Modified novolac phenol resin, resist material, coating film, and resist permanent film

Patent metadata

Field	Value
Publication number	US-2016017083-A1
Application number	US-201414773769-A
Country	US
Kind code	A1
Filing date	Jan 21, 2014
Priority date	Mar 14, 2013
Publication date	Jan 21, 2016
Grant date	—

Abstract

The present invention provides a modified novolac phenol resin having excellent developability and heat resistance, a method for producing the same, a photosensitive composition, a resist material, and a permanent film. The modified novolac phenol resin has a molecular structure in which hydrogen atoms of phenolic hydroxyl groups possessed by a novolac phenol resin (C) are partially or entirely substituted by acid dissociable groups, the novolac phenol resin (C) being produced by condensing an aromatic compound (A) represented by structural formula (1) below with an aldehyde compound (B).

First claim

1 . A modified novolac phenol resin having a molecular structure in which hydrogen atoms of phenolic hydroxyl groups possessed by a novolac phenol resin (C) are partially or entirely substituted by acid dissociable groups, the novolac phenol resin (C) being produced by condensing an aromatic compound (A) represented by structural formula (1) below with an aldehyde compound (B),

[in the formula, Ar is a structural moiety represented by structural formula (2-1) or (2-2) below

(in the formula, k is an integer of 0 to 2, p is an integer of 1 to 5, q is an integer of 1 to 7, and R 3 is any one of a hydrogen atom, an alkyl group, an alkoxy group, an aryl group, an aralkyl group, and a halogen atom), R 1 and R 2 are each any one of an alkyl group, an alkoxy group, an aryl group, an aralkyl group, and a halogen atom, and m and n are each an integer of 1 to 4].

2 . The modified novolac phenol resin according to claim 1 , wherein the acid dissociable group is any one of a tertiary alkyl group, an alkoxyalkyl group, an acyl group, an alkoxycarbonyl group, a heteroatom-containing cyclic hydrocarbon group, and a trialkylsilyl group.

3 . The modified novolac phenol resin according to claim 2 , wherein the acid dissociable group is any one of an alkoxyalkyl group, an alkoxycarbonyl group, and a heteroatom-containing cyclic hydrocarbon group.

4 . The modified novolac phenol resin according to claim 1 , wherein a presence ratio [(α)/(β)] of phenolic hydroxyl group (α) to acid dissociable group (β) in the resin is within a range of 95/5 to 10/90.

5 . The modified novolac phenol resin according to claim 1 , produced by reacting a phenol compound (a1) having any one of an alkyl group, an alkoxy group, an aryl group, an aralkyl group, and a halogen atom as a substituent on an aromatic nucleus with an aromatic aldehyde (a2) to produce an aromatic compound (A), condensation-reacting the resultant aromatic compound (A) with an aldehyde compound (B), and then reacting the resultant novolac phenol resin (C) with a compound represented by any one of structural formulae (3-1) to (3-8)

(in the formulae, X represents a halogen atom, Y represents a halogen atom or a trifluoromethanesulfonyl group, R 4 to R 8 each independently represent an alkyl group having 1 to 6 carbon atoms or a phenyl group, and n is 1 or 2).

6 . A method for producing a modified novolac phenol resin, the method comprising reacting a phenol compound (a1) having any one of an alkyl group, an alkoxy group, an aryl group, an aralkyl group, and a halogen atom as a substituent on an aromatic nucleus with an aromatic aldehyde (a2) to produce an aromatic compound (A), condensation-reacting the resultant aromatic compound (A) with an aldehyde compound (B), and then reacting the resultant novolac phenol resin (C) with a compound represented by any one of structural formulae (3-1) to (3-8)

(in the formulae, X represents a halogen atom, Y represents a halogen atom or a trifluoromethanesulfonyl group, R 4 to R 8 each independently represent an alkyl group having 1 to 6 carbon atoms or a phenyl group, and n is 1 or 2).

7 . A photosensitive composition comprising the modified novolac phenol resin according to claim 1 and a photoacid generator.

8 . A resist material comprising the photosensitive composition according to claim 7 .

9 . A coating film comprising the photosensitive composition according to claim 7 .

10 . A resist permanent film comprising the resist material according to claim 8 .

Assignees

• Dainippon Ink & Chemicals

Inventors

• Imada Tomoyuki
• Kage Takakazu

Classifications

• C08G8/30 Primary

  by unsaturated compounds, e.g. terpenes · CPC title

• G03F7/038

  Macromolecular compounds which are rendered insoluble or differentially wettable (G03F7/075 takes precedence; macromolecular azides G03F7/012; macromolecular diazonium compounds G03F7/021) · CPC title

• C08G8/28

  Chemically modified polycondensates · CPC title

• C09D161/14

  Modified phenol-aldehyde condensates · CPC title

• G03F7/0392

  the macromolecular compound being present in a chemically amplified positive photoresist composition · CPC title