Process for preparing organotin compounds
US-2022153763-A1 · May 19, 2022 · US
Process for preparing organotin compounds
US12378265B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12378265-B2 |
| Application number | US-202318201100-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 23, 2023 |
| Priority date | Jan 29, 2021 |
| Publication date | Aug 5, 2025 |
| Grant date | Aug 5, 2025 |
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- Title
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Abstract
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Provided is a facile process for preparing certain organotin compounds having alkyl and alkylamino substituents. The process provides organotin precursor compounds, for example tris(dimethylamido)isopropyl tin, in a highly pure form. As such, the products of the process are particularly useful in the deposition of high-purity tin oxide films in, for example, extreme ultraviolet light (EUV) lithography techniques used in microelectronic device manufacturing.
First claim
Opening claim text (preview).
What is claimed is: 1. A compound of Formula (A-a): 2. The compound of claim 1 , in crystalline form as depicted in FIG. 1 . 3. A compound of Formula (A-d): 4. The compound of claim 3 , in crystalline form as depicted in FIG. 2 .
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Classifications
Purification, stabilisation, isolation · CPC title
Crystalline forms, e.g. polymorphs · CPC title
Energy storage using batteries · CPC title
- C07F7/2284Primary
Compounds with one or more Sn-N linkages · CPC title
- H01M4/387Primary
Tin or alloys based on tin · CPC title
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- What does patent US12378265B2 cover?
- Provided is a facile process for preparing certain organotin compounds having alkyl and alkylamino substituents. The process provides organotin precursor compounds, for example tris(dimethylamido)isopropyl tin, in a highly pure form. As such, the products of the process are particularly useful in the deposition of high-purity tin oxide films in, for example, extreme ultraviolet light (EUV) lith…
- Who is the assignee on this patent?
- Entegris Inc
- What technology area does this patent fall under?
- Primary CPC classification C07F7/2284. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Aug 05 2025 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 12 related publications on this page (citations in our corpus or others sharing the same primary CPC).