Rotary reactor for uniform particle coating with thin films

Patent metadata

Field	Value
Publication number	US-11174552-B2
Application number	US-201916438371-A
Country	US
Kind code	B2
Filing date	Jun 11, 2019
Priority date	Jun 12, 2018
Publication date	Nov 16, 2021
Grant date	Nov 16, 2021

Abstract

A reactor for coating particles includes one or more motors, a rotary vacuum chamber configured to hold particles to be coated, wherein the rotary vacuum chamber is coupled to the motors, a controller configured to cause the motors to rotate the rotary vacuum chamber about an axial axis of the rotary vacuum chamber such that the particles undergo tumbling agitation, a vacuum port to exhaust gas from the rotary vacuum chamber, a paddle assembly including a rotatable drive shaft extending through the rotary vacuum chamber and coupled to the motors and at least one paddle extending radially from the drive shaft, such that rotation of the drive shaft by the motors orbits the paddle about the drive shaft in a second direction, and a chemical delivery system including a gas outlet on the paddle configured inject process gas into the particles.

First claim

What is claimed is:

1. A reactor for coating particles, comprising:
one or more motors;
a rotary vacuum chamber configured to hold a plurality of particles to be coated, a cylindrical portion of the rotary vacuum chamber having an inner diameter, and wherein the rotary vacuum chamber is coupled to the one or more motors to rotate the rotary vacuum chamber in a first direction about an axial axis of the cylindrical portion of the rotary vacuum chamber;
a vacuum port to exhaust gas from the rotary vacuum chamber;
a paddle assembly including a rotatable drive shaft extending through the rotary vacuum chamber along the axial axis of the rotary vacuum chamber and a plurality of paddles each extending radially from the drive shaft,
wherein the rotatable drive shaft is coupled to the one or more motors such that rotation of the drive shaft by the one or more motors orbits the plurality of paddles about the drive shaft in a second direction, wherein the plurality of paddles are equally angularly spaced about the axial axis,
wherein the paddle assembly includes gas outlets, and
wherein the paddle assembly includes chemical supply passages to deliver a process gas via the gas outlets into the plurality of particles; and

a controller configured to cause the one or more motors to rotate the rotary vacuum chamber in the first direction about the axial axis of the cylindrical portion of the rotary vacuum chamber at a rotation speed such that a portion of the plurality of particles provide a particle bed that remains in a lower portion of the rotary vacuum chamber,
wherein the gas outlets are positioned on the plurality of paddles at a distance from an inner surface of the rotary vacuum chamber such that, in operation as the plurality of paddles orbit, at least one gas outlet is located within the particle bed formed by the plurality of particles to percolate the process gas through the plurality of particles held within the rotary vacuum chamber.

2. The reactor of claim 1 , wherein rotation in the first direction is in a same direction of rotation as the rotation in the second direction.

3. The reactor of claim 1 , wherein the gas outlets are located on a trailing edge of the plurality of paddles.

4. The reactor of claim 1 , wherein a vacuum port is located in-line with the axial axis of the rotary vacuum chamber.

5. The reactor of claim 1 , wherein the plurality of paddles are configured to sweep along an entirety of a length of the rotary vacuum chamber along the axial axis of the rotary vacuum chamber.

6. The reactor of claim 1 , wherein the plurality of paddles further comprise anti-static brushes located between outer edges of the paddles and in contact with the inner surface of the inner diameter of the rotary vacuum chamber.

7. The reactor of claim 1 , further comprising a port to deliver particles to or receive particles from the rotary vacuum chamber.

8. The reactor of claim 1 , wherein the axial axis of the rotary vacuum chamber is oriented horizontally relative to gravity.

9. The reactor of claim 1 , wherein rotation in the first direction is in an opposite direction of rotation as the rotation in the second direction.

10. The reactor of claim 1 , wherein each paddle of the plurality of paddles comprises a base shaft coupled to the drive shaft and a plate portion that is wider than the base shaft and located on an end of the base shaft opposite a surface where the base shaft is coupled to the drive shaft,
wherein an outer edge of the paddle is separated from an inner surface of the rotary vacuum chamber, and
wherein the chemical supply passages deliver the process gas through the base shaft and plate portion of the paddle.

