Ingot puller apparatus having a flange that extends from the funnel or from the silicon feed tube

Patent metadata

Field	Value
Publication number	US-12398483-B2
Application number	US-202418735755-A
Country	US
Kind code	B2
Filing date	Jun 6, 2024
Priority date	Jan 6, 2022
Publication date	Aug 26, 2025
Grant date	Aug 26, 2025

Abstract

Methods for growing single crystal silicon ingots that involve silicon feed tube inert gas control are disclosed. Ingot puller apparatus that include a flange that extends radially from a silicon funnel or from a silicon feed tube to reduce backflow of gases from the silicon feed tube into the growth chamber are also disclosed.

First claim

What is claimed is:

1. An ingot puller apparatus for manufacturing a single crystal silicon ingot, the ingot puller apparatus comprising:
a crucible assembly for holding a silicon melt;
a crystal puller housing that defines a growth chamber for pulling a silicon ingot from the melt, the crucible assembly being disposed within the growth chamber;
a silicon feed tube for adding solid silicon to the crucible assembly, the silicon feed tube extending into the growth chamber;
a funnel that at least partially extends into the silicon feed tube, the funnel and silicon feed tube being separated by a gap; and
a flange that extends from the silicon feed tube, the flange extending fully across the gap to reduce backflow of gases from the silicon feed tube into the growth chamber, the flange being disposed above the silicon feed tube and contacting an upper end of the silicon feed tube, the funnel extending through the flange.

2. The ingot puller apparatus as set forth in claim 1 wherein the flange is a quartz ring.

3. The ingot puller apparatus as set forth in claim 1 wherein the silicon feed tube comprises a receiving portion and a main portion having a diameter less than the receiving portion, the funnel being at least partially disposed within the receiving portion.

4. The ingot puller apparatus as set forth in claim 1 wherein the flange and crystal puller housing are separated by a gap.

5. An ingot puller apparatus for manufacturing a single crystal silicon ingot, the ingot puller apparatus comprising:
a crucible assembly for holding a silicon melt;
a crystal puller housing that defines a growth chamber for pulling a silicon ingot from the melt, the crucible assembly being disposed within the growth chamber;
a silicon feed tube for adding solid silicon to the crucible assembly, the silicon feed tube extending into the growth chamber;
a funnel that at least partially extends into the silicon feed tube, the funnel and silicon feed tube being separated by a gap; and
a flange that extends from the silicon feed tube, the flange extending fully across the gap to reduce backflow of gases from the silicon feed tube into the growth chamber, the flange being disposed within the silicon feed tube, the flange having an opening through which solid silicon passes.

6. The ingot puller apparatus as set forth in claim 5 wherein the flange is made of quartz.

Assignees

• Globalwafers Co Ltd

Inventors

• Pannocchia Matteo
• Porrini Maria

Classifications

• C30B35/002

  Crucibles or containers · CPC title

• C30B15/20

  Controlling or regulating (controlling or regulating in general G05) · CPC title

• C30B15/002

  Continuous growth · CPC title

• C30B15/12

  Double crucible methods · CPC title

• C30B15/02

  adding crystallising materials or reactants forming it in situ to the melt · CPC title