Substrate support assembly and substrate processing apparatus
US-2022336259-A1 · Oct 20, 2022 · US
Substrate holder and method for fixing and bonding a substrate
US12581908B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12581908-B2 |
| Application number | US-202017922505-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 29, 2020 |
| Priority date | Jun 29, 2020 |
| Publication date | Mar 17, 2026 |
| Grant date | Mar 17, 2026 |
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Abstract
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A substrate holder for mounting a substrate, comprising fixing elements for fixing the substrate, wherein the fixing elements can be grouped into zones, and a corresponding method.
First claim
Opening claim text (preview).
What is claimed is: 1 . A substrate holder for mounting a substrate, comprising: fixing elements configured to fix the substrate and adapt a propagation speed and a form of a bonding wave during bonding to minimize run-out error during the bonding, the fixing elements being grouped into a plurality of zones, the zones being arranged circular ring-shaped and exclusively in a periphery of the substrate holder, the zones being separated azimuthally from each other; and a pluralit…
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Classifications
Electricity · mapped topic
Electricity · mapped topic
- H10P72/7608Primary
Electricity · mapped topic
- H10P72/78Primary
Electricity · mapped topic
- H01L21/68728Primary
Electricity · mapped topic
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Frequently asked questions
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- What does patent US12581908B2 cover?
- A substrate holder for mounting a substrate, comprising fixing elements for fixing the substrate, wherein the fixing elements can be grouped into zones, and a corresponding method.
- Who is the assignee on this patent?
- Ev Group E Thallner Gmbh
- What technology area does this patent fall under?
- Primary CPC classification H10P72/7608. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Mar 17 2026 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 6 related publications on this page (citations in our corpus or others sharing the same primary CPC).