Post CMP cleaning apparatus and post CMP cleaning methods

Patent metadata

Field	Value
Publication number	US-12538739-B2
Application number	US-201916353029-A
Country	US
Kind code	B2
Filing date	Mar 14, 2019
Priority date	Mar 14, 2019
Publication date	Jan 27, 2026
Grant date	Jan 27, 2026

Abstract

A post CMP cleaning apparatus is provided. The post CMP cleaning apparatus includes a cleaning stage. The post CMP cleaning apparatus also includes a rotating platen disposed in the cleaning stage, and the rotating platen is configured to hold and rotate a semiconductor wafer. The post CMP cleaning apparatus further includes a vibrating device disposed over the rotating platen. The post CMP cleaning apparatus further includes a solution delivery module disposed near the vibrating device and configured to deliver a cleaning fluid to the semiconductor wafer. The vibrating device is configured to provide the cleaning fluid with a specific frequency which is at least greater than 100 MHz while the rotating platen is rotating the semiconductor wafer, so that particles on the semiconductor wafer are removed by the cleaning fluid.

First claim

What is claimed is:

1 . A post CMP cleaning method, comprising:
rotating a semiconductor wafer by a first rotating platen in a first cleaning stage; providing a cleaning fluid to a surface of the semiconductor wafer; controlling a vibrating device to provide the cleaning fluid with a first frequency while rotating the semiconductor wafer, so that particles on the semiconductor wafer are removed by the cleaning fluid; disposing the semiconductor wafer at a second cleaning stage after controlling the vibrating device to provide the cleaning fluid with the first frequency; rotating the semiconductor wafer by a second rotating platen in the second cleaning stage while providing the cleaning fluid to the surface of the semiconductor wafer; and controlling the vibrating device to provide the cleaning fluid with a second frequency while rotating the semiconductor wafer, so that particles on the semiconductor wafer are removed by the cleaning fluid, wherein the second frequency is greater than the first frequency; wherein the cleaning fluid is provided by a solution delivery module; wherein the solution delivery module has a long strip-shaped housing, the vibrating device has a long strip-shaped housing, when viewed in a direction perpendicular to the first rotating platen or the second rotating platen, the housing of the solution delivery module is disposed near the vibrating device so that a fan shaped area on the semiconductor wafer is defined by the housing of the solution delivery module, the housing of the vibrating device and periphery of the semiconductor wafer, the housing of the solution delivery module has a longitudinal axis, and the solution delivery module provides the cleaning fluid in a direction perpendicular to the longitudinal axis toward the fan shaped area; wherein an angle of the fan shape area is less than 90 degrees, the housing of the solution delivery module has a first side extending along the longitudinal axis of the solution delivery module, the housing of the vibrating device has a second side extending along a longitudinal axis of the vibrating device, and the fan shape area is defined by the first side, the second side and the periphery of the semiconductor wafer, wherein the first side is not in contact with the second side, the first side faces the second side, and the first side is not parallel to the second side; wherein when viewed in the direction perpendicular to the first rotating platen or the second rotating platen, the portion of the cleaning fluid just leaving the solution delivery module does not overlap the vibrating device; wherein when viewed in a direction parallel to the first rotating platen or the second rotating platen, the housing of the solution delivery module has a bottom surface parallel to the semiconductor wafer, and the cleaning fluid is provided from the bottom surface toward the semiconductor wafer.

2 . The post CMP cleaning method as claimed in claim 1 , further comprising:
disposing the semiconductor wafer at a middle cleaning stage before disposing the semiconductor wafer at the second cleaning stage and after controlling the vibrating device to provide the cleaning fluid with the first frequency; rotating the semiconductor wafer by a middle rotating platen in the middle cleaning stage; and controlling the vibrating device to provide the cleaning fluid with a third frequency while rotating the semiconductor wafer, so that particles are removed by the cleaning fluid, wherein the second frequency is greater than the third frequency, and the third frequency is greater than the first frequency.

