Composition, method of producing substrate, and polymer

Patent metadata

Field	Value
Publication number	US-12529144-B2
Application number	US-202217735151-A
Country	US
Kind code	B2
Filing date	May 3, 2022
Priority date	Nov 12, 2019
Publication date	Jan 20, 2026
Grant date	Jan 20, 2026

Abstract

A composition includes a polymer and a solvent. The polymer includes a group (X) which is at least one selected from the group consisting of: a group including at least two cyano groups; a group including —B(OR)2; a group including —PO(OR)2; and a group including —P(OR)2. Each R independently represents a hydrogen atom or a monovalent hydrocarbon group having 1 to 10 carbon atoms. The polymer preferably includes the group (X) at an end of a main chain thereof or at an end of a side chain thereof.

First claim

What is claimed is:

1 . A method of producing a substrate, the method comprising:
applying a composition directly or indirectly on a base material to form a coating film; and heating the coating film, wherein: the base material comprises a surface layer which comprises:
a first region comprising a metal atom; and
a second region not comprising a metal atom;
the base material comprises a metal atom at least one of in or on at least a part of the surface layer; and the composition comprises:
a polymer comprising a group (X) which is at least one selected from the group consisting of: a group comprising at least two cyano groups; a group comprising —B(OR) 2 ; a group comprising —PO(OR) 2 ; and a group comprising —P(OR) 2 , wherein, each R independently represents a hydrogen atom or a monovalent hydrocarbon group having 1 to 10 carbon atoms; and
a solvent.

2 . The method according to claim 1 , wherein the metal atom constitutes a metal simple substance, an alloy, an electrically conductive nitride, or a silicide.

3 . The method according to claim 1 , wherein the metal atom is an atom of copper, iron, zinc, cobalt, aluminum, titanium, tin, tungsten, zirconium, tantalum, germanium, molybdenum, ruthenium, gold, silver, platinum, palladium, or nickel.

4 . The method according to claim 1 , further comprising after the heating,
bringing a removing liquid into contact with the coating film.

5 . The method according to claim 4 , wherein the removing liquid comprises at least one selected from the group consisting of an acid and a base.

6 . The method according to claim 1 , further comprising applying a rinse agent on the coating film after the heating to remove the coating film formed on the second region, while keeping the coating film formed on the first region remained.

7 . The method according to claim 6 , after the applying of the rinse agent, further comprising depositing a metal oxide selectively on the second region to form a metal oxide pattern.

8 . The method according to claim 6 , after the applying of the rinse agent, bringing a removing liquid into contact with the coating film.

9 . The method according to claim 7 , after the applying of the rinse agent, bringing a removing liquid into contact with the coating film.

Assignees

• Jsr Corp

Inventors

• Komatsu Hiroyuki
• SHIRATANI Motohiro

Classifications

• C08F2810/40

  taking place solely at one end or both ends of the polymer backbone, i.e. not in the side or lateral chains · CPC title

• C08F8/00

  Chemical modification by after-treatment (graft polymers, block polymers, crosslinking with unsaturated monomers or with polymers C08F251/00 - C08F299/00; of conjugated diene rubbers C08C) · CPC title

• C08F8/40

  Introducing phosphorus atoms or phosphorus-containing groups · CPC title

• C23G1/02

  with acid solutions · CPC title

• C23C18/1295

  with after-treatment of the deposited inorganic material · CPC title