Electron beam application device

Patent metadata

Field	Value
Publication number	US-12437958-B2
Application number	US-202018028771-A
Country	US
Kind code	B2
Filing date	Nov 10, 2020
Priority date	Nov 10, 2020
Publication date	Oct 7, 2025
Grant date	Oct 7, 2025

Abstract

An activation mechanism is provided in an activation region of an electron gun, and includes a light source device 3 configured to irradiate a photocathode with excitation light, a heat generating element, an oxygen generation unit configured to generate oxygen by heating the heat generating element, and an emission current meter configured to monitor an emission current generated by electron emission when the photocathode 1 is irradiated with the excitation light from the light source device. In a surface activation process, the photocathode is irradiated with the excitation light from the light source device, an emission current amount of the photocathode is monitored by the emission current meter, the heat generating element is heated to generate oxygen by the oxygen generation unit, and the heating of the heat generating element is stopped when the emission current amount of the photocathode satisfies a predetermined stop criterion.

First claim

The invention claimed is:

1. An electron beam application device comprising:
an electron gun having an electron probe radiation region and an activation region, and including a photocathode configured to be transferred between the electron probe radiation region and the activation region;
an electron optical system column into which an electron beam emitted by irradiating the photocathode disposed in the electron probe radiation region with excitation light is introduced;
an activation mechanism disposed in the activation region;
a control device configured to control the activation mechanism; and
a computer configured to control the control device and execute a surface activation process on the photocathode by the activation mechanism, wherein
the activation mechanism includes
a light source device configured to irradiate the photocathode disposed in the activation region with the excitation light,
an alkali metal source configured to be deposited on a surface of the photocathode in the surface activation process,
a first power source configured to energize the alkali metal source to generate alkali metal vapor,
a heat generating element,
an oxygen generation unit configured to generate oxygen by heating the heat generating element, and
an emission current meter configured to monitor an emission current generated by electron emission when the photocathode is irradiated with the excitation light from the light source device, and

in the surface activation process, the computer performs control such that the photocathode is irradiated with the excitation light from the light source device, an emission current amount of the photocathode is monitored by the emission current meter, the heat generating element is heated to generate oxygen by the oxygen generation unit, and the heating of the heat generating element is stopped when the emission current amount of the photocathode satisfies a predetermined stop criterion.

2. The electron beam application device according to claim 1 , wherein
the computer stops the heating of the heat generating element when the emission current amount of the photocathode is equal to or more than a predetermined value or when a change rate of the emission current amount of the photocathode is equal to or less than a predetermined value.

3. The electron beam application device according to claim 1 , wherein
the activation mechanism includes a second power source configured to supply power for causing the heat generating element to generate heat, and
the control device causes the heat generating element to generate heat by supplying the power from the second power source to the heat generating element.

4. The electron beam application device according to claim 3 , wherein
the power supplied from the second power source to the heat generating element has a waveform a rise of which is made blunted.

5. The electron beam application device according to claim 4 , wherein
the power supplied from the second power source to the heat generating element is constant power or has a constant voltage, or has a waveform gradually decreasing compared with an initial stage.

6. The electron beam application device according to claim 3 , wherein
the control device repeatedly supplies pulse power from the second power source to the heat generating element.

7. The electron beam application device according to claim 3 , wherein
a valve is provided between the oxygen generation unit and the activation region, and
the valve is closed when surface activation on the photocathode is not performed.

8. The electron beam application device according to claim 3 , wherein
the oxygen generation unit is an Ag thin plate disposed between an atmosphere and a vacuum of the activation region.

9. The electron beam application device according to claim 3 , wherein
the oxygen generation unit includes stabilized zirconia, an anode electrode and a cathode electrode respectively provided on surfaces facing the stabilized zirconia, and a third power source configured to energize the stabilized zirconia through the anode electrode and the cathode electrode.

10. The electron beam application device according to claim 9 , wherein
the stabilized zirconia is disposed on a wall of a vacuum container containing the electron gun,
the anode electrode and the cathode electrode are disposed on a vacuum side and an atmosphere side with a wall of the vacuum container interposed therebetween, and
the heat generating element is disposed outside the vacuum container.

11. The electron beam application device according to claim 1 , wherein
in the surface activation process, the computer repeatedly performs an alkali metal deposition process in which the alkali metal vapor is generated to deposit an alkali metal on the surface of the photocathode, and an oxygen introduction process in which oxygen is generated by the oxygen generation unit, and
in the oxygen introduction process, when the emission current amount of the photocathode at the time of satisfying the predetermined stop criterion is equal to or greater than a set value, the computer ends repetition of the alkali metal deposition process and the oxygen introduction process.

12. The electron beam application device according to claim 11 , wherein
the computer includes information indicating temporal degradation based on a usage history of the photocathode, and recommends replacement of the photocathode based on the information and an emission current amount of the photocathode when the surface activation process ends.

13. The electron beam application device according to claim 1 , wherein
the computer includes a correlation model having a parameter that affects a property of the photocathode as an explanatory variable and a control parameter in the surface activation process as an objective variable, and determines a control parameter in the surface activation process using the correlation model.

14. The electron beam application device according to claim 13 , wherein
the objective variable of the correlation model includes a lifetime of the photocathode, and
the control parameter, which is the objective variable of the correlation model, includes a deposition amount of an alkali metal from the alkali metal source and an oxygen introduction amount to the photocathode.

15. The electron beam application device according to claim 1 , wherein
the alkali metal source is a Cs source.

Assignees

• Hitachi High Tech Corp

Inventors

• Ohshima Takashi
• Morishita Hideo
• Ide Tatsuro
• Shichi Hiroyasu
• Ose Yoichi
• Katane Junichi

Classifications

• H01J2237/24535

  Beam current · CPC title

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J37/244

  Detectors; Associated components or circuits therefor · CPC title

• C23C14/14

  Metallic material, boron or silicon · CPC title

• H01J9/12

  of photo-emissive cathodes; of secondary-emission electrodes · CPC title