Device for generating vapor from solid or liquid starting material for cvd or pvd apparatus

Patent metadata

Field	Value
Publication number	US-2016007410-A1
Application number	US-201514788626-A
Country	US
Kind code	A1
Filing date	Jun 30, 2015
Priority date	Jul 1, 2014
Publication date	Jan 7, 2016
Grant date	—

Abstract

The invention relates to a device for generating a vapor for a CVD or PVD apparatus, with at least two thermal transfer bodies arranged successively in the direction of flow of a carrier gas and having thermal transfer surfaces, each of which can be heated to a thermal transfer temperature, with an inlet pipe ( 4 ) for feeding an aerosol to one of the thermal transfer bodies for vaporization of the aerosol by bringing the aerosol particles into contact with the thermal transfer surfaces. A provision is made that at least one of the thermal transfer bodies has an opening in which an inlet pipe ( 4 ) is located, the inlet pipe ( 4 ) having a first flow channel ( 23 ) for feeding the aerosol in and a second flow channel ( 24 ) for feeding a carrier gas in, gas passage openings ( 29, 30 ) being provided through which the carrier gas can flow out of the second flow channel ( 24 ) into the first flow channel ( 23 ), and a provision particularly being made that the second flow channel ( 24 ) is sealed in the area of the mouth ( 4 ′) of the inlet pipe.

First claim

1 . A device for generating a vapor for a CVD or PVD apparatus, with at least two thermal transfer bodies ( 1 , 2 , 3 ) arranged successively in a housing ( 12 ) in the direction of flow of a carrier gas and having thermal transfer surfaces, each of which can be heated to a thermal transfer temperature, with an inlet pipe ( 4 , 5 ) for feeding an aerosol to one of the thermal transfer bodies ( 2 , 3 ) for vaporization of the aerosol by bringing the aerosol particles into contact with the thermal transfer surfaces, wherein at least one of the thermal transfer bodies ( 1 , 2 , 3 ) has an opening ( 6 , 7 , 8 ) in which an inlet pipe ( 4 , 5 ) is located, characterized in that the thermal transfer bodies ( 1 , 2 , 3 ) can be heated to different temperatures, an upstream thermal transfer body ( 1 ) first in the direction of flow being a preheating body for the carrier gas, which can be fed through a carrier gas feed line ( 11 ) upstream from the first thermal transfer body into the housing ( 12 ), in which housing ( 12 ) the thermal transfer bodies ( 1 , 2 , 3 ) are arranged successively in the direction of flow such that the carrier gas flows through all of the thermal transfer bodies ( 1 , 2 , 3 ) and either the inlet pipe ( 4 , 5 ) is guided through the opening ( 6 , 7 , 8 ) of a thermal transfer body ( 1 , 2 , 3 ) and leads into a spacing gap ( 9 , 10 ) between the first and the second thermal transfer bodies ( 1 , 2 ; 2 , 3 ) or the mouth ( 4 ′ 5 ′) of the inlet pipe ( 4 , 5 ) is arranged in a thermal transfer body ( 2 , 3 ).

2 . The device as set forth in claim 1 , characterized in that the opening ( 6 , 7 ) is associated with an upstream thermal transfer body ( 1 , 2 ) and the mouth ( 4 ′, 5 ′) of the inlet pipe ( 4 , 5 ) is arranged in the direction of flow before a downstream thermal transfer body ( 2 , 3 ) or in a downstream thermal transfer body ( 2 , 3 ).

3 . The device as set forth in claim 2 , characterized in that the thermal transfer bodies ( 1 , 2 , 3 ) are made of an open-pored solid foam having a porosity of 500 to 100 pores per inch, the proportion of all open areas on the surface of the solid foam particularly being greater than 90%.

4 . The device as set forth in claim 3 , characterized in that the thermal transfer bodies ( 1 , 2 , 3 ) are electrically conductive and have electrical contacts ( 20 , 21 ) for conducting an electrical current for the purpose of heating the thermal transfer body ( 1 , 2 , 3 ) to a thermal transfer temperature.

