Mask assembly and method for manufacturing of the same

Patent metadata

Field	Value
Publication number	US-12448677-B2
Application number	US-202318192468-A
Country	US
Kind code	B2
Filing date	Mar 29, 2023
Priority date	Feb 7, 2020
Publication date	Oct 21, 2025
Grant date	Oct 21, 2025

Abstract

A mask assembly and method for manufacturing of the same are provided. A mask assembly includes: a mask frame including a first mask opening and a second mask opening which are located side by side in a first direction and defined by a support bar; a first split mask overlapping the first mask opening; and a second split mask overlapping the second mask opening, and the first split mask and the second split mask are spaced apart from each other in a region overlapping the support bar.

First claim

What is claimed is:

1. A mask assembly comprising:
a mask frame comprising a first mask opening and a second mask opening which are located side by side in a second direction and defined by a support bar extending in a first direction, the second direction intersecting the first direction;
a first split mask overlapping the first mask opening; and
a second split mask overlapping the second mask opening,
wherein the first split mask comprises a first half-etched portion at an end of first and second ends of the first split mask, the first half-etched portion comprising a groove at a lower side of the first split mask that is above and directly facing the support bar and extending-from an edge of the first split mask toward a center thereof, and the second split mask comprises a second half-etched portion at an end of first and second ends of the second split mask, the second half-etched portion comprising a groove at a lower side of the first split mask that is above and directly facing the support bar and extending from an edge of the second split mask toward a center thereof, and wherein the first half-etched portion and the second half-etched portion are located side by side in the second direction.

2. The mask assembly of claim 1 , wherein the mask frame comprises a first side extending in the first direction, a second side in parallel with the first side and spaced apart from the first side,
wherein the support bar is between the first side and the second side,
wherein the first end of the first split mask overlaps the first side and the second end of the first split mask overlaps the support bar, and
wherein the first end of the second split mask overlaps the support bar and the second end of the second split mask overlaps the second side.

3. The mask assembly of claim 2 , wherein the first split mask comprises first fixing portions overlapping the first side and the support bar, respectively, the second split mask comprises second fixing portions overlapping the second side and the support bar, respectively,
wherein the first split mask comprises a first welding portion on the first fixing portion overlapping the first side, and a second welding portion on the first fixing portion overlapping the support bar, and
wherein the second split mask comprises a third welding portion on the second fixing portion overlapping the support bar, and a fourth welding portion on the second fixing portion overlapping the second side.

4. The mask assembly of claim 3 , wherein the first half-etched portion of the first split mask overlaps the support bar and the first fixing portion overlapping the support bar, and
wherein the second half-etched portion of the second split mask overlaps the support bar and the second fixing portion overlapping the support bar.

5. The mask assembly of claim 4 , wherein the first half-etched portion of the first split mask overlaps the second welding portion, and the second half-etched portion of the second split mask overlaps the third welding portion.

6. The mask assembly of claim 3 , wherein another first half-etched portion of the first split mask overlaps the first side and the first fixing portion overlapping the first side, and another second half-etched portion of the second split mask overlaps the second side and the second fixing portion overlapping the second side.

7. The mask assembly of claim 6 , wherein the first half-etched portion of the first split mask overlaps the first welding portion, and the second half-etched portion of the second split mask overlaps the fourth welding portion.

8. The mask assembly of claim 1 , wherein a thickness of the first half-etched portion is 30% to 70% of a thickness of the first split mask, and a thickness of the second half-etched portion is 30% to 70% of a thickness of the second split mask.

9. The mask assembly of claim 1 , wherein the first half-etched portion is continuous or spaced apart from a side of the first split mask facing the second split mask, and the second half-etched portion is continuous or spaced apart from a side of the second split mask facing the first split mask.

10. A method of manufacturing the mask assembly of claim 1 , the method comprising:
preparing the mask frame comprising the first mask opening and the second mask opening which are located side by side in the second direction and defined by the support bar;
aligning a split mask so as to overlap the first mask opening and the second mask opening and coupling the split mask to the mask frame; and
cutting a region of the split mask corresponding to the support bar to divide the split mask into the first split mask and the second split mask.

11. The method of claim 10 , wherein the mask frame comprises:
a first side extending in the first direction; and
a second side in parallel with the first side and spaced apart from the first side,
wherein the support bar is between the first side and the second side.

12. The method of claim 11 , wherein the coupling the split mask to the mask frame comprises:
performing first welding on a first end of the split mask overlapping the first side;
performing second welding on a first region of the split mask overlapping the support bar;
performing third welding on a second region of the split mask overlapping the support bar; and
performing fourth welding on a second end of the split mask overlapping the second side.

13. The method of claim 12 , wherein the dividing the split mask into the first split mask and the second split mask comprises:
cutting between a second welding portion formed by the second welding and a third welding portion formed by the third welding in the split mask.

14. A method of manufacturing the mask assembly of claim 1 , the method comprising:
preparing the mask frame comprising the first mask opening and the second mask opening which are located side by side in the second direction and defined by the support bar;
aligning the first split mask so as to overlap the first mask opening and the second mask opening and coupling two regions of the first split mask adjacent to the first mask opening to the mask frame;
cutting a region of the first split mask corresponding to the support bar;
aligning the second split mask so as to overlap the first split mask and the second mask opening, and coupling two regions of the second split mask adjacent to the second mask opening to the mask frame; and
cutting a region of the second split mask corresponding to the support bar.

15. The method of claim 14 , wherein the mask frame comprises:
a first side extending in the first direction; and
a second side in parallel with the first side and spaced apart from the first side,
wherein the support bar is between the first side and the second side.

16. The method of claim 15 , wherein the coupling the first split mask to the mask frame comprises:
performing first welding on an end of the first split mask overlapping the first side; and
performing second welding on a region of the first split mask overlapping the support bar.

17. The method of claim 16 , wherein the cutting the first split mask comprises cutting between the second mask opening and a second welding portion of the first split mask formed by the second welding.

18. The method of claim 17 , wherein the coupling the second split mask to the mask frame comprises:
performing third welding on a region of the second split mask overlapping the support bar; and
performing fourth welding on an end of the second split mask overlapping the second side.

1

Assignees

• Samsung Display Co Ltd

Inventors

• Kim Se Il
• Yi Sang Min
• Kim Eui Gyu
• Baek Dae Won

Classifications

• H10K71/00 Primary

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title

• H10K71/164

  using vacuum deposition · CPC title

• H10K71/166

  using selective deposition, e.g. using a mask · CPC title

• C23C14/24

  Vacuum evaporation · CPC title

• G03F7/12

  Production of screen printing forms or similar printing forms, e.g. stencils · CPC title