Substrate transfer mechanisms

Patent metadata

Field	Value
Publication number	US-2016204019-A1
Application number	US-201514965228-A
Country	US
Kind code	A1
Filing date	Dec 10, 2015
Priority date	Jan 9, 2015
Publication date	Jul 14, 2016
Grant date	—

Abstract

In one embodiment, a substrate support assembly includes a susceptor for supporting a substrate, and a supporting transfer mechanism coupled to the susceptor, the supporting transfer mechanism having a surface for supporting a peripheral edge of the substrate, the supporting transfer mechanism being movable relative to an upper surface of the susceptor.

First claim

1 . A substrate support assembly, comprising:
a susceptor for supporting a substrate; and a supporting transfer mechanism coupled to the susceptor, the supporting transfer mechanism having a surface for supporting a peripheral edge of the substrate, the supporting transfer mechanism being movable relative to an upper surface of the susceptor.

2 . The substrate support assembly of claim 1 , wherein the supporting transfer mechanism comprises a ring.

3 . The substrate support assembly of claim 2 , wherein the ring has a first gap.

4 . The substrate support assembly of claim 3 , wherein the ring has a second gap opposing the first gap.

5 . The substrate support assembly of claim 3 , wherein the susceptor comprises a recessed portion sized to receive the ring.

6 . The substrate support assembly of claim 1 , wherein the supporting transfer mechanism comprises a plurality of ring segments.

7 . The substrate support assembly of claim 6 , wherein the susceptor comprises a recessed portion sized to receive the ring segments.

8 . The substrate support assembly of claim 1 , wherein the supporting transfer mechanism comprises a plurality of lift pins movably disposed in openings formed in the susceptor.

9 . The substrate support assembly of claim 8 , wherein each of the lift pins comprises a flared head disposed on a shaft.

10 . The substrate support assembly of claim 9 , wherein the flared head comprises a sloped surface.

11 . A substrate support assembly, comprising:
a susceptor; and a supporting transfer mechanism having a surface for supporting a substrate, the supporting transfer mechanism being movable relative to an upper surface of the susceptor and adapted to nest within a recess formed in the susceptor.

12 . The substrate support assembly of claim 11 , wherein the supporting transfer mechanism comprises a detachable support plate.

13 . The substrate support assembly of claim 11 , wherein the susceptor includes one or more indexing features that interface with the supporting transfer mechanism.

14 . The substrate support assembly of claim 11 , wherein the supporting transfer mechanism comprises a ring.

15 . The substrate support assembly of claim 14 , wherein the ring has a first gap.

16 . The substrate support assembly of claim 15 , wherein the ring has a second gap opposing the first gap.

17 . The substrate support assembly of claim 11 , wherein the supporting transfer mechanism comprises a plurality of ring segments.

18 . A substrate support assembly, comprising:
a susceptor for supporting a substrate, the susceptor having a recessed surface and one or more indexing features extending therefrom; and a supporting transfer mechanism coupled to the susceptor, the supporting transfer mechanism having a surface for supporting a peripheral edge of the substrate, the supporting transfer mechanism being movable relative to an upper surface of the susceptor, wherein the supporting transfer mechanism comprises:
a disc-shaped body;
annular portions extending from the disc-shaped body; and
a pocket formed in the annular portion to receive one of the indexing features of the susceptor.

19 . The substrate support assembly of claim 18 , wherein the supporting transfer mechanism comprises a ring.

20 . The substrate support assembly of claim 18 , wherein the supporting transfer mechanism comprises a plurality of ring segments.

Assignees

• Applied Materials Inc

Inventors

• Ishii Masato
• Samir Mehmet Tugrul
• Lau Shu-Kwan
• Tobin Jeffrey

Classifications

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/7611

  characterised by edge profile or support profile · CPC title

• H10P72/7602 Primary

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/3306

  Horizontal transfer of a single workpiece · CPC title

• H10P72/0436 Primary

  mainly by radiation · CPC title