Low mass substrate support

Patent metadata

Field	Value
Publication number	US-12584240-B2
Application number	US-202217731414-A
Country	US
Kind code	B2
Filing date	Apr 28, 2022
Priority date	May 12, 2021
Publication date	Mar 24, 2026
Grant date	Mar 24, 2026

Abstract

Systems and apparatus for a reduced mass substrate support are disclosed, according to certain embodiments. A front side pocket is provided for support of a substrate, while a backside pocket is provided that reduces the mass of the substrate support. By providing the backside pocket, the mass of the overall substrate support is reduced, providing faster thermal cycling times for the substrate support and reducing the weight of the substrate support for transport. Lift pin systems, according to disclosed embodiments, are compatible with existing pedestal systems by providing a hollow extension from each lift pin hole that extends from a bottom of the backside pocket to provide support for lift pin insertion and operation.

First claim

What is claimed is:

1 . A substrate support, comprising:
a disk-shaped body having a center located at an axial centerline of the disk-shaped body; and a frontside ring integrally formed on a frontside of the disk-shaped body; a front side pocket defined by the frontside of the disk-shaped body and a first radially-inward edge of the frontside ring, the frontside ring comprising one or more grooves extending in a line from the frontside ring toward the center of the disk-shaped body; a backside ring integrally formed on a backside of the disk-shaped body, wherein the frontside ring and the backside ring together have a first thickness; a backside pocket defined by the backside of the disk-shaped body and a second radially-inward edge of the backside ring; a plurality of lift pin openings extending through the disk-shaped body and positioned at a first radial distance from the center of the disk-shaped body; and a plurality of slots positioned on the backside at a second radial distance from the center of the disk-shaped body, the second radial distance being greater than the first radial distance.

2 . The substrate support of claim 1 , wherein the front side pocket has a radius of about 151 mm to about 155 mm and a depth of about 1.06 mm to about 1.10 mm at a center of the front side pocket.

3 . The substrate support of claim 2 , wherein the front side pocket has a depth of about 0.28 mm to about 0.68 mm at an edge of the front side pocket adjacent to the ring.

4 . The substrate support of claim 2 , wherein the backside pocket has a radius of about 1 mm to about 153 mm.

5 . The substrate support of claim 4 , wherein the depth of the backside pocket is about 1.0 mm to about 1.80 mm.

6 . The substrate support of claim 5 , wherein a height of a hollow extension extending from each of the plurality of lift pin openings is about 1.76 mm to about 1.80 mm.

7 . The substrate support of claim 1 , wherein a thickness of the disk-shaped body at the center thereof is about 0.5 mm to about 12.6 mm.

8 . A substrate support, comprising:
a disk-shaped body, comprising: a first surface having a first raised circular ring disposed adjacent to a circumference of an outer edge of the disk-shaped body and defining a first side pocket comprising one or more grooves extending in a line from the first raised circular ring toward a center of the disk-shaped body, the first raised circular ring having a first radial width between the outer edge of the disk-shaped body and a radially-inward edge of the first raised circular ring; a second surface opposite the first surface on the disk-shaped body having a second raised circular ring disposed about the circumference of the disk-shaped body and defining a second side pocket, the second raised circular ring having a second radial width between the outer edge of the disk-shaped body and a radially-inward edge of the second raised circular ring; a plurality of lift pin openings formed through the disk-shaped body and positioned a first distance from center of the disk-shaped body; and a plurality of slots positioned on the second surface, the plurality of slots being radially aligned with the lift pin openings and positioned at a second radial distance from the center of the disk-shaped body, wherein the second radial distance is less than the circumference of the disk-shaped body and greater than the first distance.

9 . The substrate support of claim 8 , wherein the first side pocket has a radius of about 151 mm to about 155 mm and a depth of about 1.06 mm to about 1.10 mm.

10 . The substrate support of claim 9 , wherein the first side pocket has a depth of about 0.28 mm to about 0.68 mm at an edge of the first side pocket adjacent to the first raised circular ring.

11 . The substrate support of claim 9 , wherein the second side pocket has a radius of about 1 mm to about 153 mm.

12 . The substrate support of claim 11 , wherein the depth of the second side pocket is about 1.76 mm to about 1.80 mm.

13 . The substrate support of claim 12 , wherein a height of a hollow extension extending from each of the plurality of lift pin openings is about 1.0 mm to about 1.80 mm.

14 . The substrate support of claim 8 , wherein a thickness about a centerline of the disk-shaped body is about 0.83 mm.

15 . A processing chamber comprising:
an upper window and a lower window defining a process volume; and a substrate support disposed within the processing volume, comprising:
a disk-shaped body having a center located at an axial centerline of the disk-shaped body; and
a frontside ring integrally formed on a frontside of the disk-shaped body;
a front side pocket defined by the frontside of the disk-shaped body and a first radially-inward edge of the frontside ring, the frontside ring comprising one or more grooves extending in a line from the frontside ring toward the center of the disk-shaped body;
a backside ring integrally formed on a backside of the disk-shaped body, wherein the frontside ring and the backside ring have a first thickness;
a backside pocket defined by the backside of the disk-shaped body and a second radially-inward edge of the ring;
a plurality of lift pin openings extending through the disk-shaped and positioned at a first radial distance from the center of the disk-shaped body; and
a plurality of slots positioned on the backside at a second radial distance from the center of the disk-shaped body, the second radial distance being greater than the first radial distance.

16 . The processing chamber of claim 15 , wherein the front side pocket has a radius of about 151 mm to about 155 mm and a depth of about 1.06 mm to about 1.10 mm at a center of the front side pocket.

17 . The processing chamber of claim 16 , wherein the front side pocket of the substrate support has a depth of about 0.28 mm to about 0.68 mm at an edge of the front side pocket adjacent to the ring.

18 . The processing chamber of claim 16 , wherein the backside pocket of the substrate support has a radius of about 1 mm to about 153 mm.

19 . The processing chamber of claim 18 , wherein the lift pin opening has a diameter of about 3.5 mm to 3.9 mm.

20 . The processing chamber of claim 19 , wherein a height of a hollow extension extending from each of the plurality of lift pin openings of the substrate support is about 1.76 mm to about 1.80 mm.

Assignees

• Applied Materials Inc

Inventors

• Bonham Shawn Joseph
• Luan Xinning
• Chen Hui
• Amos James M
• Newman John
• Fisher Kirk Allen
• Erhardt Aimee S
• Amos Philip Michael
• Ye Zhiyuan
• Lau Shu-Kwan
• Washington Lori D

Classifications

• C23C16/4583

  the substrate being supported substantially horizontally · CPC title

• H10P72/7611

  characterised by edge profile or support profile · CPC title

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/0436

  mainly by radiation · CPC title

• C30B25/12 Primary

  Substrate holders or susceptors · CPC title