Ingot puller apparatus including automated clamp

Patent metadata

Field	Value
Publication number	US-12516440-B2
Application number	US-202318313730-A
Country	US
Kind code	B2
Filing date	May 8, 2023
Priority date	May 8, 2023
Publication date	Jan 6, 2026
Grant date	Jan 6, 2026

Abstract

An ingot puller apparatus includes a housing defining a growth chamber and a growth chamber outlet, an isolation valve having a first valve end connected to the growth chamber outlet and a second valve end, an ingot receiving vessel defining an ingot receiving chamber and a receiving chamber inlet at a receiving vessel end, a clamp including a clamp base connected to the second valve end, and a controller. The clamp includes a clamping mechanism to releasably connect the receiving vessel end to the clamp base and an actuator to cause movement of the clamping mechanism between a clamping position in which the clamping mechanism connects the receiving vessel end to the clamp base, and a releasing position in which the receiving vessel end is releasable from the clamp base. The controller is connected to the actuator to control movement of the clamping mechanism between the clamping and releasing positions.

First claim

What is claimed is:

1 . An ingot puller apparatus for producing a single crystal semiconductor ingot, the ingot puller apparatus comprising:
a housing defining a growth chamber and a growth chamber outlet; an isolation valve having a first valve end connected to the growth chamber outlet and an opposite second valve end; an ingot receiving vessel defining an ingot receiving chamber and a receiving chamber inlet at a receiving vessel end; a clamp including a clamp base connected to the second valve end, a clamping mechanism to releasably connect the receiving vessel end to the clamp base, and at least one actuator controllable to cause movement of the clamping mechanism between a clamping position in which the clamping mechanism connects the receiving vessel end to the clamp base, and a releasing position in which the receiving vessel end is releasable from the clamp base; and a controller connected to the at least one actuator to control the at least one actuator to cause movement of the clamping mechanism between the clamping and releasing positions; wherein the clamping mechanism comprises at least one clamping finger pivotably connected to the clamp base and a support ring moveable relative to the clamp base between a first position in which the clamping mechanism is in the releasing position, and a second position in which the clamping mechanism is in the clamping position, the at least one actuator controllable to cause movement of the support ring between the first and second positions, wherein the support ring urges the at least one clamping finger to pivot into engagement with the receiving vessel end when the support ring moves from the first position to the second position.

2 . The ingot puller apparatus of claim 1 , wherein the at least one clamping finger comprises two or more clamping fingers pivotably connected to the clamp base.

3 . The ingot puller apparatus of claim 1 , wherein the at least one clamping finger comprises six clamping fingers pivotably connected to the clamp base.

4 . The ingot puller apparatus of claim 1 , wherein the clamp comprises at least one biasing element that urges the at least one clamping finger to pivot out of engagement with the receiving vessel end when the support ring moves from the second position to the first position.

5 . The ingot puller apparatus of claim 1 , wherein the clamp comprises a retaining pin for selectively maintaining the support ring in the second position.

6 . The ingot puller apparatus of claim 5 , wherein the retaining pin is operably connected to a motor that causes translational movement of the retaining pin to selectively maintain the support ring in the second position, the motor connected to the controller.

7 . The ingot puller apparatus of claim 1 , wherein the at least one actuator comprises a pneumatic cylinder.

8 . An ingot puller apparatus for producing a single crystal semiconductor ingot, the ingot puller apparatus comprising:
a housing defining a growth chamber and a growth chamber outlet; an isolation valve having a first valve end connected to the growth chamber outlet and an opposite second valve end; an ingot receiving vessel defining an ingot receiving chamber and a receiving chamber inlet at a receiving vessel end; and a clamp including a clamp base connected to the second valve end, at least one clamping finger to releasably connect the receiving vessel end to the clamp base, the at least one clamping finger pivotably connected to the clamp base, and a support ring moveable relative to the clamp base between a first position and a second position, wherein the support ring urges the at least one clamping finger to pivot into engagement with the receiving vessel end when the support ring moves from the first position to the second position to connect the receiving vessel end to the clamp base.

9 . The ingot puller apparatus of claim 8 , wherein the clamp comprises at least one biasing element that urges the at least one clamping finger to pivot out of engagement with the receiving vessel end when the support ring moves from the second position to the first position.

10 . The ingot puller apparatus of claim 8 , wherein the clamp comprises at least one actuator controllable to cause movement of the support ring between the first position and the second position.

11 . The ingot puller apparatus of claim 10 , wherein the at least one actuator comprises a pneumatic cylinder.

12 . The ingot puller apparatus of claim 8 , wherein the clamp comprises at least one bar extending outward from the support ring to enable an operator to manually move the support ring between the first position and the second position.

13 . The ingot puller apparatus of claim 8 , wherein the clamp comprises a clamp cover opposite the clamp base, the clamp cover defining an opening sized to receive the receiving vessel end, and guide rails extending between the clamp base and the clamp cover, wherein the support ring is moveable along the guide rails between the first position, in which the support ring is adjacent the clamp base, and the second position, in which the support ring is adjacent the clamp cover.

14 . The ingot puller apparatus of claim 8 , wherein the clamp base has a surface on which the receiving vessel end is seated when connected to the clamp base and an o-ring that creates a seal between the surface of the clamp base and the receiving vessel end.

15 . The ingot puller apparatus of claim 8 , wherein the clamp comprises a retaining pin for selectively maintaining the support ring in the second position.

16 . The ingot puller apparatus of claim 15 , wherein the retaining pin is operably connected to a motor that causes translational movement of the retaining pin to selectively maintain the support ring in the second position.

17 . The ingot puller apparatus of claim 15 , wherein the retaining pin is operably connected to a manual gear drive to enable an operator to manually cause translational movement of the retaining pin to selectively maintain the support ring in the second position.

18 . A releasable clamp for releasably connecting an ingot receiving vessel of an ingot puller apparatus to an isolation valve, the releasable clamp comprising:
a clamp base connectable with an end of the isolation valve; a clamp cover opposite the clamp base, the clamp cover defining an opening sized for receiving an end of the ingot receiving vessel; clamping fingers pivotably connected to the clamp base; a support ring moveable relative to the clamp base between a first position and a second position, wherein the support ring urges the clamping fingers to pivot into an engaging position adapted for connecting the end of the ingot receiving vessel to the clamp base when the support ring moves from the first position to the second position; and at least one actuator controllable to move the support ring between the first and second positions.

19 . The releasable clamp of claim 18 , wherein the releasable clamp includes biasing elements for each clamping finger, each biasing element urges the respective clamping finger to pivot out of the engaging position when the support ring moves from the second position to the first position.

Assignees

• Globalwafers Co Ltd

Inventors

• Wu Yu-Chiao
• Lai Ming-Hsien

Classifications

• C30B35/005

  Transport systems · CPC title

• C30B15/20

  Controlling or regulating (controlling or regulating in general G05) · CPC title

• F16L37/1205

  using hooks hinged about an axis placed behind a flange and which act behind the other flange · CPC title

• F16L23/036

  characterised by the tensioning members, e.g. specially adapted bolts or C-clamps · CPC title

• C30B35/00

  Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure · CPC title