Mask and fabrication method thereof

Patent metadata

Field	Value
Publication number	US-2018239241-A1
Application number	US-201715548832-A
Country	US
Kind code	A1
Filing date	Feb 22, 2017
Priority date	Jul 22, 2016
Publication date	Aug 23, 2018
Grant date	—

Abstract

A mask and a fabrication method thereof are provided. The mask includes: a frame, which includes a hollow portion and a border surrounding the hollow portion; an opening plate, which is provided on the frame and includes an opening and a body surrounding the opening, the opening corresponding to the hollow portion, and the body being connected with the border; and a pattern plate, which is provided on the opening plate and includes a pattern portion and a non-pattern portion positioned in a periphery of the pattern portion, the pattern portion corresponding to the opening, the non-pattern portion being connected with the body of the opening plate, and the non-pattern portion and the frame being separated from each other at a position of the border.

First claim

1 . A mask, comprising:
a frame, which includes a hollow portion and a border surrounding the hollow portion; an opening plate, which is provided on the frame and includes an opening and a body surrounding the opening, the opening corresponding to the hollow portion, and the body being connected with the border; and a pattern plate, which is provided on the opening plate and includes a pattern portion and a non-pattern portion positioned in a periphery of the pattern portion, the pattern portion corresponding to the opening, the non-pattern portion being connected with the body of the opening plate, and the non-pattern portion and the frame being separated from each other at a position of the border.

2 . The mask according to claim 1 , wherein a surface of the frame, which faces the pattern plate, is flat at a position where the surface overlaps the pattern plate.

3 . The mask according to claim 1 , wherein a portion of the pattern plate, which overlaps the border, is positioned in a region where the body of the opening plate is positioned.

4 . The mask according to claim 1 , wherein the opening plate includes a plurality of opening strips, the opening is provided in each opening strip, each opening strip extends along a first direction, the plurality of opening strips are sequentially arranged along a second direction, and the second direction intersects with the first direction.

5 . The mask according to claim 4 , wherein each opening strip includes a first thinned portion and a second thinned portion which are respectively positioned on two opposite sides of the opening strip, the first thinned portion and the second thinned portion are arranged along the second direction, the first thinned portion and the second thinned portion extend along the first direction, and adjacent thinned portions of adjacent opening strips overlap each other.

6 . The mask according to claim 5 , wherein a sum of thicknesses of the overlapped thinned portions is equal to a thickness of the opening strip.

7 . The mask according to claim 4 , wherein a width of each opening strip is 50 to 130 mm.

8 . The mask according to claim 4 , wherein the pattern plate includes a plurality of pattern strips, each pattern strip includes the pattern portion, each pattern strip extends along the first direction, and the plurality of pattern strips are sequentially arranged along the second direction.

9 . The mask according to claim 8 , wherein a width of each pattern strip is smaller than or equal to the width of the opening strip corresponding to the pattern strip.

10 . The mask according to claim 1 , wherein the pattern plate includes a plurality of pattern strips, each pattern strip extends along the first direction, the plurality of pattern strips are sequentially arranged along the second direction, and the second direction intersects with the first direction.

11 . The mask according to claim 1 , wherein a material for forming at least one of the opening plate and the pattern plate is an Invar alloy.

12 . The mask according to claim 1 , wherein an orthogonal projection of the pattern portion of the pattern plate on the opening plate is positioned in the opening.

13 . A fabrication method of a mask, comprising:
providing an opening plate on a frame, wherein the frame includes a hollow portion and a border surrounding the hollow portion, the opening plate includes an opening and a body surrounding the opening, the opening corresponds to the hollow portion, and the body is connected with the border; and providing a pattern plate on the opening plate, wherein the pattern plate includes a pattern portion and a non-pattern portion positioned in a periphery of the pattern portion, the pattern portion corresponds to the opening, the non-pattern portion is connected with the body of the opening plate, and the non-pattern portion and the frame are separated from each other at a position of the border.

14 . The fabrication method according to claim 13 , wherein the opening and the body of the opening plate are formed by carrying out a patterning process on a metal layer.

15 . The mask according to claim 1 , wherein on entirety of a surface of the frame, which faces the pattern plate, is flat.

16 . The mask according to claim 1 , wherein the pattern portion of the pattern plate comprises an opening region.

17 . The mask according to claim 1 , wherein the pattern portion of the pattern plate comprises a plurality of shield regions and a plurality of non-shield regions, and the shield regions and the non-shield regions are provided alternatively.

18 . The mask according to claim 10 , wherein the body of the opening plate is of an integral structure.

Assignees

• Boe Technology Group Co Ltd
• Ordos Yuansheng Optoelectronics Co Ltd

Inventors

• Lv Shouhua
• Li Baojun

Classifications

• C23C14/12

  Organic material · CPC title

• G03F7/12

  Production of screen printing forms or similar printing forms, e.g. stencils · CPC title

• G03F1/50

  Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof · CPC title

• B05C21/005

  Masking devices (stencils B05C17/06; masking devices for which the means for applying liquids or other fluent material is spraying or is not important B05B12/20) · CPC title

• C23C14/042 Primary

  using masks · CPC title