Method for separating a plurality of slices from workpieces by means of a wire saw during a sequence of separation processes

Patent metadata

Field	Value
Publication number	US-12479129-B2
Application number	US-202118009346-A
Country	US
Kind code	B2
Filing date	May 27, 2021
Priority date	Jun 10, 2020
Publication date	Nov 25, 2025
Grant date	Nov 25, 2025

Abstract

A method cuts slices from workpieces using a wire saw with a wire array tensioned in a plane between two wire guide rollers supported between fixed and floating bearings. A workpiece is fed through the wire array perpendicular to a workpiece axis and the wire array plane. The workpiece is fed through the wire array while controlling a temperature of the workpiece with a cooling medium, with simultaneous axial movement of the floating bearings by adjusting a temperature of the fixed bearings in dependence on a depth of cut and in correlation with a first correction profile, and while simultaneously moving the workpiece along the workpiece axis in accordance with a specification of a second correction profile, which specifies a travel of the workpiece. The first correction profile and the second correction profile being opposed to a shape deviation.

First claim

The invention claimed is:

1 . A method for cutting a multiplicity of slices, using a wire saw, from workpieces during a sequence of cut-off operations divided into initial cuts and follow-on cuts, the wire saw comprising a wire array of moving wire sections of a saw wire and an actuator, the wire array being tensioned in a plane between two wire guide rollers, each of the two wire guide rollers being supported between a fixed bearing and a floating bearing, the method comprising:
during each of the cut-off operations, feeding a respective workpiece, of the workpieces, using the actuator, through the wire array along a feed direction perpendicular to a workpiece axis and perpendicular to the plane of the wire array in a presence of a working fluid and hard materials, which act abrasively on the workpiece, the feeding of the workpiece through the wire array further comprising:
during each of the cut-off operations, feeding the workpiece through the wire array while controlling a temperature of the workpiece by wetting the workpiece with a cooling medium;
during each of the cut-off operations, feeding the workpiece through the wire array with simultaneous axial movement of the floating bearings by adjusting a temperature of the fixed bearings with a cooling fluid in accordance with a specification of a first temperature profile, which specifies a temperature of the cooling fluid in dependence on a depth of cut and correlates with a first correction profile, which specifies a travel of the floating bearings in dependence on the depth of cut; and
feeding the workpiece through the wire array while simultaneously moving the workpiece along the workpiece axis in accordance with a specification of a second correction profile, which specifies a travel of the workpiece, the first correction profile and the second correction profile being opposed to a shape deviation; and
determining the shape deviation during each of the cut-off operations and/or before each of the cut-off operations.

2 . The method as claimed in claim 1 , wherein the shape deviation is measured during each of the cut-off operations by comparing a position of a line through a center of at least one kerf with a position of a reference trajectory.

3 . The method of claim 2 , wherein determining the shape deviation comprises observing a kerf by irradiating the kerf with optical radiation, infrared radiation, X-rays, or γ-rays, performing mechanical scanning of the kerf, or taking capacitive or inductive measurements of the kerf.

4 . The method as claimed in claim 1 , wherein the shape deviation is determined by comparing an average shape profile of already cut-off slices with a reference shape profile before each of the cut-off operations.

5 . The method as claimed in claim 4 , wherein the average shape profile is determined by averaging shape profiles of selected slices, wherein the selection made is slice-based, cut-based, or slice-based and cut-based.

6 . The method as claimed in claim 4 , wherein the already cut-off slices come from at least 1 to 5 cut-off operations which have immediately preceded the respective cut-off operation.

7 . The method as claimed in claim 1 , wherein the temperature of the workpiece is controlled by a closed control loop, wherein the temperature of the workpiece forms a controlled variable and the temperature of the cooling medium forms a manipulated variable of the control loop.

8 . The method as claimed in claim 1 , wherein the temperature of the workpiece is controlled according to a second temperature profile, which specifies a temperature of the cooling medium in dependence on the depth of cut and correlates with a third correction profile, wherein the third correction profile is opposed to the shape deviation.

9 . The method as claimed in claim 1 , wherein a maintenance measure is initiated instead of the respective cut-off operation based upon the shape deviation being determined before the respective cut-off operation reaches or exceeds a defined threshold.

10 . The method as claimed in claim 1 , wherein each of the cut-off operations comprises lap slicing or grind slicing.

11 . The method of claim 1 , wherein the actuator is a piezoelectric actuator.

Assignees

• Siltronic Ag

Inventors

• Beyer Axel
• Berger Patrick
• Frintert Carl
• Guenther Matthias
• Wiesner Peter

Classifications

• B28D7/04

  for supporting or holding work {or conveying or discharging work (B28D1/047, B28D5/0041, B28D5/0052 take precedence)} · CPC title

• B28D5/045

  by cutting with wires or closed-loop blades (B28D5/042 takes precedence) · CPC title

• B28D5/0076

  for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work · CPC title

• B28D5/0064

  Devices for the automatic drive or the program control of the machines · CPC title

• B23D57/0053

  of drives for saw wires; of wheel mountings; of wheels · CPC title