Monoalkyl tin compounds with low polyalkyl contamination, their compositions and methods

Patent metadata

Field	Value
Publication number	US-2021024552-A1
Application number	US-202017067232-A
Country	US
Kind code	A1
Filing date	Oct 9, 2020
Priority date	Apr 11, 2018
Publication date	Jan 28, 2021
Grant date	—

Abstract

A pure composition comprises a monoalkyltin trialkoxide compound represented by the chemical formula RSn(OR′) 3 or a monoalkyl tin triamide compound represented by the chemical formula RSn(NR′ 2 ) 3 and no more than 4 mole % dialkyltin compounds relative to the total tin amount, where R is a hydrocarbyl group with 1-31 carbon atoms, and wherein R′ is a hydrocarbyl group with 1-10 carbon atoms. Methods are described for the formation of the pure compositions. A solid composition comprises a monoalkyl triamido tin compound represented by the chemical formula RSn—(NR′COR″) 3 , where R is a hydrocarbyl group with 1-31 carbon atoms, and where R′ and R″ are independently a hydrocarbyl group with 1-10 carbon atoms. The compositions are suitable for the formation of resist compositions suitable for EUV patterning in which the compositions have a high EUV absorption.

First claim

What is claimed is:

1 . A composition comprising:
a monoalkyl triamido tin compound represented by the chemical formula RSn-(NR′COR″) 3 , wherein R is a hydrocarbyl group with 1-31 carbon atoms, and wherein R′ and R″ are independently a hydrocarbyl group with 1-10 carbon atoms.

2 . The composition of claim 1 wherein R′ is a methyl group.

3 . The composition of claim 1 wherein R″ is a methyl group.

4 . The composition of claim 1 wherein R′ is a methyl group and R″ is a methyl group.

5 . The composition of claim 4 wherein R comprises methyl (CH 3 —), ethyl (CH 3 CH 2 —), isopropyl (CH 3 CH 3 HC—), tert-butyl ((CH 3 ) 3 C—), tert-amyl (CH 3 CH 3 (CH 3 CH 2 )C—), sec-butyl (CH 3 (CH 3 CH 2 )HC—), neopentyl (CH 3 ) 3 CCH 2 —), cyclohexyl, cyclopentyl, cyclobutyl, or cyclopropyl.

6 . The composition of claim 5 wherein the composition is crystalline and comprises no more than about 1 mole percent dialkyl tin contaminants.

7 . The composition of claim 1 wherein R comprises methyl (CH 3 —), ethyl (CH 3 CH 2 —), isopropyl (CH 3 CH 3 HC—), tert-butyl ((CH 3 ) 3 C—), tert-amyl (CH 3 CH 3 (CH 3 CH 2 )C—), sec-butyl (CH 3 (CH 3 CH 2 )HC—), neopentyl (CH 3 ) 3 CCH 2 —), cyclohexyl, cyclopentyl, cyclobutyl, or cyclopropyl.

8 . The composition of claim 1 wherein the composition is crystalline and comprises no more than about 1 mole percent dialkyl tin contaminants.

9 . The composition of claim 1 wherein the composition is crystalline and comprises no more than about 0.5 mole percent dialkyl tin contaminants.

10 . A method for purifying a monoalkyl tin trialkoxide comprising distilling a blend of monoalkyl tin trialkoxide with a tetradentate non-planar complexing agent.

11 . The method of claim 10 wherein the tetradentate non-planar complexing agent comprises TREN.

12 . The method of claim 10 wherein the tetradentate non-planar complexing agent is present in an amount from about 0.5 mole % to about 15 mole % relative to the tin molar quantity.

13 . The method of claim 11 wherein the tetradentate non-planar complexing agent is present in an amount from about 0.5 mole % to about 15 mole % relative to the tin molar quantity.

14 . The method of claim 10 wherein the tetradentate non-planar complexing agent is present in an amount from about 0.5 mole % to about 10 mole % relative to the tin molar quantity.

15 . The method of claim 10 wherein the alkyl group is represented by R 1 R 2 R 3 C—, where IV and R 2 are independently an alkyl group with 1-10 carbon atoms, and R 3 is hydrogen or an alkyl group with 1-10 carbon atoms.

16 . The method of claim 13 wherein the alkyl group is represented by R 1 R 2 R 3 C—, where IV and R 2 are independently an alkyl group with 1-10 carbon atoms, and R 3 is hydrogen or an alkyl group with 1-10 carbon atoms.

17 . The method of claim 10 wherein the alkyl group comprises isopropyl, tert-butyl, tert-amyl, sec-butyl or neopentyl.

18 . The method of claim 13 wherein the alkyl group comprises isopropyl, tert-butyl, tert-amyl, sec-butyl or neopentyl.

19 . The method of claim 10 wherein the alkyl group comprises cyclohexyl, cyclopentyl, cyclobutyl, or cyclopropyl.

20 . The method of claim 10 wherein the alkoxide group is represented by —OR′ wherein R′ comprises a methyl group, ethyl group, isopropyl group, t-butyl group or a t-amyl group.

Assignees

• Inpria Corp

Inventors

• Edson Joseph B
• Lamkin Thomas J
• Earley William
• Wambach Truman
• Anderson Jeremy T

Classifications

• C07F7/2224

  Compounds having one or more tin-oxygen linkages · CPC title

• C07F7/2284 Primary

  Compounds with one or more Sn-N linkages · CPC title