composition, comprising:
a solvent; and a monomer represented by Chemical Formula 1,

wherein, in Chemical Formula 1,
X is a substituted or unsubstituted aromatic ring group,
A, B, and C are each independently a group represented by Chemical Formula 2,
k, m, and n are each independently 0 or 1, a sum of k, m, and n being 2 or 3,
when k=m=1, A and B are different groups from each other, when k=n=1, A and C are different groups from each other, and when m=n=1, B and C are different groups from each other, and
when k=m=n=1, at least two of A, B, and C are different groups from each other,

wherein, in Chemical Formula 2,
D and E are each independently a substituted or unsubstituted aromatic ring group, a substituted or unsubstituted heteroaromatic ring group, or a combination thereof,
Z 4 and Z 5 are each independently a hydroxy group, a thionyl group, a thiol group, a cyano group, a substituted or unsubstituted amino group, a halogen atom, a halogen-containing group, or a combination thereof,
w is 0 or 1, and
* is a linking point.

9 . The organic layer composition as claimed in claim 8 , wherein the monomer is represented by one of Chemical Formulae 1-1 and 1-2:

wherein, in Chemical Formulae 1-1 and 1-2,
X a is a substituted or unsubstituted aromatic ring group,
D a , E a , E b , and E c are each independently a substituted or unsubstituted aromatic ring group, a substituted or unsubstituted heteroaromatic ring group, or a combination thereof,
Z 4a , Z 4b , Z 4c , and Z 5a are each independently a hydroxy group, a thionyl group, a thiol group, a cyano group, a substituted or unsubstituted amino group, a halogen atom, a halogen-containing group, or a combination thereof.

10 . The organic layer composition as claimed in claim 9 , wherein:
in Chemical Formula 1-1, at least one of D a , E a , and E b is a substituted or unsubstituted polycyclic aromatic ring group, a substituted or unsubstituted polycyclic heteroaromatic ring group, or a combination thereof, or in Chemical Formula 1-1, X a is a substituted or unsubstituted polycyclic aromatic ring group, and in Chemical Formula 1-2, at least one of D a , E a , E b , and E c is a substituted or unsubstituted polycyclic aromatic ring group, a substituted or unsubstituted polycyclic heteroaromatic ring group, or a combination thereof, or in Chemical Formula 1-2, X a is a substituted or unsubstituted polycyclic aromatic ring group.

11 . The organic layer composition as claimed in claim 10 , wherein, in Chemical Formulae 1-1 and 1-2, D a , E a , E b , and E c are each independently a substituted or unsubstituted group of one of t

Assignees

• Samsung Sdi Co Ltd

Inventors

• Choi Yoo-Jeong
• Kim Yun-Jun
• Park Yu-Shin
• Park You-Jung
• Song Hyun-Ji

Classifications

• H10P50/287

  by chemical means · CPC title

• H10P76/20

  of masks comprising organic materials · CPC title

• H10P50/73

  using masks for insulating materials · CPC title

• H10P50/283 Primary

  by chemical means · CPC title

• C07D311/58

  other than with oxygen or sulphur atoms in position 2 or 4 · CPC title