Rocking type seed crystal surface corrosion, cleaning and drying device and process method

Patent metadata

Field	Value
Publication number	US-12486598-B2
Application number	US-202217880597-A
Country	US
Kind code	B2
Filing date	Aug 3, 2022
Priority date	Jul 30, 2020
Publication date	Dec 2, 2025
Grant date	Dec 2, 2025

Abstract

A rocking type seed crystal surface corrosion, cleaning and drying device and a process method belong to the technical field of semiconductor crystal growth, comprising a corrosion tank and a matched corrosion tank cover, a seed crystal support platform arranged at a middle position of the bottom of the corrosion tank, and a high-purity hot nitrogen introduction short straight pipe, an corrosive liquid introduction short straight pipe, a deionized water introduction short straight pipe and an overflow liquid discharge short straight pipe matched with and arranged at both sides of the corrosion tank, wherein free ends of the high-purity hot nitrogen introduction short straight pipe, the corrosive liquid introduction short straight pipe and the deionized water introduction short straight pipe are all provided with switch stop valves; the device further comprises a rocking mechanism provided at the bottom of the corrosion tank; and the seed crystal support platform comprises a support frame symmetrically distributed on both sides of the vertical central axis of the corrosion tank and positioned at the bottom of the corrosion tank, a seed crystal support wheel mounted on an upper end of the support frame via a rotating shaft, and a matched seed crystal support wheel limiting mechanism. Adequate corrosion can be performed on the entire seed crystal surface, and the cleaning and drying processes of the seed crystal in the subsequent process can be combined organically to avoid secondary contamination of the seed crystal in the subsequent process.

First claim

The invention claimed is:

1 . A rocking type seed crystal surface corrosion, cleaning and drying device, comprising a corrosion tank ( 1 ) and a matched corrosion tank cover ( 2 ), a seed crystal support platform arranged at a middle position of the bottom of the corrosion tank ( 1 ), and a high-purity hot nitrogen introduction straight pipe ( 1 - 1 ), an corrosive liquid introduction straight pipe ( 1 - 2 ), a deionized water introduction straight pipe ( 1 - 3 ) and an overflow liquid discharge straight pipe ( 1 - 4 ) matched with and arranged at both sides of the corrosion tank ( 1 ), wherein free ends of the high-purity hot nitrogen introduction straight pipe ( 1 - 1 ), the corrosive liquid introduction straight pipe ( 1 - 2 ) and the deionized water introduction straight pipe ( 1 - 3 ) are all provided with switch stop valves, characterized in that the device further comprises a rocking mechanism provided at the bottom of the corrosion tank ( 1 ); and the seed crystal support platform comprises a support frame ( 3 - 1 ) symmetrically distributed on both sides of a vertical central axis of the corrosion tank ( 1 ) and positioned at the bottom of the corrosion tank ( 1 ), a seed crystal support wheel ( 3 - 2 ) mounted on an upper end of the support frame ( 3 - 1 ) via a rotating shaft, and a matched seed crystal support wheel limiting mechanism.

2 . The rocking type seed crystal surface corrosion, cleaning and drying device according to claim 1 , characterized in that an annular groove ( 3 - 2 - 1 ) is provided on the seed crystal support wheel ( 3 - 2 ), and the cross section of the annular groove ( 3 - 2 - 1 ) is in the shape of an isosceles trapezoid.

3 . The rocking type seed crystal surface corrosion, cleaning and drying device according to claim 1 , characterized in that the seed crystal support wheel limiting mechanism comprises a limiting rod ( 3 - 3 ) arranged at one side of the seed crystal support wheel ( 3 - 2 ) and a limiting plate ( 3 - 4 ) symmetrically arranged at both sides of the support frame ( 3 - 1 );
and a limiting angle of the seed crystal support wheel limiting mechanism is formed by rotating leftward and rightward for 45 - 60 ° based on a vertical axis of the support frame ( 3 - 1 ).

