Rotationally elastic coupling with wear sensor
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Measurement apparatus, measurement method, and method of manufacturing article
US2015073740A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2015073740-A1 |
| Application number | US-201414477331-A |
| Country | US |
| Kind code | A1 |
| Filing date | Sep 4, 2014 |
| Priority date | Sep 9, 2013 |
| Publication date | Mar 12, 2015 |
| Grant date | — |
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Abstract
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The present invention provides a measurement apparatus which includes a probe having a leading edge portion configured to come into contact with a surface to be measured and a holding portion configured to hold the leading edge portion, and measures a shape of the surface by scanning the probe relative to the surface in a state in which the leading edge portion and the surface are in contact, comprising a processing unit configured to correct measurement data at a measurement point on the surface based on data of a scanning distance of the probe and information about abrasion of the leading edge portion caused by scanning of the probe.
First claim
Opening claim text (preview).
What is claimed is: 1 . A measurement apparatus which includes a probe having a leading edge portion configured to come into contact with a surface to be measured and a holding portion configured to hold the leading edge portion, and measures a shape of the surface by scanning the probe relative to the surface in a state in which the leading edge portion and the surface are in contact, comprising: a processing unit configured to correct measurement data at a measurement point on…
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Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
- G01N3/56Primary
Physics · mapped topic
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Frequently asked questions
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- What does patent US2015073740A1 cover?
- The present invention provides a measurement apparatus which includes a probe having a leading edge portion configured to come into contact with a surface to be measured and a holding portion configured to hold the leading edge portion, and measures a shape of the surface by scanning the probe relative to the surface in a state in which the leading edge portion and the surface are in contact, c…
- Who is the assignee on this patent?
- Canon Kk
- What technology area does this patent fall under?
- Primary CPC classification G01N3/56. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Thu Mar 12 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).