Trimmable semiconductor-based capacitor

Patent metadata

Field	Value
Publication number	US-12538503-B2
Application number	US-202217969821-A
Country	US
Kind code	B2
Filing date	Oct 20, 2022
Priority date	Nov 2, 2021
Publication date	Jan 27, 2026
Grant date	Jan 27, 2026

Abstract

A capacitor assembly includes a primary capacitor and a secondary capacitor formed on a substrate. The primary capacitor and the secondary capacitor can be connected by a conduction line. The conduction line can be formed from a thin metal connection. The conduction line can be severed, i.e., trimmed, to finely tune a capacitance value of the capacitor assembly. The capacitor assembly can allow for tighter tolerance and wider variance of the capacitance value of the capacitor assembly. The capacitor assembly can be trimmed after installing the capacitor assembly in the circuit, thereby enabling fine tuning of the capacitance value of the capacitor assembly for applications requiring precision tunable capacitance.

First claim

What is claimed is:

1 . A capacitor assembly comprising:
a substrate comprising a semiconductor material; a primary oxide layer formed on a surface of the substrate; a secondary oxide layer formed on a surface of the substrate; a primary conductive layer formed over at least a portion of the primary oxide layer; a secondary conductive layer formed over at least a portion of the secondary oxide layer; a first terminal connected with the primary conductive layer; and a conduction line formed over the substrate, wherein the conduction line is connected between the primary conductive layer and the secondary conductive layer; wherein the capacitor assembly comprises a capacitance value in a range from a minimum capacitance value to a maximum capacitance value, wherein the conduction line is configured to be severed between the first end and the second end at a trimmed portion, wherein the conduction line maintains connection with the primary conductive layer and the secondary conductive layer when the conduction line is severed at the trimmed portion.

2 . The capacitor assembly of claim 1 , wherein the primary oxide layer is spaced apart from the secondary oxide layer.

3 . The capacitor assembly of claim 1 , wherein the secondary conductive layer comprises a plurality of discrete conductive regions,
wherein each of the plurality of discrete conductive regions are spaced apart from one another.

4 . The capacitor assembly of claim 3 , wherein the conduction line comprises a plurality of discrete conduction lines connecting each of the plurality of discrete conductive regions to the primary conductive layer.

5 . The capacitor assembly of claim 1 , wherein the conduction line is formed from a thin layer of metal.

6 . The capacitor assembly of claim 1 , wherein the conduction line comprises a first end connected to the primary conductive layer and a second end connected to the secondary conductive layer,
further wherein severing the conduction line reduces a capacitance value of the capacitor assembly to less than the maximum capacitance value.

7 . The capacitor assembly of claim 1 , wherein the minimum capacitance value is defined by the primary conductive layer.

8 . The capacitor assembly of claim 1 , wherein the maximum capacitance value is defined by both the primary conductive layer and the secondary conductive layer.

9 . The capacitor assembly of claim 1 , wherein the capacitance value of the capacitor assembly can be adjusted between the minimum capacitance value and the maximum capacitance value in increments of about 0.05 pF.

10 . The capacitor assembly of claim 1 , wherein the primary oxide layer and the secondary oxide layer are coplanar.

11 . The capacitor assembly of claim 10 , wherein the primary conductive layer and the secondary conductive layer are coplanar.

12 . The capacitor assembly of claim 1 , further comprising an insulator layer formed over the primary oxide layer and/or the secondary oxide layer.

13 . The capacitor assembly of claim 12 , wherein the insulator layer is formed between the primary oxide layer and the primary conductive layer and/or between the secondary oxide layer and the secondary conductive layer.

14 . The capacitor assembly of claim 1 , wherein the semiconductor material of the substrate comprises silicon.

15 . The capacitor assembly of claim 1 , wherein the primary oxide layer comprises silicon oxide and the secondary oxide layer comprises silicon oxide.

16 . A method of forming a trimmable capacitor assembly comprising:
forming a primary oxide layer on a surface of a substrate comprising a semiconductor material; forming a secondary oxide layer on a surface of the substrate, wherein the secondary oxide layer is spaced from the primary oxide layer; depositing a primary conductive layer over at least a portion of the primary oxide layer; depositing a secondary conductive layer over at least a portion of the secondary oxide layer; depositing a first terminal on the first conductive layer; and depositing a conduction line over the substrate, wherein the conduction line connects between the primary conductive layer and the secondary conductive layer, wherein the conduction line is configured to maintain connection with each of the primary conductive layer and the secondary conductive layer.

17 . The method of claim 16 , further comprising a step of trimming the conduction line at a point between the primary conductive layer and the secondary conductive layer to sever the connection between the primary conductive layer and the secondary conductive layer.

18 . The method of claim 17 , wherein the step of trimming the conduction line reduces a capacitance value of the capacitor assembly.

19 . The method of claim 17 , further comprising a step of coupling the trimmable capacitor assembly to a substrate form an integrated circuit,
wherein the step of trimming the conduction line is performed after formation of the integrated circuit.

20 . The method of claim 16 , wherein the steps of depositing the primary conductive layer and the secondary conductive layer comprise depositing a conductive material over the primary oxide layer and the secondary oxide layer and etching the conductive material to form the primary conductive layer and the secondary conductive layer,
wherein the primary conductive layer and the secondary conductive layer are spaced apart.

Assignees

• Kyocera Avx Components Corp

Inventors

• Nelson Cory

Classifications

• H01G4/1272

  Semiconductive ceramic capacitors · CPC title

• H01G4/1227

  based on alkaline earth titanates · CPC title

• H10D64/23

  Electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. sources, drains, anodes or cathodes · CPC title

• H10D1/047

  of conductor-insulator-semiconductor capacitors, e.g. trench capacitors · CPC title

• H01G4/10

  Metal-oxide dielectrics {(H01G4/085 takes precedence)} · CPC title