11. The reactor of claim 10 , wherein at least one gas outlet of the gas outlets is located on the plate portion of the paddle of the plurality of paddles.

12. The reactor of claim 10 , wherein the plurality of paddles are spaced along the axial axis such that a portion of a respective plate portion of each paddle overlaps laterally along the axial axis with at least one other portion of another plate portion of another paddle of the plurality of paddles.

13. A reactor for coating particles, comprising:
one or more motors;
a rotary vacuum chamber configured to hold a plurality of particles to be coated, a cylindrical portion of the rotary vacuum chamber having an inner diameter, and wherein the rotary vacuum chamber is coupled to the one or more motors;
a controller configured to cause the one or more motors to rotate the rotary vacuum chamber in a first direction about an axial axis of the cylindrical portion of the rotary vacuum chamber at a rotation speed such that the particles undergo tumbling agitation;
a vacuum port to exhaust gas from the rotary vacuum chamber; and
a paddle assembly including a rotatable drive shaft extending through the rotary vacuum chamber along the axial axis of the rotary vacuum chamber and a plurality of paddles extending radially from the drive shaft,
wherein the rotatable drive shaft is coupled to the one or more motors such that rotation of the drive shaft by the one or more motors orbits the plurality of paddles about the drive shaft in a second direction, wherein the plurality of paddles are equally angularly spaced about the axial axis,
wherein the paddle assembly includes gas outlets, and
wherein the paddle assembly includes chemical supply passages to deliver a process gas via the gas outlets into the plurality of particles,
wherein the gas outlets are positioned on the plurality of paddles at a distance from an inner surface of the rotary vacuum chamber such that, in operation as the plurality of paddles orbit, at least one gas outlet is located within a particle bed formed by the plurality of particles to percolate the process gas through the plurality of particles held within the rotary vacuum chamber.

14. The reactor of claim 13 , wherein the controller is configured to cause the one or more motors to rotate the rotary vacuum chamber about the axial axis at the rotation speed that is less than 6 RPM.

15. The reactor of claim 13 , wherein the rotation speed of the drive shaft relative to the rotary vacuum chamber about the axial axis is less than 6 rpm.

16. The reactor of claim 13 , further comprising a stationary vacuum chamber, wherein the rotary vacuum chamber is disposed within the stationary vacuum chamber.

17. The reactor of claim 16 , further comprising a vacuum pump coupled to the stationary vacuum chamber and coupled to the vacuum port to exhaust gas from the rotary vacuum chamber.

18. The reactor of claim 16 , wherein the the one or more motors are coupled to the stationary vacuum chamber.

19. The reactor of claim 16 , wherein the rotary vacuum chamber further comprises a surface of the inner diameter of the rotary vacuum chamber having horizontal or angled baffles.

20. The reactor of claim 13 , comprising a base to support the reactor on a mounting surface, and wherein the rotary vacuum chamber is secured to the base such that the axial axis will be perpendicular to the mounting surface.

21. The reactor of claim 13 , comprising a base to support the reactor on a mounting surface, and wherein the rotary vacuum chamber is secured to the base such that the axial axis will be parallel to the mounting surface.

Assignees

• Applied Materials Inc

Inventors

• Neikirk Colin C
• Narwankar Pravin K
• Gangakhedkar Kaushal
• Sivaramakrishnan Visweswaren
• Frankel Jonathan
• Ishikawa David Masayuki
• Truong Quoc
• Yudovsky Joseph

Classifications

• A61K9/5089

  Processes · CPC title

• B01J19/1887

  forming a thin film · CPC title

• B01J19/0066

  Stirrers (mixing per se B01F) · CPC title

• B01J19/006

  Baffles · CPC title

• B01J15/00

  Chemical processes in general for reacting gaseous media with non-particulate solids, e.g. sheet material; Apparatus specially adapted therefor (B01J19/08 takes precedence) · CPC title