Mask frame assembly for thin film deposition

Patent metadata

Field	Value
Publication number	US-9346078-B2
Application number	US-201313966242-A
Country	US
Kind code	B2
Filing date	Aug 13, 2013
Priority date	Nov 30, 2012
Publication date	May 24, 2016
Grant date	May 24, 2016

Abstract

A mask frame assembly for thin film deposition includes a mask frame having an opening, and a mask configured to be coupled to the mask frame and including a first surface for facing a deposition substrate, a second surface opposite the first surface, and a deformation prevention part having varying thicknesses.

First claim

What is claimed is:

1. A mask frame assembly for thin film deposition, the mask frame assembly comprising:
a mask frame having an opening; and
a mask coupled to the mask frame and comprising:
a first surface for facing a deposition substrate;
a second surface opposite the first surface; and
a deformation prevention part comprising a plurality of first parts having a first thickness, and a plurality of second parts having a second thickness that is less than the first thickness,
wherein the first and second parts are alternately arranged in a first direction of the mask, and are alternately arranged in a second direction of the mask that is perpendicular to the first direction.

2. The mask frame assembly of claim 1 , wherein the mask further comprises:
deposition regions, each of which comprising deposition patterns, spaced from each other along the first direction of the mask;
ribs between adjacent ones of the deposition regions; and
borders at edges of the deposition regions along the second direction of the mask,
wherein the deformation prevention part is at the borders.

3. The mask frame assembly of claim 2 , wherein the mask is stretched in the first direction, and
wherein two end portions of the mask are welded to the mask frame.

4. The mask frame assembly of claim 2 , wherein the mask comprises a plurality of split masks,
wherein the first direction is a length direction of the split masks, and
wherein the second direction is a width direction of the split masks.

5. The mask frame assembly of claim 4 , wherein a width of the mask is less than a length of the mask, and
wherein the mask is stretched in a length direction of the mask.

6. The mask frame assembly of claim 2 , wherein the deformation prevention part extends at the borders along the first direction of the mask.

7. The mask frame assembly of claim 6 , wherein the deformation prevention part comprises a plurality of deformation prevention regions.

8. The mask frame assembly of claim 7 , wherein each of the borders comprises a plurality of lines arranged in the second direction of the mask and extending in the first direction, and
wherein corresponding ones of the deformation prevention regions are located in each line along the first direction.

9. The mask frame assembly of claim 7 , wherein a width of the deformation prevention regions in the second direction is less than a width of the deposition regions in the first direction and is less than a width of the ribs in the first direction.

10. The mask frame assembly of claim 7 , wherein a size of each of the deformation prevention regions in the first direction corresponds to one of the first or second parts.

11. The mask frame assembly of claim 6 , wherein the first parts are not etched in a thickness direction of the mask, and
wherein the second parts are etched in the thickness direction of the mask.

12. The mask frame assembly of claim 11 , wherein the second parts comprise regions of the mask that are etched from the second surface, and wherein the second thickness is less than thicknesses of other parts of the mask.

13. The mask frame assembly of claim 2 , wherein each of the ribs is between adjacent deposition regions, and comprises a first region that is etched and a second region that is not etched.

14. The mask frame assembly of claim 13 , wherein the second region of the ribs has at least one dummy pattern.

15. The mask frame assembly of claim 14 , wherein the dummy pattern comprises a dot-shaped slit pattern or a strip-shaped slit pattern.

16. The mask frame assembly of claim 13 , wherein a width of the ribs in the first direction is less than the width of the deposition regions in the first direction.

17. The mask frame assembly of claim 2 , wherein the mask further comprises, at an outside of the deposition region along the first direction:
a half region;
a stick region; and
a dummy deposition region having dummy deposition patterns.

18. The mask frame assembly of claim 17 , wherein the stick region is not etched in a thickness direction of the mask, and is welded to the mask frame.

19. The mask frame assembly of claim 2 , further comprising a first half region, a first stick region, a second half region, a dummy deposition region, and a second stick region sequentially arranged from an outside of the deposition region to an end of the mask.

20. The mask frame assembly of claim 2 , wherein the deposition patterns comprise dot-shaped slit patterns or strip-shaped slit patterns.

21. The mask frame assembly of claim 1 , wherein the mask frame comprises a plurality of first frames facing each other along a first direction, and a plurality of second frames facing each other along a second direction, and
wherein the plurality of first frames are coupled to the plurality of second frames to define the opening.

22. The mask frame assembly of claim 21 , wherein the mask comprises a plurality of split masks extending in a direction perpendicular to the plurality of first frames, each having two end portions fixed to the mask frame, and arranged in a direction perpendicular to the plurality of second frames.

23. The mask frame assembly of claim 1 , wherein the mask comprises at least one split mask extending in a first direction to cross the opening of the mask frame.

Assignees

• Samsung Display Co Ltd

Inventors

• Oh Yoon-Chan
• Lee Choon-Ho

Classifications

• B05C21/005 Primary

  Masking devices (stencils B05C17/06; masking devices for which the means for applying liquids or other fluent material is spraying or is not important B05B12/20) · CPC title

• H01L51/0011

  Electricity · mapped topic

• C23C14/042 Primary

  using masks · CPC title

• G03F1/64 Primary

  characterised by the frames, e.g. structure or material, including bonding means therefor · CPC title

• H05B33/10 Primary

  Apparatus or processes specially adapted to the manufacture of electroluminescent light sources · CPC title