Overlay and Semiconductor Process Control Using a Wafer Geometry Metric
US-2016372353-A1 · Dec 22, 2016 · US
Physics
Physics · Cooperative Patent Classification (CPC)
Computing, optics, measurement, and control technologies.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | G01B9/02027 |
| Official title | — |
| Display label | Physics (mapped technology topic) |
| Total patents | 296 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is stable.
| Year | Patents |
|---|---|
| 2015 | 42 |
| 2016 | 27 |
| 2017 | 24 |
| 2018 | 23 |
| 2019 | 23 |
| 2020 | 21 |
| 2021 | 25 |
| 2022 | 35 |
| 2023 | 29 |
| 2024 | 17 |
| 2025 | 24 |
| 2026 | 6 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Positioning apparatus, lithography apparatus, and article manufacturing method
US-9523569-B2 · Dec 20, 2016 · US
Optical Coherence Tomography Using Polarization Information
US-2016313112-A1 · Oct 27, 2016 · US
Method and System for Determining In-Plane Distortions in a Substrate
US-2016290789-A1 · Oct 6, 2016 · US
System for fourier domain optical coherence tomography
US-9448056-B2 · Sep 20, 2016 · US
Selective amplification of optical coherence tomography signals
US-2016252340-A1 · Sep 1, 2016 · US
Measuring apparatus including multi-wavelength interferometer
US-9372068-B2 · Jun 21, 2016 · US
Wavelength encoded multi-beam optical coherence tomography
US-2016161244-A1 · Jun 9, 2016 · US
Three-dof heterodyne grating interferometer displacement measurement system
US-2016153764-A1 · Jun 2, 2016 · US
Dual Wavelength Dual Interferometer with Combiner-Splitter
US-2016146590-A1 · May 26, 2016 · US
Two-dof heterodyne grating interferometer displacement measurement system
US-2016138903-A1 · May 19, 2016 · US
Pressure-Balanced Seismic Sensor Package
US-2016097631-A1 · Apr 7, 2016 · US
Method and apparatus for optical imaging via spectral encoding
US-9304121-B2 · Apr 5, 2016 · US
Generating an image using an active optical interference system
US-9267782-B1 · Feb 23, 2016 · US
Acoustic signal receiving apparatus and photo-acoustic tomography
US-9267878-B2 · Feb 23, 2016 · US
Multi-Channel Optical Coherence Tomography
US-2016045106-A1 · Feb 18, 2016 · US
Alignment of an interferometer module for use in an exposure tool
US-9261800-B2 · Feb 16, 2016 · US
Gravity and/or acceleration measurements using dual interferometer configurations
US-2016033675-A1 · Feb 4, 2016 · US
Low cost high efficiency signal interrogation for multi-channel optical coherence tomography
US-9204800-B2 · Dec 8, 2015 · US
Image processing apparatus, OCT imaging apparatus, tomographic imaging system, control method, and program
US-9201004-B2 · Dec 1, 2015 · US
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Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC G01B9/02027?
- CPC G01B9/02027 is the Cooperative Patent Classification code for “Physics.”
- How many patents are filed under CPC G01B9/02027 (Physics)?
- Our database includes 296 publications tagged with this CPC code.
- Is patent activity under CPC G01B9/02027 growing?
- Publication counts under this code: 17 in 2024 vs 24 in 2025 (latest complete years).