Wafer boat temporary storage device and semiconductor processing device

Patent metadata

Field	Value
Publication number	US-12451376-B2
Application number	US-202218715376-A
Country	US
Kind code	B2
Filing date	Nov 24, 2022
Priority date	Dec 3, 2021
Publication date	Oct 21, 2025
Grant date	Oct 21, 2025

Abstract

A wafer boat temporary storage device for temporarily storing a wafer boat in a semiconductor processing device includes two carrying platforms arranged oppositely and configured to carry two ends of the wafer boat in a length direction of the wafer boat, respectively. The wafer boat includes two positioning parts arranged at two ends in the length direction and spaced apart in a width direction of the wafer boat. Each carrying platform includes a first positioning structure and a second positioning structure. The first positioning structure is configured to make rolling contact with two sides of the two positioning parts at one end of the wafer boat that face toward or away from the two positioning parts at the other end of the wafer boat in the length direction to perform alignment between the wafer boat and the wafer boat temporary storage device in the length direction.

First claim

What is claimed is:

1. A wafer boat temporary storage device for temporarily storing a wafer boat in a semiconductor processing device, comprising:
two carrying platforms arranged oppositely and configured to carry two ends of the wafer boat in a length direction of the wafer boat, respectively;
wherein:
the wafer boat includes two positioning parts arranged at two ends in the length direction and spaced apart in a width direction of the wafer boat;
each carrying platform includes a first positioning structure and a second positioning structure;
the first positioning structure is configured to make rolling contact with two sides of the two positioning parts at one end of the wafer boat that face toward or away from the two positioning parts at the other end of the wafer boat in the length direction to perform alignment between the wafer boat and the wafer boat temporary storage device in the length direction; and
the second positioning structure is configured to make rolling contact with two sides of the two positioning parts at one end of the wafer boat that face toward or away from each other in the length direction to perform alignment between the wafer boat and the wafer boat temporary storage device in the width direction;

wherein:
the wafer boat temporary storage device further includes a liquid cooling part, an air cooling part, and a filter part;
the liquid cooling part is used to cool ambient air;
the air cooling part is arranged closer to the carrying platforms than the liquid cooling part, and is used to blow the ambient air cooled by the liquid cooling part to the wafer boat carried on the carrying platforms;
the filter part is disposed between the liquid cooling part and the air cooling part to filter the ambient air blown by the air cooling part to the wafer boat carried on the carrying platforms;
the air cooling part includes a fan and a first support frame;
the fan is disposed above the first support frame for blowing the ambient air cooled by the liquid cooling part toward the wafer boat carried on the carrying platforms;
the first support frame includes an accommodation slot under the first support frame for accommodating the filter part;
the first support frame includes ventilation vents connected to the fan and the accommodation slot respectively; and
the accommodation slot is configured for retrieving the filter part.

2. The wafer boat temporary storage device according to claim 1 , wherein:
in a direction in which the two carrying platforms face toward each other, a distance between the two first positioning structures is smaller than a distance between two second positioning structures;
the first positioning structure is configured to make rolling contact with two sides of the two positioning parts at one end of the wafer boat that face toward the two positioning parts at the other end of the wafer boat in the length direction; and
the second positioning structure is configured to make rolling contact with two sides of the two positioning parts at one end of the wafer boat that face toward each other in the length direction.

3. The wafer boat temporary storage device according to claim 1 , wherein:
the first positioning structure includes two first rollers arranged apart in a direction perpendicular to the direction in which the two carrying platforms face toward each other; and
the two first rollers are rotatably connected to the carrying platform around the direction perpendicular to the direction in which the two carrying platforms face toward each other to make respective rolling contact with the two sides of the two positioning parts at one end of the wafer boat that face toward or away from the two positioning parts at the other end of the wafer boat in the length direction.

4. The wafer boat temporary storage device according to claim 3 , wherein:
the first positioning structure further includes two first connection parts and two first rotation shafts;
the two first connection parts are connected to the carrying platforms and are arranged apart in the direction perpendicular to the direction in which the two carrying platforms face toward each other;
the two first rotation shafts are arranged to penetrate the two first connection parts, and an axial direction of each first rotation shaft is perpendicular to the direction in which the two carrying platforms face toward each other; and
the two first rollers are rotatably around axes of the two first rotation shafts and sleeved on the two first rotation shafts respectively.

5. The wafer boat temporary storage device according to claim 1 , wherein:
the second positioning structure includes two second rollers arranged apart in the direction perpendicular to the direction in which the two carrying platforms face toward each other; and
the two second rollers are rotatably connected to the carrying platform around the direction parallel to the direction in which the two carrying platforms face toward each other to make respective rolling contact with the two sides of the two positioning parts at one end of the wafer boat that face toward or away from each other in the length direction.

6. The wafer boat temporary storage device according to claim 5 , wherein:
the second positioning structure further includes two second connection parts and two second rotation shafts;
the two second connection parts are connected to the carrying platforms and are arranged apart in the direction perpendicular to the direction in which the two carrying platforms face toward each other;
the two second rotation shafts are arranged to penetrate the two second connection parts, and an axial direction of each second rotation shaft is parallel to the direction in which the two carrying platforms face toward each other; and
the two second rollers are rotatably around axes of the two second rotation shafts and sleeved on the two second rotation shafts respectively.

7. The wafer boat temporary storage device according to claim 6 , wherein:
each carrying platform includes a first threaded connection hole;
each second connection part includes a long connection hole;
a long axis of the long connection hole is perpendicular to the direction in which the two carrying platforms face toward each other;
the second positioning structure further includes a first threaded connection part;
the first threaded connection part passes through the connection long hole and is threadedly connected to the first threaded connection hole; and
the first threaded connection part adjusts its relative position with the corresponding carrying platform in the direction perpendicular to the direction in which the two carrying platforms face toward each other by adjusting its relative position with the long connection hole in the long axis direction.

8. The wafer boat temporary storage device according to claim 1 , further comprising:
two first support columns;
two first support plates; and
two second support plates;
wherein:
axes of the two first support columns are parallel with each other;
the two first support plates are respectively connected to the two first support columns;
axes of the two first support plates that are perpendicular to surfaces of the two first support plates are perpendicular to the axes of the two first support columns respectively;
the two second support plates are respectively connected to the two first support plates;
axes of the two second support plates that are perpendicular to surfaces of the two second support plates are perpendicular to the axes of the two first support plates that are perpendicular to the surfaces of the two first support plates respectively, and are perpendicular to axes of the first support columns respectively; and
the two

Assignees

• Beijing Naura Microelectronics Equipment Co Ltd

Inventors

• Li Jinlong
• Li Jianguo

Classifications

• H10P72/10

  using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/50

  for positioning, orientation or alignment · CPC title

• H10P72/0434 Primary

  mainly by convection · CPC title

• H10P72/3404 Primary

  Storage means · CPC title