3 . The post CMP cleaning method as claimed in claim 2 , wherein the first frequency ranges from 0.1 Mhz to 10 Mhz, the third frequency ranges from 10 Mhz to 100 Mhz, and the second frequency is higher than 100 Mhz.

4 . The post CMP cleaning method as claimed in claim 3 , wherein the vibrating device includes three transducers respectively corresponding to the first frequency, the second frequency and the third frequency.

5 . The post CMP cleaning method as claimed in claim 2 , wherein the second frequency ranges from 1 GHz to 100 GHz.

6 . The post CMP cleaning method as claimed in claim 2 , wherein the semiconductor wafer is disposed on the first rotating platen in a first chamber during the first cleaning stage, and the semiconductor wafer is disposed on the second rotating platen in a second chamber during the second cleaning stage, and the first chamber is different from the second chamber.

7 . The post CMP cleaning method as claimed in claim 1 , wherein the vibrating device includes at least two transducers, and a controller is configured to control the vibrating device to generate a different frequency using a different transducer.

8 . The post CMP cleaning method as claimed in claim 1 , wherein a length of the long strip-shaped housing of the vibrating device is substantially equal to a radius of the semiconductor wafer.

9 . The post CMP cleaning method as claimed in claim 1 , wherein when viewed in the direction perpendicular to the first rotating platen or the second rotating platen, the semiconductor wafer has a radius which overlaps the solution delivery module, and a direction of a tangent speed corresponding to the radius is the same as the direction of the cleaning fluid.

10 . A post CMP cleaning method, comprising:
rotating a semiconductor wafer by a first rotating platen in a first cleaning stage; providing a cleaning fluid to a surface of the semiconductor wafer; providing the cleaning fluid with a first frequency while rotating the semiconductor wafer, so that particles on the semiconductor wafer are removed by the cleaning fluid; disposing the semiconductor wafer at a second cleaning stage after providing the cleaning fluid with the first frequency; rotating the semiconductor wafer by a second rotating platen in the second cleaning stage while providing the cleaning fluid to the surface of the semiconductor wafer; and providing the cleaning fluid with a second frequency while rotating the semiconductor wafer, so that particles on the semiconductor wafer are removed by the cleaning fluid, wherein the second frequency is greater than the first frequency; wherein a vibrating device is in contact with the cleaning fluid; wherein the cleaning fluid is provided by a solution delivery module; wherein the solution delivery module has a long strip-shaped housing, the vibrating device has a long strip-shaped housing, when viewed in a direction perpendicular to the first rotating platen or the second rotating platen, the housing of the solution delivery module is disposed near the vibrating device so that a fan shaped area on the semiconductor wafer is defined by the housing of the solution delivery module, the housing of the vibrating device and periphery of the semiconductor wafer, the housing of the solution delivery module has a longitudinal axis, and the solution delivery module provides the cleaning fluid in a direction perpendicular to the longitudinal axis toward the fan shaped area; wherein an angle of the fan shape area is less than 90 degrees, the housing of the solution delivery module has a first side extending along the longitudinal axis of the solution delivery module, the housing of the vibrating device has a second side extending along a longitudinal axis of the vibrating device, and the fan shape area is defined by the first side, the second side and the periphery of the semiconductor wafer, wherein the first side is not in contact with the second side, the first side faces the second side, and the first side is not parallel to the second side; wherein when viewed in the direction perpendicular to the first rota

Assignees

• Wu Chen Hao
• Lee Chu An
• Liao Chun Hung
• Lee Shen Nan
• Tsai Teng Chun
• Chao Huang Lin
• Chen Chih Hung
• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Wu Chen-Hao
• Lee Chu-An
• Liao Chun-Hung
• Lee Shen-Nan
• Tsai Teng-Chun
• Chao Huang-Lin
• Chen Chih-Hung

Classifications

• B08B1/34

  rotating about an axis parallel to the surface · CPC title

• H01L21/68714

  Electricity · mapped topic

• H01L21/67092

  Electricity · mapped topic

• H01L21/67051

  Electricity · mapped topic

• H01L21/67046

  Electricity · mapped topic