Designs and fabrication of nanogap sensors

Patent metadata

Field	Value
Publication number	US-12480936-B2
Application number	US-202318309518-A
Country	US
Kind code	B2
Filing date	Apr 28, 2023
Priority date	Oct 13, 2017
Publication date	Nov 25, 2025
Grant date	Nov 25, 2025

Abstract

Embodiments of the disclosure provide various nanogap sensor designs (e.g., horizontal nanogap sensors, vertical nanogap sensors, arrays of multiple nanogap sensors, various arrangements for making electrical connections to the electrodes of nanogap sensors, etc.), as well as various methods which may be used to fabricate at least some of the proposed sensors. The nanogap sensors proposed herein may operate as molecular sensors to help identify chemical species through electrical measurements using at least a pair of electrodes separated by a nanogap.

First claim

The invention claimed is:

1 . A method for fabricating a nanogap sensor, the method comprising:
forming a first opening in a non-conductive layer provided over a substrate; depositing a spacer layer within the first opening; forming a second opening in the non-conductive layer by removing at least a portion of the non-conductive layer adjacent to at least a portion of the spacer layer; forming a first electrode by depositing a first electrode material within the first opening having the spacer layer deposited therein; forming a second electrode by depositing a second electrode material within the second opening; and removing the portion of the spacer layer to form a nanogap between the first electrode and the second electrode.

2 . The method according to claim 1 , wherein the spacer layer is deposited within the first opening in the non-conductive layer using a conformal deposition process.

3 . The method according to claim 1 , wherein the first opening is a rectangular or a hexagonal opening.

4 . The method according to claim 1 , wherein a width of the nanogap is between 1 and 100 nm.

5 . The method according to claim 1 , wherein the first electrode material and the second electrode material have a same material composition.

6 . The method according to claim 5 , wherein the first electrode material is deposited simultaneously with the second electrode material.

7 . The method according to claim 1 , wherein the first electrode material is different from the second electrode material.

8 . The method according to claim 1 , wherein the nanogap is oriented at an angle between 85 degrees and 95 degrees with respect to the substrate.

9 . The method according to claim 1 , wherein the first opening has a re-entrant profile.

10 . The method according to claim 9 , wherein the depositing the first electrode material within the first opening leaves a first volume within the first opening without the first electrode material deposited therein, the first volume being in a region of the first opening where a sidewall of the first opening meets a bottom of the first opening.

11 . The method according to claim 1 , wherein the first opening has a non-re-entrant profile.

12 . The method according to claim 10 , wherein the depositing the second electrode material within the second opening leaves a second volume within the second opening without the second electrode material deposited therein, the second volume being in a region of the non-conductive layer where a sidewall of the first opening meets a bottom of the first opening.

13 . The method according to claim 1 , further comprising providing a first layer overlaying at least a portion of the first electrode that is opposite at least a portion of the second electrode, the first layer comprising a material to receive one or more molecules of an analyte.

14 . The method according to claim 13 , wherein the first layer includes one or more of thiols, dithiols, or alkanethiols.

15 . The method according to claim 13 , further comprising providing a second layer over at least a second portion of the second electrode that is opposite at least a second portion of the first electrode, the second layer comprising a second material to receive one or more molecules of an analyte.

16 . The method according to claim 15 , wherein the second layer includes one or more of thiols, dithiols, or alkanethiols.

17 . A method for fabricating a nanogap sensor, the method comprising:
forming a first opening in a non-conductive layer provided over a substrate; depositing a sacrificial material within the first opening; forming a second opening in the sacrificial material by removing a first portion of the sacrificial material; depositing a spacer layer within the second opening; forming a first electrode by depositing a first electrode material within the second opening having the spacer layer deposited therein; forming a third opening by removing a remaining portion of the sacrificial material adjacent to the spacer layer; forming a second electrode by depositing a second electrode material within the third opening; and forming a nanogap between the first electrode and the second electrode by removing a portion of the spacer layer.

18 . The method according to claim 17 , wherein a mean surface roughness of at least a portion of the first electrode opposite the second electrode is less than 10 nm.

19 . The method according to claim 17 , wherein the second electrode is formed after the first electrode is formed.

20 . The method according to claim 17 , further comprising providing a first layer over at least a portion of the first electrode that is opposite at least a portion of the second electrode, the first layer comprising a material to receive one or more molecules of an analyte.

21 . The method according to claim 20 , wherein the first layer includes one or more of thiols, dithiols, or alkanethiols.

22 . The method according to claim 20 , further comprising providing a second layer over at least a portion of the second electrode that is opposite at least a portion of the first electrode, the second layer comprising a material to receive molecules of an analyte.

23 . The method according to claim 22 , wherein the first layer includes one or more of thiols, dithiols, or alkanethiols.

24 . A method for fabricating a nanogap sensor, the method comprising:
forming a first opening in a non-conductive layer provided over a substrate; forming a first electrode by depositing a first electrode material within the first opening; forming a second opening in the first electrode material, the second opening extending through the first electrode and exposing a surface of the substrate; depositing a spacer layer within the second opening, the spacer layer lining the second opening; forming a second electrode by depositing a second electrode material within the second opening having the spacer layer lining the second opening; and forming a nanogap between the first electrode and the second electrode by removing a portion of the spacer layer.

25 . The method according to claim 24 , wherein the spacer layer is deposited within the second opening using a conformal deposition process.

26 . The method according to claim 24 , wherein the second opening is a rectangular or a hexagonal opening.

27 . The method according to claim 24 , wherein a width of the nanogap is between 1 and 100 nm.

28 . The method according to claim 24 , further comprising providing a first layer over at least a portion of the first electrode that is opposite at least a portion of the second electrode, the first layer comprising a material to receive one or more molecules of an analyte.

29 . The method according to claim 28 , wherein the first layer includes one or more of thiols, dithiols, or alkanethiols.

30 . The method according to claim 28 , further comprising providing a second layer over at least a portion of the second electrode that is opposite at least a portion of the first electrode, the second layer comprising a material to receive one or more molecules of an analyte.

31 . The method according to claim 30 , wherein the second layer includes one or more of thiols, dithiols, or alkanethiols.

Assignees

• Analog Devices International Unlimited Co

Inventors

• Antoine Christophe
• Jain Himanshu
• Canty Matthew Thomas
• Mcloughlin Christina B
• Lucey Daniel Joseph
• Mcdermott Sinead Maire
• O'Brien Stephen
• Stenson Bernard
• Geary Shane
• Lane William Allan
• Coln Michael
• Alea Mark Daniel De Leon

Classifications

• B81B1/00

  Devices without movable or flexible elements, e.g. microcapillary devices · CPC title

• G01N33/487

  of liquid biological material · CPC title

• G01N27/327

  Biochemical electrodes {, e.g. electrical or mechanical details for in vitro measurements} · CPC title

• G01N27/3278

  involving nanosized elements, e.g. nanogaps or nanoparticles (nanopores G01N33/48721; magnetic beads G01N27/745) · CPC title

• G01N33/48721 Primary

  Investigating individual macromolecules, e.g. by translocation through nanopores (Coulter counters in general G01N15/12; fabrication methods for nanoscale apertures B81B1/00; sequencing of nucleic acids C12Q1/68) · CPC title