Method of generating quality affecting factor for semiconductor manufacturing process and generating system for the same
US-10254333-B2 · Apr 9, 2019 · US
This page is not indexed by search engines while we improve data quality.
Patent family 56367397
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 56367397 |
| Family type | — |
| Earliest priority | Jan 14, 2015 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10254333B2 — Method of generating quality affecting factor for semiconductor manufacturing process and generating system for the same |
Representative publication
Best representative member for this family based on priority and filing country.
US10254333B2 — Method of generating quality affecting factor for semiconductor manufacturing process and generating system for the same (published Apr 9, 2019)
Member publications
Related publications in this family.