Post CMP cleaning apparatus and post CMP cleaning methods
US-12538739-B2 · Jan 27, 2026 · US
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Chen Chih Hung patents
Chen Chih Hung holds 1 patent in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 1 |
| Recent patents | 1 |
| First publication | Jan 27, 2026 |
| Latest publication | Jan 27, 2026 |
Filing trend
Year-over-year patent counts for this assignee.
Not enough yearly data to assess filing trend yet.
| Year | Patents |
|---|---|
| 2026 | 1 |
| Year | Patents |
|---|---|
| 2026 | 1 |
Recent patents
Latest publications where this party is an assignee.
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Post CMP cleaning apparatus and post CMP cleaning methods
US-12538739-B2 · Jan 27, 2026 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| B08B1/34 | 1 |
| H01L21/68714 | 1 |
| H01L21/67092 | 1 |
| H01L21/67051 | 1 |
| H01L21/67046 | 1 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Operations & Transport | 1 |
| Electricity | 1 |