Amino sulfonic acid based polymers for copper electroplating

Patent metadata

Field	Value
Publication number	US-2016186350-A1
Application number	US-201614994211-A
Country	US
Kind code	A1
Filing date	Jan 13, 2016
Priority date	Dec 30, 2014
Publication date	Jun 30, 2016
Grant date	—

Abstract

Amino sulfonic acid based polymers are reaction products of amino sulfonic acids, an amine, polyepoxide compounds and epihalohydrin. The polymers may be used as levelers in copper electroplating baths, to provide good throwing power. Such reaction products may plate copper or copper alloys with good surface properties and good physical reliability.

First claim

1 - 8 . (canceled)

9 : A method comprising:
a) providing a substrate; b) providing a composition comprising one or more sources of copper ions, an electrolyte and a reaction product including one or more amino sulfonic acids or salts thereof, one or more amines, one or more polyepoxides and one or more epihalohydrins; c) contacting a substrate with the composition; d) applying a current to the substrate and the composition; and e) depositing a copper or copper alloy on the substrate.

10 : The method of claim 9 , wherein the composition further comprises one or more sources of tin ions.

11 : The method of claim 9 wherein the substrate comprises a plurality of one or more of through-holes, trenches and vias.

12 : The method of claim 9 , wherein the one or more amino sulfonic acids or salts thereof has a formula:

wherein X comprises hydrogen or an alkali metal ion; R′ comprises hydrogen, hydroxyl, linear or branched (C 1 -C 5 )alkyl, hydroxy(C 1 -C 5 )alkyl, substituted or unsubstituted aryl; R comprise linear, branched, substituted or unsubstituted (C 1 -C 20 )alkylene moiety; substituted or unsubstituted (C 5 -C 10 )alicyclic, or aromatic moiety of 6 to 18 carbons, substituted or unsubstituted.

13 : The method of claim 9 , wherein the one or more polyepoxides is chosen from 1,4-butanediol diglycidyl ether, ethylene glycol diglycidyl ether, diethylene glycol diglycidyl ether, triethylene glycol diglycidyl ether, glycerol diglycidyl ether, neopentyl glycol diglycidyl ether, propylene glycol diglycidyl ether, dipropylene glycol diglycidyl ether, poly(ethyleneglycol) diglycidyl ether and poly(propyleneglycol) diglycidyl ether.

14 : The method of claim 9 , wherein the one or more polyepoxides are chosen from glycerin triglycidyl ether, trimethylolpropanetriglycidyl ether, diglycerol tetraglycidyl ether, erythritol tetraglycidyl ether, arabinose tetraglycidyl ether, triglycerol pentaglycidyl ether, fructose pentaglycidyl ether, xylitol pentaglycidyl ether, tetraglycerol hexaglycidyl ether, and sorbitol hexaglycidyl ether.

15 : The method of claim 9 , wherein the one or more polyepoxides are chosen from dicyclopentadiene dioxide and 1,2,5,6-diepoxycyclooctane.

16 : The method of claim 9 , wherein the one or more epihalohydrin compounds have a general formula:

where Y may be chosen from hydrogen and (C 1 -C 4 )alkyl, X′ is halogen, such as chlorine, bromine, fluorine and iodine.

Assignees

• Rohm & Haas Elect Mat

Inventors

• Lu Weijing
• Niazimbetova Zuhra I
• Rzeznik Maria Anna

Classifications

• C08G65/48 Primary

  Polymers modified by chemical after-treatment · CPC title

• C08G59/00

  Polycondensates containing more than one epoxy group per molecule (low-molecular-weight polyepoxy compounds C07); Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups · CPC title

• H05K3/188

  by direct electroplating · CPC title

• C08G65/3348

  containing nitrogen in addition to sulfur · CPC title

• C25D5/38

  of refractory metals or nickel · CPC title