Brush polymer terminated with phosphonate for DSA

Patent metadata

Field	Value
Publication number	US-12286503-B2
Application number	US-202118246869-A
Country	US
Kind code	B2
Filing date	Oct 18, 2021
Priority date	Oct 20, 2020
Publication date	Apr 29, 2025
Grant date	Apr 29, 2025

Abstract

The disclosed subject matter relates compounds of structure (I), and polymers of structure (II) having a polydispersity ranging from 1 to about 1.1, compositions comprising said polymers and a spin casting solvent, the process of forming a pinning layer selectively on metal with said composition and the process of using said pinning layers to affect chemoepitaxy directed self-assembly of an overlying block copolymer, and the subsequent process of pattern transfer of this self-assembled layer into a substrate by etching.

First claim

What is claimed is:

1. A polymer of structure (II), wherein
R 1 is H, a C-1 to C-8 linear alkyl, a C-3 to C-8 branched alkyl, a C-3 to C-8 cyclic alkyl, an aryl, or an alkylenearyl;
R 2 is H, a halide, a C-1 to C-8 linear alkyl, a C-3 to C-8 branched alkyl, a C-3 to C-8 cyclic alkyl, a C-1 to C-8 linear alkyloxy, a C-3 to C-8 branched alkyloxy, a C-3 to C-8 cyclic alkyloxy, or —P(═O)(R 3 )(R 4 );
R 3 and R 4 are independently an aryl, an alkylenearyl, a C-2 to C-8 alkyleneoxyalkyl, a C-2 to C-8 haloalkyl, a C-1 to C-8 linear alkyl, a C-3 to C-8 branched alkyl, a C-3 to C-8 cyclic alkyl, a C-1 to C-8 linear alkyloxy, a C-3 to C-8 branched alkyloxy or a C-3 to C-8 cyclic alkyloxy;
L 1 and L 2 are independently a direct valence bond, or a C-1 to C-8 alkylene spacer group;
B is a direct valence bond, or a methylene spacer (—CH 2 —)
A is a styrenic polymer chain, or an acrylic polymer chain; and said polymer has a polydispersity ranging from 1 to 1.1;

2. The polymer of claim 1 , wherein
R 1 is H;
R 2 is H, a C-1 to C-8 linear alkyl, a C-3 to C-8 branched alkyl, a C-3 to C-8 cyclic alkyl, a C-1 to C-8 linear alkyloxy, a C-3 to C-8 branched alkyloxy, a C-3 to C-8 cyclic alkyloxy, or —P(═O)(R 3 )(R 4 );
R 3 and R 4 are independently an aryl, an alkylenearyl, a C-2 to C-8 alkyleneoxyalkyl, a C-2 to C-8 haloalkyl, a C-1 to C-8 linear alkyl, a C-3 to C-8 branched alkyl, a C-3 to C-8 cyclic alkyl, a C-1 to C-8 linear alkyloxy, a C-3 to C-8 branched alkyloxy or a C-3 to C-8 cyclic alkyloxy;
L 1 and L 2 are independently a direct valence bond, or a C-1 to C-8 alkylene spacer group; and
A is a styrenic polymer chain.

3. The polymer of claim 1 , having structure (IIa), wherein
R 2 is H, or —P(═O)(R 3 )(R 4 );
R 3 and R 4 are independently an aryl, an alkylenearyl, a C-2 to C-8 alkyleneoxyalkyl, a C-2 to C-8 haloalkyl, a C-1 to C-8 linear alkyl, a C-3 to C-8 branched alkyl, a C-3 to C-8 cyclic alkyl, a C-1 to C-8 linear alkyloxy, a C-3 to C-8 branched alkyloxy or a C-3 to C-8 cyclic alkyloxy; and
L 1 and L 2 are independently a direct valence bond, or a C-1 to C-8 alkylene spacer group;

4. The polymer of claim 3 which has structure (IIb);

5. The polymer of claim 1 , wherein it has structure (IIc), wherein
R 3 and R 4 are independently an aryl, an alkylenearyl, a C-2 to C-8 alkyleneoxyalkyl, a C-2 to C-8 haloalkyl, a C-1 to C-8 linear alkyl, a C-3 to C-8 branched alkyl, a C-3 to C-8 cyclic alkyl, a C-1 to C-8 linear alkyloxy, a C-3 to C-8 branched alkyloxy or a C-3 to C-8 cyclic alkyloxy; and
L 1 is a direct valence bond, or a C-1 to C-8 alkylene spacer group;

6. The polymer of claim 5 , has structure (IId);

7. The polymer of claim 1 , wherein
R 1 is a C-1 to C-8 linear alkyl, a C-3 to C-8 branched alkyl or a C-3 to C-8 cyclic alkyl, an aryl, an alkylenearyl;
R 2 is H, a C-1 to C-8 linear alkyl, a C-3 to C-8 branched alkyl, a C-3 to C-8 cyclic alkyl, a C-1 to C-8 linear alkyloxy, a C-3 to C-8 branched alkyloxy, a C-3 to C-8 cyclic alkyloxy, or —P(═O)(R 3 )(R 4 );
R 3 and R 4 are independently an aryl, an alkylenearyl, a C-2 to C-8 alkyleneoxyalkyl, a C-2 to C-8 haloalkyl, a C-1 to C-8 linear alkyl, a C-3 to C-8 branched alkyl, a C-3 to C-8 cyclic alkyl, a C-1 to C-8 linear alkyloxy, a C-3 to C-8 branched alkyloxy or a C-3 to C-8 cyclic alkyloxy;
L 1 and L 2 are independently a direct valence bond, or a C-1 to C-8 alkylene spacer group; and
A is an acrylic polymer chain.

