Apparatus for treating substrate and method for treating substrate

Patent metadata

Field	Value
Publication number	US-12489000-B2
Application number	US-202117565331-A
Country	US
Kind code	B2
Filing date	Dec 29, 2021
Priority date	Dec 31, 2020
Publication date	Dec 2, 2025
Grant date	Dec 2, 2025

Abstract

Provided is an apparatus for treating a substrate. In the exemplary embodiment, the apparatus for treating the substrate includes a support member configured to support a substrate and provided rotatably; a treating liquid nozzle configured to supply selectively a high-temperature first treating liquid and a high-temperature second treating liquid onto the substrate; and a controller configured to control the treating liquid nozzle so that the treating liquid nozzle first supplies the first treating liquid onto the substrate and then supplies the second treating liquid onto the substrate.

First claim

What is claimed is:

1 . An apparatus for treating a substrate comprising:
a spin chuck configured to support a substrate and provided rotatably; a treating liquid nozzle configured to supply selectively a heated temperature first treating liquid and a heated temperature second treating liquid onto the substrate; and a controller configured to control the treating liquid nozzle so that the treating liquid nozzle first supplies the first treating liquid onto the substrate and then supplies the second treating liquid onto the substrate, a first treating liquid tank configured to store the first treating liquid; a second treating liquid tank configured to store the second treating liquid; a first liquid supply pipe configured to transfer the first treating liquid stored in the first treating liquid tank to the treating liquid nozzle by connecting the first treating liquid tank and the treating liquid nozzle; and a second liquid supply pipe configured to transfer the second treating liquid stored in the second treating liquid tank to the treating liquid nozzle by connecting the second treating liquid tank and the treating liquid nozzle, wherein the first liquid supply pipe and the second liquid supply pipe are provided so that one region or more are in contact with each other.

2 . The apparatus for treating the substrate of claim 1 ,
wherein the substrate is provided in a state where a silicon nitride layer and a silicon oxide layer are formed.

3 . The apparatus for treating the substrate of claim 1 ,
wherein the first treating liquid is provided as a mixed liquid of phosphoric acid and silicon.

4 . The apparatus for treating the substrate of claim 1 ,
wherein the second treating liquid is provided as pure phosphoric acid.

5 . The apparatus for treating the substrate of claim 1 ,
wherein the first liquid supply pipe and the second liquid supply pipe are provided so as to be in contact with the treating liquid nozzle at one point.

6 . The apparatus for treating the substrate of claim 1 ,
wherein the first liquid supply pipe comprises a first upstream pipe disposed upstream and connected with the first treating liquid tank and a first downstream pipe disposed downstream and connected with the treating liquid nozzle, based on flow of the first treating liquid supplied to the treating liquid nozzle from the first treating liquid tank, and wherein the second liquid supply pipe comprises a second upstream pipe disposed upstream and connected with the second treating liquid tank and a second downstream pipe disposed downstream and connected with the treating liquid nozzle, based on flow of the second treating liquid supplied to the treating liquid nozzle from the second treating liquid tank, wherein the first downstream pipe and the second downstream pipe are provided to be in contact with each other.

7 . The apparatus for treating the substrate of claim 6 ,
wherein the first upstream pipe is provided with a first heater and a valve, and wherein the second upstream pipe is provided with a second heater and a valve.

8 . The apparatus for treating the substrate of claim 7 ,
wherein the first heater heats the first treating liquid at a first temperature, and wherein the second heater heats the second treating liquid at a second temperature.

9 . The apparatus for treating the substrate of claim 7 ,
wherein the first heater heats the first treating liquid at 160° C. or higher, and wherein the second heater heats the second treating liquid at 160° C. or higher.

10 . The apparatus for treating the substrate of claim 6 ,
wherein the treating liquid nozzle comprises a first nozzle portion and a second nozzle portion, wherein the first nozzle portion is connected with the first liquid supply pipe, and wherein the second nozzle portion is connected with the second liquid supply pipe.

11 . The apparatus for treating the substrate of claim 1 , further comprising:
a DIW nozzle configured to supply deionized water onto the substrate.

12 . The apparatus for treating the substrate of claim 11 ,
wherein the controller controls a pre-wet process of supplying the deionized water onto the substrate for a predetermined time while the substrate is rotated; and an etching process of supplying sequentially the first treating liquid and the second treating liquid onto the substrate while the substrate is rotated to be performed after the pre-wet process.

13 . The apparatus for treating the substrate of claim 12 ,
wherein the controller controls a rinse process of supplying the deionized water onto the substrate to be performed after the etching process.

14 . An apparatus for treating a substrate comprising:
a spin chuck configured to support a substrate and provided rotatably; a treating liquid nozzle configured to supply selectively a heated temperature first treating liquid and a heated temperature second treating liquid onto the substrate; a first treating liquid tank configured to store a mixed liquid of phosphoric acid and silicon as the first treating liquid; a second treating liquid tank configured to store pure phosphoric acid as the second treating liquid; a first liquid supply pipe configured to transfer the first treating liquid stored in the first treating liquid tank to the treating liquid nozzle by connecting the first treating liquid tank and the treating liquid nozzle; and a second liquid supply pipe configured to transfer the second treating liquid stored in the second treating liquid tank to the treating liquid nozzle by connecting the second treating liquid tank and the treating liquid nozzle, wherein the first liquid supply pipe comprises: a first upstream pipe disposed upstream, connected with the first treating liquid tank, and provided with a first heater and a valve, and a first downstream pipe disposed downstream and connected with the treating liquid nozzle, based on flow of the first treating liquid supplied to the treating liquid nozzle from the first treating liquid tank, wherein the second liquid supply pipe comprises a second upstream pipe disposed upstream, connected with the second treating liquid tank, and provided with a second heater and a valve and a second downstream pipe disposed downstream and connected with the treating liquid nozzle, based on the flow of the second treating liquid supplied to the treating liquid nozzle from the second treating liquid tank, wherein the first downstream pipe and the second downstream pipe are provided to be in contact with each other, comprising: a controller configured to control the treating liquid nozzle so that the treating liquid nozzle first supplies the first treating liquid onto the substrate and then supplies the second treating liquid onto the substrate, wherein the substrate is provided in a state where a silicon nitride layer and a silicon oxide layer are formed.

Assignees

• Semes Co Ltd

Inventors

• Kang Min Ok
• Lee Young Il
• Chang Kyu Hwan

Classifications

• H10P72/0414 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/0424 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/7626

  characterised by the construction of the shaft · CPC title

• H10P72/0602

  Temperature monitoring · CPC title