Vertical memory devices

Patent metadata

Field	Value
Publication number	US-12453102-B2
Application number	US-202217742525-A
Country	US
Kind code	B2
Filing date	May 12, 2022
Priority date	Jun 12, 2019
Publication date	Oct 21, 2025
Grant date	Oct 21, 2025

Abstract

The present disclosure relates to semiconductor structures and, more particularly, to a vertical memory devices and methods of manufacture. The structure includes: a first bit cell with a first top electrode; a second bit cell with a second top electrode; and a common bottom electrode for both the first bit cell and the second bit cell.

First claim

What is claimed:

1. A method comprises:
forming a bottom electrode on a bottom metallization feature;
forming an etch stop layer contacting a lower portion of sidewalls of the bottom electrode;
forming switching material about sidewalls and an upper surface of the bottom electrode and on top of the etch stop layer;
forming top electrode material on the switching material;
patterning the switching material and the top electrode material to form a first top electrode comprising the top electrode material and a second top electrode of a two bit cell with the bottom electrode common to both the first top electrode and the second top electrode, wherein the patterning of the switching material removes the switching material from the upper surface of the bottom electrode and over portions of the etch stop layer such that the switching material is sandwiched between the sidewalls of the bottom electrode and the first electrode and sandwiched between the sidewalls of the bottom electrode and the second electrode;
forming an additional etch stop layer lining sidewalls of the first top electrode and the second top electrode, and contacting a portion of the switching material such that the first electrode and the second electrode are sandwiched between the additional etch stop layer and the switching material;
forming a first contact partially extending over and contacting a top surface of the first top electrode, and further contacting a top surface of the additional etch stop layer; and
forming a second contact partially extending over and contacting a top surface of the second top electrode, and further contacting the top surface of the additional etch stop layer.

2. The method of claim 1 , wherein:
the additional etch stop layer is formed in contact with the first top electrode and the second top electrode, on a surface opposing to the switching material; and
the etch stop layer is formed under the additional etch stop layer and above the lower metallization feature, which is under the bottom electrode.

3. The method of claim 1 , wherein the first top electrode and the second top electrode share the bottom electrode in a 2-bit cell configuration.

4. The method of claim 1 , wherein the first top electrode and the bottom electrode are a first bit cell and the second top electrode and the bottom electrode are a second bit cell, wherein the first top electrode, the bottom electrode and the second top electrode are formed in direct contact with the switching material therebetween.

5. The method of claim 4 , wherein the switching material is a high-k dielectric material.

6. The method of claim 1 , wherein the first top electrode and the second top electrode are formed of a same material.

7. The method of claim 6 , wherein the bottom electrode is formed of a different material than the first top electrode and the second top electrode.

8. The method of claim 1 , wherein the first top electrode is formed on a first side of the bottom electrode and the second top electrode is formed on a second side of the bottom electrode, and the switching material is formed as an intervening material between and directly contacting the bottom electrode and the first and second top electrodes.

9. The method of claim 8 , wherein the etch stop layer separates plural bottom electrodes.

Assignees

• Globalfoundries Us Inc

Inventors

• Singh Sunil Kumar
• Tran Xuan Anh
• Ramanathan Eswar
• Kalaga Suryanarayana
• Child Craig M
• Fox Robert

Classifications

• H10N70/8836

  Complex metal oxides, e.g. perovskites, spinels · CPC title

• H10N70/8833

  Binary metal oxides, e.g. TaOx · CPC title

• H10N70/8418

  adapted for focusing electric field or current, e.g. tip-shaped · CPC title

• H10N70/883

  Oxides or nitrides · CPC title

• H10N70/826

  adapted for essentially vertical current flow, e.g. sandwich or pillar type devices · CPC title