8. The polymer of claim 7 , wherein it has structure (IIf), wherein
R alk is a C-1 to C-7 linearly alkyl, a C-3 to C-7 branched alkyl, or a C-3 to C-7 cyclic alkyl;
R 2 is H, or —P(═O)(R 3 )(R 4 );
R 3 and R 4 are independently an aryl, an alkylenearyl, a C-2 to C-8 alkyleneoxyalkyl, a C-2 to C-8 haloalkyl, a C-1 to C-8 linear alkyl, a C-3 to C-8 branched alkyl, a C-3 to C-8 cyclic alkyl, a C-1 to C-8 linear alkyloxy, a C-3 to C-8 branched alkyloxy or a C-3 to C-8 cyclic alkyloxy; and
L 1 and L 2 are independently a direct valence bond, or a C-1 to C-8 alkylene spacer group;

9. The polymer of claim 8 , which has structure (IIg);

10. The polymer of claim 7 , wherein it has structure (IIh), wherein
R 3 and R 4 are independently an aryl, an alkylenearyl, a C-2 to C-8 alkyleneoxyalkyl, a C-2 to C-8 haloalkyl, a C-1 to C-8 linear alkyl, a C-3 to C-8 branched alkyl, a C-3 to C-8 cyclic alkyl, a C-1 to C-8 linear alkyloxy, a C-3 to C-8 branched alkyloxy or a C-3 to C-8 cyclic alkyloxy; and
L 1 is a direct valence bond, or a C-1 to C-8 alkylene spacer group;

11. The polymer of claim 10 , wherein L 1 and L 2 are both a direct valence bond and the polymer of structure (II) has structure (IIi);

12. The polymer of claim 2 , wherein said polymer is a styrenic polymer having structure (III), wherein
R e1 is H, a C-1 to C-8 linear alkyl, a C-3 to C-8 branched alkyl, a C-3 to C-8 cyclic alkyl, an aryl, or an alkylenearyl;
R 2 is H, a halide, a C-1 to C-8 linear alkyl, a C-3 to C-8 branched alkyl, a C-3 to C-8 cyclic alkyl, a C-1 to C-8 linear alkyloxy, a C-3 to C-8 branched alkyloxy, a C-3 to C-8 cyclic alkyloxy, or —P(═O)(R 3 )(R 4 );
R 3 and R 4 are independently an aryl, an alkylenearyl, a C-2 to C-8 alkyleneoxyalkyl, a C-2 to C-8 haloalkyl, a C-1 to C-8 linear alkyl, a C-3 to C-8 branched alkyl, a C-3 to C-8 cyclic alkyl, a C-1 to C-8 linear alkyloxy, a C-3 to C-8 branched alkyloxy or a C-3 to C-8 cyclic alkyloxy;
L 1 and L 2 are independently a direct valence bond, or a C-1 to C-8 alkylene spacer group;
R 5 is H, a C-1 to C-4 linear alkyl; R 6 is H, a halide, a C-1 to C-8 linear alkyl, a C-3 to C-8 branched alkyl, a C-3 to C-8 cyclic alkyl, a C-1 to C-8 linear alkyloxy, a C-3 to C-8 branched alkyloxy or a C-3 to C-8 cyclic alkyloxy; n is the number of repeat units; and
said styrenic polymer has a polydispersity ranging from 1 to 1.1;

13. The polymer of claim 12 , wherein it has structure (IIIa), wherein
R 2 is H, or —P(═O)(R 3 )(R 4 );
R 3 and R 4 are independently an aryl, an alkylenearyl, a C-2 to C-8 alkyleneoxyalkyl, a C-2 to C-8 haloalkyl, a C-1 to C-8 linear alkyl, a C-3 to C-8 branched alkyl, a C-3 to C-8 cyclic alkyl, a C-1 to C-8 linear alkyloxy, a C-3 to C-8 branched alkyloxy or a C-3 to C-8 cyclic alkyloxy; and
L 1 and L 2 are independently a direct valence bond, or a C-1 to C-8 alkylene spacer group;

14. The polymer of claim 13 , which has structure (IIb);

Assignees

• Merck Patent Gmbh

Inventors

• Jeong Eunjeong
• Baskaran Durairaj
• Kim Jihoon

Classifications

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10P76/20

  of masks comprising organic materials · CPC title

• C09J143/02

  Homopolymers or copolymers of monomers containing phosphorus · CPC title

• C08J2343/02

  Homopolymers or copolymers of monomers containing phosphorus · CPC title

• C08F8/40

  Introducing phosphorus atoms or phosphorus-containing groups · CPC title