Seed crystal holder for pulling up single crystal and method of manufacturing silicon single crystal using the same

Patent metadata

Field	Value
Publication number	US-10822717-B2
Application number	US-201916502383-A
Country	US
Kind code	B2
Filing date	Jul 3, 2019
Priority date	Apr 9, 2015
Publication date	Nov 3, 2020
Grant date	Nov 3, 2020

Abstract

A seed crystal holder for pulling up a single crystal is made of a carbon fiber-reinforced carbon composite material, and has a substantially cylindrical shape with a hollow space having a shape matching an outer shape of a substantially rod-shaped seed crystal. A direction of carbon fibers at a part in contact with at least an outer peripheral surface of the seed crystal has isotropy as viewed from a central axis of the hollow space.

First claim

What is claimed is:

1. A seed crystal holder for pulling up a single crystal that is made of a carbon fiber-reinforced carbon composite material and that has a substantially cylindrical shape with a hollow space having a shape matching an outer shape of a substantially rod-shaped seed crystal, including:
a core part in which a direction of the carbon fibers has isotropy as viewed from a center axis of the hollow space; and
a clad part in which the direction of the carbon fibers has anisotropy as viewed from the center axis of the hollow space,
wherein the core part contacts at least a portion of the outer peripheral surface of the seed crystal,
wherein the clad part is provided in a cylindrical upper section, a cylindrical intermediate section positioned below the cylindrical upper section, and a cylindrical lower section, and
wherein the core part is provided in an inner peripheral side region of the cylindrical intermediate section and the cylindrical lower section.

2. The seed crystal holder as claimed in claim 1 , wherein the direction of the carbon fibers at the part contacting the outer peripheral surface of the seed crystal has a circumferential direction.

3. The seed crystal holder as claimed in claim 2 , wherein the direction of the carbon fibers at the part contacting the outer peripheral surface of the seed crystal further is parallel to the center axis.

4. The seed crystal holder as claimed in claim 3 , wherein the seed crystal has a tapered section having a gradually reduced diameter, wherein the hollow space has an inner peripheral surface brought into surface contact with the tapered section, and wherein the direction of the carbon fibers at a part constituting the inner peripheral surface has isotropy as viewed from the center axis of the hollow space.

5. The seed crystal holder as claimed in claim 3 , wherein the direction of the carbon fibers constituting the entire seed crystal holder has isotropy as viewed from the center axis of the hollow space.

6. The seed crystal holder as claimed in claim 4 , wherein the direction of the carbon fibers constituting the entire seed crystal holder has isotropy as viewed from the center axis of the hollow space.

7. The seed crystal holder as claimed in claim 2 , wherein the seed crystal has a tapered section having a gradually reduced diameter, wherein the hollow space has an inner peripheral surface brought into surface contact with the tapered section, and wherein the direction of the carbon fibers at a part constituting the inner peripheral surface has isotropy as viewed from the center axis of the hollow space.

8. The seed crystal holder as claimed in claim 7 , wherein the direction of the carbon fibers constituting the entire seed crystal holder has isotropy as viewed from the center axis of the hollow space.

9. The seed crystal holder as claimed in claim 2 , wherein the direction of the carbon fibers constituting the entire seed crystal holder has isotropy as viewed from the center axis of the hollow space.

10. The seed crystal holder as claimed in claim 1 , wherein the seed crystal has a tapered section having a gradually reduced diameter, wherein the hollow space has an inner peripheral surface brought into surface contact with the tapered section, and wherein the direction of the carbon fibers at a part constituting the inner peripheral surface has isotropy as viewed from the center axis of the hollow space.

11. The seed crystal holder as claimed in claim 10 , wherein the direction of the carbon fibers constituting the entire seed crystal holder has isotropy as viewed from the center axis of the hollow space.

12. The seed crystal holder as claimed in claim 1 , wherein the direction of the carbon fibers constituting the entire seed crystal holder has isotropy as viewed from the center axis of the hollow space.

13. The seed crystal holder as claimed in claim 1 , wherein the core part is only provided in an inner peripheral side region of the cylindrical intermediate section and cylindrical lower section.

14. The seed crystal holder as claimed in claim 1 , wherein the core part is mainly provided in an inner peripheral side region of the cylindrical intermediate section.

15. The seed crystal holder as claimed in claim 1 , wherein the core part is only provided in an inner peripheral side region of the cylindrical intermediate section.

Assignees

• Sumco Corp

Inventors

• Kawasaki Eiichi

Classifications

• C04B2235/5268

  Orientation of the fibers · CPC title

• C30B15/32 Primary

  Seed holders, e.g. chucks · CPC title

• B32B18/00

  Layered products essentially comprising ceramics, e.g. refractory products · CPC title

• C04B2237/385

  Carbon or carbon composite · CPC title

• C04B2237/84

  Joining of a first substrate with a second substrate at least partially inside the first substrate, where the bonding area is at the inside of the first substrate, e.g. one tube inside another tube · CPC title