Method of generating quality affecting factor for semiconductor manufacturing process and generating system for the same

Patent metadata

Field	Value
Publication number	US-2016202312-A1
Application number	US-201514955633-A
Country	US
Kind code	A1
Filing date	Dec 1, 2015
Priority date	Jan 14, 2015
Publication date	Jul 14, 2016
Grant date	—

Abstract

A quality affecting factor generation method for a semiconductor manufacturing process is provided. The method includes receiving data of a customer evaluation result obtained by a real use of shipped semiconductor products, preprocessing the data of the customer evaluation result, determining critical quality factors that affect a quality of the semiconductor products by applying a statistical model to the preprocessed data of the customer evaluation result; and determining a semiconductor product to be shipped to a customer company as a good product and a failed product using the determined critical quality factors and generating quality affecting factors of the semiconductor products to be managed to improve yield in a semiconductor manufacturing process.

First claim

What is claimed is:

1 . A quality affecting factor generation method for a semiconductor manufacturing process, the method comprising:
receiving data of a customer evaluation result obtained by a real use of shipped semiconductor products; preprocessing the data of the customer evaluation result to match the data of the customer evaluation result with manufacturing management evaluation data being managed for the semiconductor manufacturing process; determining critical quality factors that affect a quality of the semiconductor products by applying a statistical model to the preprocessed data of the customer evaluation result; and determining a semiconductor product to be shipped to a customer company as a good product and a failed product using the determined critical quality factors and generating quality affecting factors of the semiconductor products to be managed to improve yield in a semiconductor manufacturing process.

2 . The quality affecting factor generation method of claim 1 , wherein the data of the customer evaluation result is received from at least one customer company that is using the shipped semiconductor products.

3 . The quality affecting factor generation method of claim 1 , wherein the data of the customer evaluation result includes a test condition related to a test of the shipped semiconductor products, information of a test device used in the test, and defective item information of the tested semiconductor products.

4 . The quality affecting factor generation method of claim 1 , wherein the preprocessing comprises matching a form of the data of the customer evaluation result to a form of the manufacturing management evaluation data.

5 . The quality affecting factor generation method of claim 4 , wherein the form comprises at least one of a module, a package and a wafer level.

6 . The quality affecting factor generation method of claim 1 , wherein the determining the critical quality factors comprises a feature set search operation based on a stepwise feature selection.

7 . The quality affecting factor generation method of claim 6 , wherein the stepwise feature selection comprises executing a sequential forward selection and a sequential backward selection in parallel.

8 . The quality affecting factor generation method of claim 6 , wherein the determining the critical quality factors further comprises a feature set search operation based on a test result obtained by adding k fold cross validation to the stepwise feature selection, where k is a natural number.

9 . The quality affecting factor generation method of claim 1 , further comprising providing the generated quality affecting factors to a manufacturing system that controls the semiconductor manufacturing process.

10 . The quality affecting factor generation method of claim 1 , wherein the generated quality affecting factors are transmitted to at least one customer server.

11 . A quality affecting factor generation method for a semiconductor manufacturing process, the method comprising:
receiving data of a customer evaluation result obtained by a real use of shipped semiconductor products, the customer evaluation result being related to generation of quality affecting factors of the shipped semiconductor products; preprocessing the data of customer evaluation result to match manufacturing management evaluation data being managed for the semiconductor manufacturing process; determining critical quality factors that affect quality of the shipped semiconductor products by applying a statistical model to the preprocessed data; dividing semiconductor products to be shipped to a customer company into a good product and a failed product using the determined critical quality factors; and generating quality affecting factors of the semiconductor products that are to be managed to improve a yield in the semiconductor manufacturing process by applying the divided semiconductor products to be shipped to a real customer company test environment to check the generated quality affecting factors with respect to the divided semiconductor products.

12 . The quality affecting factor generation method of claim 11 , wherein the data of the customer evaluation result is received from a customer server of at least one customer company that purchased the shipped semiconductor products.

13 . The quality affecting factor generation method of claim 11 , wherein the data of the customer evaluation result comprises a test condition related to a test of the shipped semiconductor products, information of a test device used in the test, and defective item information of the tested semiconductor products according to a wafer level, a package level and a module level of the semiconductor products.

14 . The quality affecting factor generation method of claim 11 , wherein the determining the critical quality factors comprises a feature set search operation based on a stepwise feature selection that executes a sequential forward selection and a sequential backward selection in parallel.

15 . The quality affecting factor generation method of claim 11 , wherein the determining the critical quality factors further comprises a feature set search operation based on a test result obtained by adding k fold cross validation to the stepwise feature selection, where k is a natural number.

16 . A method of generating quality affecting factors for a semiconductor manufacturing process, the method comprising:
performing an iterative feedback loop comprising:
receiving, from a customer, customer evaluation results obtained by testing shipped semiconductor products in customer products, the shipped semiconductor products being manufactured by the semiconductor manufacturing process;
determining quality affecting factors for the customer based on the received customer evaluation results, and shipping, to the customer, semiconductor products selected based on the determined quality affecting factors, for testing in the customer products; and
controlling the semiconductor manufacturing process according to the determined quality affecting factors for the customer in order to increase a yield of the semiconductor manufacturing process for the customer.

17 . The method of claim 16 , wherein the determining the quality affecting factors comprises:
preprocessing the customer evaluation results to match manufacturing management evaluation data being managed for the semiconductor manufacturing process; determining critical quality factors that affect quality of the shipped semiconductor products by applying a statistical model to the preprocessed data; dividing semiconductor products to be shipped to the customer into a good product and a failed product using the determined critical quality factors; and determining the quality affecting factors based on the divided semiconductor products to be shipped.

18 . The method of claim 16 , wherein the customer evaluation results include a test condition related to a test used in testing the shipped semiconductor products, information of a test device used in the test, and defective item information of the tested semiconductor products.

19 . The method of claim 17 , wherein the determining the critical quality factors comprises a feature set search operation based on a stepwise feature selection.

20 . The method of claim 19 , wherein the stepwise feature selection comprises executing a sequential forward selection and a sequential backward selection in parallel.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Kim Seungli
• Kang Bokyoung
• Kwon Ji-Youn
• Kim Gilhan
• Park Chanhun
• Cho Byonghun
• Kim Sehoon

Classifications

• H10P74/23

  characterised by multiple measurements, corrections, marking or sorting processes · CPC title

• G01R31/26

  Testing of individual semiconductor devices (testing of photovoltaic devices H02S50/10; testing or measuring during manufacture or treatment {H10P74/00}) · CPC title

• G06Q50/04 Primary

  Manufacturing · CPC title

• G01R31/2894 Primary

  Aspects of quality control [QC] (G01R31/31718 takes precedence; program control for QC G05B19/41875) · CPC title

• G06Q30/0282

  Rating or review of business operators or products · CPC title