5 . The device as set forth in claim 4 , characterized in that the thermal transfer bodies ( 1 , 2 , 3 ) can be heated such that the thermal transfer temperature of a downstream thermal transfer body ( 2 , 3 ) is greater than the thermal transfer temperature of an upstream thermal transfer body ( 1 , 2 ).

6 . A device for generating a vapor for a CVD or PVD apparatus, with at least one thermal transfer body ( 1 , 2 , 3 ) having thermal transfer surfaces that can be heated to a thermal transfer temperature, and with an inlet pipe ( 4 ) for feeding an aerosol to the thermal transfer body for vaporization of the aerosol by bringing the aerosol particles in contact with the thermal transfer surfaces, characterized in that the inlet pipe has means ( 29 , 30 ; 27 ) for allowing the aerosol flow passing in the direction of flow (S) through the inlet pipe ( 4 ) to emerge from the mouth ( 4 ′) in expanded form.

7 . The device as set forth in claim 6 , characterized in that the inlet pipe ( 4 ) has a first flow channel ( 23 ) for feeding the aerosol in and a second flow channel ( 24 ) for feeding a carrier gas in, wherein gas passage openings ( 29 , 30 ) are provided through which the carrier gas can flow out of the second flow channel ( 24 ) into the first flow channel ( 23 ) and wherein a provision is particularly made that the second flow channel ( 24 ) is sealed in the area of the mouth ( 4 ′) of the inlet pipe.

8 . The device as set forth in claim 7 , characterized in that first gas passage openings ( 29 ) lead into the first flow channel ( 23 ) at such an angle to the direction of flow (S) of the aerosol that the carrier gas flow passing through the first gas passage openings ( 29 ) generates turbulence in the first flow channel ( 23 ), a provision particularly being made that the second flow channel ( 24 ) encloses the first flow channel ( 23 ).

9 . The device as set forth in claim 8 , characterized in that second gas passage openings ( 30 ) are arranged in the first flow channel ( 23 ) at such an angle to the direction of flow (S) of the aerosol that a carrier gas flow passing through the second gas passage openings ( 30 ) generates a vortex in the area of the mouth ( 4 ′) about an axis aligned in the direction of flow (S).

10 . The device as set forth in claim 9 , characterized in that a pipe ( 33 ) forming the first flow channel ( 23 ) has a particularly rotationally symmetrical widening ( 27 ) in the area of the mouth ( 4 ′).

11 . The device as set forth in claim 10 , characterized in that the section of the inlet pipe ( 4 , 5 ) located in the opening ( 6 , 7 , 8 ) is enclosed by an insulating sleeve ( 28 ).

12 . The device as set forth in claim 11 , characterized by means for cooling the wall of the flow channel ( 23 ) through which the aerosol flows.

13 . The device as set forth in claim 12 , characterized in that the means for cooling has a flow channel ( 23 ) through which a coolant can be conducted.

14 . A device for generating a vapor for a CVD or PVD apparatus, with at least one thermal transfer body ( 1 , 2 , 3 ) that can be heated to a thermal transfer temperature having an opening ( 6 , 7 , 8 ) in which an inlet pipe ( 4 , 5 ) is located for introducing an aerosol, wherein a carrier gas feed line ( 11 ) is provided upstream from the thermal transfer body ( 1 ) for feeding in a carrier gas, characterized in that a return flow check valve ( 18 , 19 ) is arranged in the direction of flow before the thermal transfer body ( 1 ), which return flow check valve ( 18 , 19 ) is particularly formed by two tightly adjacent plates extending over the entire flow cross section that have openings ( 18 ′, 19 ′), the openings ( 18 ′, 19 ′) of different plates being arranged so as to be offset with respect to each other transverse to the direction of flow.

Assignees

• Aixtron Se

Inventors

• Long Michael
• Beccard Birgit Irmgard
• Poqué Andreas

Classifications

• H05B3/06

  Heater elements structurally combined with coupling elements or holders · CPC title

• C23C16/4483

  using a porous body · CPC title

• H05B3/0014 Primary

  Devices wherein the heating current flows through particular resistances · CPC title

• C23C14/26

  by resistance or inductive heating of the source · CPC title

• C23C14/246

  Replenishment of source material · CPC title