Isolation for reactor for deposition of films onto particles

Patent metadata

Field	Value
Publication number	US-12539526-B2
Application number	US-202217971516-A
Country	US
Kind code	B2
Filing date	Oct 21, 2022
Priority date	Oct 22, 2021
Publication date	Feb 3, 2026
Grant date	Feb 3, 2026

Abstract

A deposition system includes an isolator or fume hood and a reactor for coating particles, the reactor including a rotatable reactor assembly positioned within the isolator or fume hood and including a reactor drum configured to hold a plurality of particles to be coated, an inlet tube, and an outlet tube. The reactor drum is configured to be detached from the inlet tube and the outlet tube by an operator while the reactor drum remains within the isolator or fume hood.

First claim

What is claimed is:

1 . A deposition system comprising:
an isolator comprising a glovebox; a detachable transfer container attachable to the isolator by a rapid transfer port; and a reactor for coating particles, the reactor including a rotatable reactor assembly positioned within the isolator and reachable with gloves of the glovebox and including: a reactor drum configured to hold a plurality of particles to be coated, an inlet tube including an inlet flange, and an outlet tube including an outlet flange, and wherein the reactor drum is configured to be detached from the inlet flange and the outlet flange by connectors securing the inlet flange and the outlet flange to the reactor drum by an operator using the gloves while the reactor drum remains within the isolator.

2 . The deposition system of claim 1 , wherein the reactor drum includes a cylindrical tube and endplate detachably secured to cover an opening of the cylindrical tube, wherein the endplate is configured to be removed from the cylindrical tube by the operator while the endplate and cylindrical tube remain within the isolator.

3 . The deposition system of claim 2 , wherein the endplate comprises a plurality of apertures formed therethrough to permit gas flow during operation of the reactor, and further comprising an end cap configured to be secured to the endplate to cover the plurality of apertures while the endplate and end cap remain within the isolator.

4 . The deposition system of claim 2 , comprising a canister, wherein the canister is configured to be detachably secured to the opening of the cylindrical tube by the operator while the canister and the cylindrical tube remain within the isolator.

5 . The deposition system of claim 2 , comprising a fixture for loading or unloading the reactor drum, the fixture positioned inside the isolator, the fixture having a rotatable support configured to receive the reactor drum while a canister is secured to the opening of the cylindrical tube of the reactor drum.

6 . The deposition system of claim 5 , wherein the rotatable support is rotatable between a first position in which the reactor drum is above the canister and a second position in which the reactor drum is below the canister.

7 . The deposition system of claim 1 , comprising a handle configured to grasp the reactor drum for the operator to lift the reactor drum out of the rotatable reactor assembly using the handle.

8 . The deposition system of claim 7 , wherein the handle comprises a first portion having a first arcuate blade and a second portion having a second arcuate blade, the first portion and second portion configured to be detachably secured to each other such that the first arcuate blade and second arcuate blade are positioned on opposite sides of the reactor drum to grasp the reactor drum.

9 . The deposition system of claim 8 , wherein the first portion comprises a first pair of parallel arcuate blades.

10 . The deposition system of claim 1 , wherein the isolator includes a window, and the rotatable reactor assembly is positioned within the isolator and viewable through the window and reachable with gloves of the glovebox, and wherein the reactor drum is configured to be detached from the inlet tube and the outlet tube by an operator using the gloves while the reactor drum remains within the isolator.

Assignees

• Applied Materials Inc

Inventors

• Burrows Brian Hayes
• Krishnasamy Sekar
• Raravi Ayyanagouda
• Mudalkar Monika
• Desai Govindraj
• Raju Hemantha Kumar
• Pattanshetty Basavaraj
• Ishikawa David Masayuki
• Sivaramakrishnan Visweswaren
• Swaminathan Shrikant
• Cambron Mario
• Navasca Robert
• Wang Miaojun
• Frankel Jonathan

Classifications

• C23C16/4584

  the substrate being rotated · CPC title

• C23C16/455

  characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber · CPC title

• C23C16/4417

  Methods specially adapted for coating powder · CPC title

• C23C16/4412

  Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps · CPC title

• B01J19/28

  Moving reactors, e.g. rotary drums (B01J19/08 takes precedence) · CPC title