4 . The rocking type seed crystal surface corrosion, cleaning and drying device according to claim 1 , characterized in that the rocking mechanism comprises a base ( 4 - 1 ), a rocking rotating shaft ( 4 - 3 ) provided on the base ( 4 - 1 ) via a support rod ( 4 - 2 ), a rocking platform ( 4 - 4 ) hinged on the rocking rotating shaft ( 4 - 3 ), and a matched rocking driving mechanism; wherein an upper end face of the rocking platform ( 4 - 4 ) is connected to a bottom face of the corrosion tank ( 1 ).

5 . The rocking type seed crystal surface corrosion, cleaning and drying device according to claim 4 , characterized in that the rocking driving mechanism comprises a rocking motor provided on the base ( 4 - 1 ), a rocking runner ( 4 - 5 ) provided at an output end of the rocking motor, and a rocking rod ( 4 - 6 ) hinged to a lower end face of the rocking runner ( 4 - 5 ) and the rocking platform ( 4 - 4 ).

6 . The rocking type seed crystal surface corrosion, cleaning and drying device according to claim 4 , characterized in that the rocking mechanism further comprises a surrounding plate ( 4 - 7 ) arranged around the base ( 4 - 1 ), and a telescopic protective curtain ( 4 - 8 ) connected to an upper end face of the surrounding plate ( 4 - 7 ) and a lower end face of the rocking platform ( 4 - 4 ), wherein the material of the telescopic protective curtain ( 4 - 8 ) is silica gel or fluorelastomer.

7 . The rocking type seed crystal surface corrosion, cleaning and drying device according to claim 1 , characterized in that the high-purity hot nitrogen gas introduction straight pipe ( 1 - 1 ) and the deionized water introduction straight pipe ( 1 - 3 ) are distributed in an up-and-down position and are mounted on one side of the corrosion tank ( 1 ); the overflow liquid discharge straight pipe ( 1 - 4 ) and the corrosive liquid introduction straight pipe ( 1 - 2 ) are distributed in an up-and-down position and are mounted on the other side of the corrosion tank ( 1 ); the high-purity hot nitrogen gas introduction straight pipe ( 1 - 1 ) is tilted upwards, and has an included angle of 30-40° with a wall of the corrosion tank ( 1 ); the deionized water introduction straight pipe ( 1 - 3 ) and the corrosive liquid introduction straight pipe ( 1 - 2 ) are tilted upwards, and has an included angle of 50-60° with the wall of the corrosion tank ( 1 ); and the overflow liquid discharge straight pipe ( 1 - 4 ) is tilted downwards, and has an included angle of 50-60° with the wall of the corrosion tank ( 1 ).

8 . The rocking type seed crystal surface corrosion, cleaning and drying device according to claim 1 , characterized in that a drain pipe and a matched switch stop valve are provided at the bottom of the corrosion tank ( 1 ), and an inner wall of the corrosion tank ( 1 ) is provided with a level scale of the inflow corrosive liquid.

9 . The rocking type seed crystal surface corrosion, cleaning and drying device according to claim 1 , characterized in that an anti-collision buffer pad ( 3 - 5 ) is mounted inside the corrosion tank ( 1 ) on both sides and at the same horizontal position as the seed crystal support wheel ( 3 - 2 ).

Assignees

• The 13Th Research Institute Of China Electronics Tech Group Corporation

Inventors

• Jiang Jian
• Sun Niefeng
• Sun Tongnian
• Wang Shujie
• Shao Huimin
• Fu Lijie
• Shi Yanlei
• Li Xiaolan

Classifications

• C30B35/00 Primary

  Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure · CPC title

• C30B33/10

  in solutions or melts · CPC title

• C30B29/40 Primary

  AIIIBV compounds {wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi} · CPC title

• Y02P70/50

  Manufacturing or production processes characterised by the final manufactured product · CPC title

• C30B35/007 Primary

  Apparatus for preparing, pre-treating the source material to be used for crystal growth · CPC title